JPS6358434A - Recording and reproducing method for electron ray image and storage type phosphor sheet with holder - Google Patents

Abstract

PURPOSE:To improve handling characteristic and durability by housing storage type phosphor sheets into a box type holder having an openable and closable cap part and projecting electron rays and electromagnetic waves respectively to the phosphor sheets while the cap part of the holder is held open. CONSTITUTION:The electron rays transmitted through a sample 38 is projected to the phosphor layer surface of the phosphor sheet 40' with a holder disposed on a photographing base 43 (imaging plane 39) when a shutter provided between a lens body part 1a and a photographing part 1b is opened. The electron ray energy image corresponding to the enlarged scattering image 38b of the sample is then stored and recorded on the sheet 40'. The sheet 40', after the recording, moves to a magazine 41b on the opposite side by passing between a pair of rollers 45b. The plural phosphor sheets 40 are successively fed to the photographing part and the electron microscopic image of the sample is recorded while the phosphor sheets are held in the holder.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of the Invention] The present invention relates to a method for recording and reproducing electron beam image information and a stimulable phosphor sheet with a holder used in the method. More specifically, the present invention relates to a method for recording and reproducing electron beam image information used in electron microscopic photography, and a stimulable phosphor sheet with a holder used in the method.

[Background of the Invention] Electron microscope devices and electron beam diffraction devices that irradiate a sample with an electron beam under vacuum to obtain a transmitted electron beam image or a reflected electron beam image have been known for some time. In an electron microscope device, a diffraction pattern of the sample is formed on the post-heat plane of the objective lens by an electron beam transmitted through the sample, and the diffraction rays interfere again to form an enlarged image of the sample. Therefore, if this enlarged image is projected by a projection lens, the enlarged image of the sample (
A scattering image) can be observed, and if the thermal plane is then projected, an enlarged diffraction pattern of the sample can be observed.

If an intermediate lens is disposed between the objective lens and the projection lens, the enlarged image (scattered image) or the diffraction pattern can be obtained as desired by adjusting the focal length of the intermediate lens. In addition, in electron beam diffraction devices, a diffraction pattern is obtained by irradiating the sample surface with an electron beam and recording the reflected diffraction rays (reflection method), and a diffraction pattern is obtained by recording the diffraction rays that pass through the sample. (transmission method).

Generally, as a means to visualize the above-mentioned enlarged image or diffraction pattern (hereinafter referred to as an electron beam image), a radiographic film is placed on the imaging plane and the electron beam image is recorded on it, or the image is A method is used in which an intensifier is arranged to amplify and project an electron beam image. In this case, a plurality of photographic films are stored together in a light-shielding magazine in advance, and each magazine is loaded and unloaded into the apparatus. However, photographic film has the drawbacks of low sensitivity to electron beams and cumbersome processing, whereas when using an image intensifier, the sharpness of the image is low and the image may be distorted. The problem is that it is easy to grow.

In addition, the obtained electron beam image usually undergoes image processing such as gradation processing and frequency enhancement processing, as well as three-dimensional image reconstruction using Fourier analysis, image analysis, and processing of various diffraction patterns. It is often performed. In order to carry out these processes, it is necessary to first read the visible image using a microphotometer and convert it into a digital signal, which is a complicated operation.

In order to solve these problems, the present applicant proposed an electron microscope image recording and reproduction method using a stimulable phosphor sheet made of a stimulable phosphor as an alternative to the conventional electron beam photography method using the above-mentioned photographic film. The method has already been proposed (Japanese Patent Application No. 59-240456, No. 59-240457,
No. 59-240458, etc.). According to this method, the energy of the irradiated electron beam is absorbed and stored in the stimulable phosphor, and an electron microscope image of the sample or an image of the accumulated electron beam energy is recorded on the phosphor sheet, and then the phosphor sheet By irradiating a suitable electromagnetic wave (excitation light) and photoelectrically detecting the emitted fluorescence (exhaustion light), an all-electron microscopic image can be directly obtained as an electrical signal. Therefore, the implantable phosphor sheet has higher sensitivity than photographic film, and this method significantly facilitates operations such as image processing.

In the stimulable phosphor sheet used for recording and reproducing electron beam images such as electron microscope images, the energy of the electron beam transmitted or reflected from the sample is low, so the stimulable phosphor sheet on the electron beam irradiation side It is desirable that no protective film or the like is provided on the surface, or even if it is provided, it is a very thin film. For this reason, the surface of the phosphor layer is damaged during operations such as recording an IF electron beam image on a phosphor sheet, reading the phosphor sheet on which image information is recorded, and erasing residual energy in an electron microscope. There are some issues that need to be improved, such as being easily damaged, the quality of the resulting image (that is, the accuracy of information) deteriorating easily, and the need to be careful when handling the phosphor sheet.

[Summary of the Invention] An object of the present invention is to provide a method for recording and reproducing electron beam image information with improved operability.

Another object of the present invention is to provide a stimulable phosphor sheet with a holder for use in the method, which is improved in handleability and durability.

The purpose of the above is.

1) By irradiating a stimulable phosphor sheet made of a stimulable phosphor with an electron beam that has passed through the sample or been reflected by the sample, the electron beam image of the sample is converted into an image of accumulated electron beam energy and is converted into a phosphor sheet. and 2) irradiating the stimulable phosphor sheet with electromagnetic waves to emit the electron beam energy stored in the phosphor sheet as fluorescence, and detecting this fluorescence with light 1. In a method for recording and reproducing electron beam image information, the stimulable phosphor sheet is housed in a box-shaped holder having an openable and closable lid, and A method for recording and reproducing electron beam image information according to the present invention, characterized in that in the recording step l) and the reading step 2), the phosphor sheet is irradiated with an electron beam and an electromagnetic wave, respectively, with the lid of the holder open. This can be achieved by

Further, the above object is to store a stimulable phosphor sheet having an exposed stimulable phosphor layer without a protective film on the surface in a removable state in a box-shaped holder having an openable/closable lid. This can be achieved by using the stimulable phosphor sheet with a holder of the present invention, in which the stimulable phosphor layer is built in so as to face the back surface of the lid.

In addition, in the present invention, the term "electron beam image information 1" is
It is used to include the electron beam image itself and various information corresponding to it.

According to the present invention, the stimulable phosphor sheet is always held in a holder and used without exposing its surface, especially the surface on the stimulable phosphor layer side that is irradiated with electron beams and excitation light. When it is necessary to expose the phosphor sheet, such as recording or reading an electron beam image of a sample, this is done by opening and closing the lid of the holder as appropriate. For this reason, when recording electron beam images, the surface of the phosphor sheet is damaged during stacking in the storage section in equipment such as electron microscopes and electron beam analysis devices, and when moving from the storage section to the imaging section. It is possible to prevent this. Similarly, when reading and erasing a phosphor sheet on which an electron beam image is recorded, it is necessary to prevent damage to the phosphor sheet when it is transported to a reading section and an erasing section in an image reading device, and when it is stacked in a storage section. I can do it.

In addition, since the phosphor sheet is attached to and removed from each device in units of holders, it is possible to prevent damage to the phosphor sheet, and at the same time, it is easy to handle the phosphor sheet (phosphor sheet with holder). Become.

In particular, in the stimulable phosphor sheet with a holder of the present invention, the phosphor sheet is not provided with a protective film or the like on its surface and the stimulable phosphor layer is exposed, and the phosphor sheet is covered with this phosphor layer. Since the holder is built in so that its surface faces the back surface of the lid of the holder, when the lid is opened during use, the electron beam and excitation light are directly irradiated onto the phosphor layer. As a result, the holder-attached phosphor sheet has high sensitivity and can maintain high quality electron beam images.

Therefore, the method of the present invention and the holder-attached phosphor sheet used therein have high sensitivity and high image quality (high sharpness, etc.).
It not only provides a good image, but also has excellent operability, ease of handling, and durability.

[Structure of the Invention] The stimulable phosphor sheet with a holder of the present invention will be described in detail with reference to the accompanying drawings.

A first embodiment of the stimulable phosphor sheet with a holder of the present invention
Shown in Figures a and 1b.

FIG. 1a is a perspective view showing an example of a phosphor sheet with a holder according to the present invention, and shows a state in which the phosphor sheet is incorporated. Figure tb is a sectional view taken along line I-1&a of figure 1a.

In FIGS. 1a and 1b, the phosphor sheet with a holder has a basic structure consisting of a box-shaped holder 11 and a stimulable phosphor sheet 12.

The box-shaped holder 11 includes a holder body 11A and a lid part 11.
B, both of which are joined at a joint portion 11C, and the lid portion 11B can be opened and closed at an angle of at least 90° in the vertical direction (in the direction of the arrow).

The holder 11 is slightly larger than the phosphor sheet 12, and can hold the phosphor sheet in a horizontal state after being loaded through the opening between the main body 11A and the lid 11B. At this time, the phosphor sheet 12 is loaded and held so that the stimulable phosphor layer is on the lid side. Note that the phosphor sheet 12 can be removed at any time. By lifting the lid part IIB upward and opening it, the surface of the loaded phosphor sheet 12 (phosphor layer surface) can be completely exposed.

Further, the holder 11 must be self-supporting and have sufficient mechanical strength to withstand movement within the apparatus and impact during stacking. Examples of materials for such holders include various metals such as aluminum and their alloys:
and plastic materials such as polycarbonate and polyethylene terephthalate.

The holder 11 preferably has a light-shielding property so that the built-in phosphor sheet is not exposed to visible light or the like in a bright room. Furthermore, inside an electron microscope, etc., X-rays are generated when an electron beam hits a lens, shutter, aperture, etc. on the optical axis. Holder 11
Examples of the material of the holder 11, which preferably has X-ray shielding properties, include a material with a large mass number such as lead, or a material in which such a material is layered on the above-mentioned plastic material.

It is preferable that the lid part 11B has a locking function for the main body 11A so that the phosphor sheet does not easily fall off from the holder.

In addition, in order to further improve the scratch resistance of the phosphor sheet and prevent it from shifting inside the holder, a cushioning material made of a foaming polymeric substance is placed on the inner surface of the holder main body 11A and the lid part 11B. It may be integrated into or provided separately.

FIG. 2a is a perspective view showing another embodiment of the phosphor sheet with a holder according to the present invention, in which the phosphor sheet is incorporated. FIG. 2b is a sectional view taken along the line ■-■ in FIG. 2a.

In FIG. 28.2b, the phosphor sheet with holder is composed of a box-shaped holder 21 and a stimulable phosphor sheet 22.

The holder 21 consists of a holder main body 21A and a lid part 21B, and parallel grooves (not shown) are provided on the inner sides of the upper sides of the opposite sides of the main body 21A, and grooves are provided in the upper parts of the other sides that are slightly thicker than the lid part. A large opening is provided and the lid part 21B
is supported by a groove and can be opened and closed in the left and right direction (in the direction of the arrow). Further, a narrow frame 2IC is provided around the upper part of the main body 21A toward the inside to prevent the lid part 21B from falling off easily.

The stimulable phosphor sheet 22 can be loaded through the opening between the main body 21A and the lid 21B, and can be loaded through the opening between the main body 21A and the lid 21B.
By pulling it out to the right (or left) and opening it, the surface of the phosphor layer of the loaded phosphor sheet 22 can be completely exposed.

The box-shaped holder, which is one component of the stimulable phosphor sheet with a holder of the present invention, is not limited to the two embodiments described above, and the box-shaped holder that is one component of the stimulable phosphor sheet with a holder of the present invention is not limited to the two embodiments described above. Various configurations of the holder main body and lid portion having various opening/closing mechanisms can be used as long as the holder body and lid portion can be exposed. For example, it is also possible to provide lid portions that can be opened and closed on both the upper and lower surfaces of the holder.

The basic structure of the stimulable phosphor sheet, which is the other component of the stimulable phosphor sheet with a holder of the present invention, has the following basic structure:
It consists of a support and a stimulable phosphor layer provided on one side of the support, and its basic structure is already known. The stimulable phosphor layer is composed of a stimulable phosphor and a binder containing and supporting the stimulable phosphor in a dispersed state. Up until now, in phosphor sheets used for X-ray photography, etc., a transparent protective film is usually provided on the surface of the phosphor layer (the surface that does not face the support) to protect the phosphor layer. Protects against chemical alteration or physical impact.

On the other hand, the phosphor sheet used in the holder-attached phosphor sheet of the present invention is disclosed in the above-mentioned patent application No. 59-240456.
As described in the specification, a protective film is not provided on the surface of the phosphor layer, and the surface of the phosphor layer is exposed.

A stimulable phosphor sheet is produced, for example, by adding a particulate stimulable phosphor and a binder to a suitable solvent such as alcohol, ketone, or ether, and mixing them thoroughly to form a stimulable phosphor sheet in the binder solution. It can be formed by preparing a coating liquid in which the phosphor is uniformly dispersed, applying it to a support, and then drying it.

Stimulable phosphors are phosphors that exhibit stimulated luminescence when irradiated with electron beams and then electromagnetic waves (excitation light); A phosphor that exhibits stimulated luminescence in a wavelength range of 300 to 500 nm is desirable. Examples of stimulable phosphors used in the stimulable phosphor sheet include SrS:Ce, Sm, and SrS:Eu, which are described in US Pat. No. 3,859,527.

Sm, Th02: Er, and La2O2S:Eu
, Sm, Z described in JP-A-55-12142
nS: Cu, Pb,
B a O-x A fL t O
3: Eu (however, 0.8≦X≦10), and M'
O・xSi02:A (However, M irises are Mg, Ca, Sr
, Zn, Cd, or Ba, and A is Ce, Tb, E
u, Tm, Pb, 7 sentences, Bi.

or Mn, and X is 0.5≦X≦2.5)
, described in Japanese Patent Application Laid-Open No. 55-12143 (Ba
t-X-F+ Mg, Ca y) FX:aEu" (where, X is at least one of C1 and Br,
and a is lO-@≦a≦5xlO-"), LnO described in JP-A-55-12144
X: xA (Ln is at least one of La, Y, Gd, and Lu, X is at least one of C1 and B, A is at least one of Ce and Tb, and X is O<x<0.1)
.

It is described in Japanese Patent Application Laid-Open No. 55-12145 (Ba
, z, M”X) FX: yA (Tatashi, M2” is Mg
, Ca, Sr, Zn, and Cd, X is at least one of Ci, Br, and I, and A is Eu, Tb, Ce, Tm, Dy, Pr, Ho, and N.
At least one of d, Yb, and Er, where X is 0≦X≦0.6, and y is O≦y≦0.2)
, M described in Japanese Patent Application Laid-open No. 55-160078
"FX-xA:yLn[However, M" is Ba, Ca, S
at least one of r, Mg, Zn, and Cd,
A is Bed, MgO1CaO1SrO, Ba02Z n
O, Al 203, Y2O,, La2O3, In2
O3, 5i02, TiO□, ZrO2, GeO
2, at least one of SnO2, Nb2O5, Ta20s, and ThO2, Ln is Eu, Tb
, Ce, Tm.

Dy, Pr, Ho, Nd, Yb, Er, Sm
, and at least one of Gd, X is C1, Br
, and I, and X and y
are 5xio-6≦X≦0.5 and o<y≦, respectively.
0.2] is described in Japanese Patent Application Laid-Open No. 56-116777 (
Ba, -x 9M ” x ) F 2 ・a Ba
X 2 :yEu, zA [However, M” is beryllium, magnesium, calcium, strontium, zinc,
and at least one of cadmium, X is chlorine,
At least one of bromine and iodine, A is at least one of zirconium and scandium, and a, x, y, and 2 are each 0.5≦a≦1.
A phosphor represented by the following composition formula where 25.0≦X≦1.10, y≦y≦2X10-', and O<z≦10-2, is described in JP-A-57-23673. C.B.
a+-x, M” x) F 2 ・aBaX2 :yEu
, zB [where Ml is helium, magnesium,
at least one of calcium, strontium, zinc, and cadmium, X is at least one of chlorine, bromine, and iodine, and a, x, y, and Z
are respectively 0.5≦a≦1.25.0≦X≦1.10-
6≦y≦2×10−1, and O<z≦2×10−1] A phosphor is described in JP-A-57-23675 (B
a l-X , M ” x ) F 2 ・a B
a X 2 :yEu, zA
at least one of zinc and cadmium, X is at least one of chlorine, bromine, and iodine, A is at least one of arsenic and silicon, a, x
, y, and 2 are respectively 0.5≦a≦1.25, O≦
X≦1.101≦y≦2×10−′, and O<z≦5
A phosphor represented by the composition formula:
X: xCe [However, MIN is Pr, Nd, Pm
, Sm, Eu, Tb, Dy, Ho, Er, ", m, Yb
, and at least one trivalent metal selected from the group consisting of Bi, X is either one or both of C1 and Br, and X satisfies O<x<0.1]. A phosphor represented by B described in JP-A No. 58-206678
a l+ X M x /2 L X /2 F X
: y E u ” [However, M is Li, Na,
Represents at least one alkali metal selected from the group consisting of Rh and Cs; L is Sc, Y, La, C
e, Pr, Nd, Pm, Sm, Gd, Tb, Dy, Ho
, Er, Tm, Yb, Lu, An, Ga, In
, and Tl; X represents at least one kind of halogen selected from the group consisting of CfL, Br, and ■; and X represents 1O-2≦X ≦0.5, y is o<y≦0
．． A phosphor represented by the composition formula of
X-xA: yEu2° [Tap, X is C1, Br,
and at least one kind of halogen selected from the group consisting of I, and zA is a calcined product of a tetrafluoroborous compound: and X is 10-6≦X≦01, and y is o<
y≦0.1] A phosphor represented by the composition formula: BaF described in JP-A No. 59-47289
X-xA:yEu2° [where, X is at least one halogen selected from the group consisting of Cl, Br, and I; A fired product of at least one compound selected from the group of hexafluoro compounds consisting of salts of monovalent or trivalent metals;
And X is 10-8≦X≦0.1. y is o<y≦0
．． A phosphor represented by the composition formula 1], JP-A-59
-BaFX-xNa described in Publication No. 56479
X': aEu2° [where X and Xo are each at least one of C1, Br, and I,
X and a are 0<x≦2 and O<a≦0, respectively
．． A phosphor represented by the composition formula of
X−xNaX′:yEu”: zA [However, Ml
is at least one alkaline earth metal selected from the group consisting of Ba, Sr, and Ca;
are at least one kind of halogen selected from the group consisting of C1, Br, and I, respectively; A is V, Cr
, Mn, Fe, Co, and Ni; and X is 0<x≦2, y
is o<y≦0.2, and 2 is O<z≦1O−2], JP-A-59-7520
M"FX-aM'X' - described in Publication No. 0
bM' Seal X"2・cM"X"3 ・xA: yE
u'' [However, M'' is at least one alkaline earth metal selected from the group consisting of Ba, Sr, and Ca, and M + is at least one selected from the group consisting of Li, Na, Rh, and Cs. It is a kind of alkali metal; M'! is at least one divalent metal selected from the group consisting of Be and Mg: M! A! 2. ,G
at least one trivalent metal selected from the group consisting of a, In, and 1; A is a metal oxide; X is at least one halogen selected from the group consisting of CfL, Br, and I; ;X', Xo, and X'' are F, Cl.

Br, and at least one kind of halogen selected from the group consisting of I; and a is O≦a≦2, and b is O≦
b≦10-', c is 0≦C≦1O-2, and a + b
+c≧10-6, X is 0<x≦0.5, y is o<y≦0.2] A phosphor described in JP-A-60-84381 MIX being done
2-aMIX' 2 :xEu" [Tatashi, Mll is B
at least one alkaline earth metal selected from the group consisting of a, Sr and Ca: X and Xo are C1,
At least one halogen selected from the group consisting of Br and I.

and X*X”; and a is 0.1≦a≦10.0
．． A stimulable phosphor represented by the composition formula where x is O<x≦0.2, M' described in JP-A-60-101173
FX-aM'X': xEu2° [However, MI is B
Ml is at least one alkaline earth metal selected from the group consisting of a, Sr and Ca; Ml is Rh and Cs;
at least one alkali metal selected from the group consisting of; X is Cl.

Xo is at least one halogen selected from the group consisting of Br and I; Xo is at least one halogen selected from the group consisting of F, C1, Br and I; and a and X each satisfy O≦a≦4. 0 and O<x
≦0.2] is a stimulable phosphor represented by the composition formula M'X:xBi [t, Ml is Rb and at least one alkali metal selected from the group consisting of Cs; X is at least one halogen selected from the group consisting of C1, Br, and I; and X is 0
A stimulable phosphor represented by the composition formula <a numerical value in the range of x≦0.2].

Furthermore, M ″X 2 ·a M ″
xEu'' The stimulable phosphor may contain the following additives in the following proportions per mole of M''X2·aM''X'2.

bM described in JP-A-60-166379
IX'' (where Ml is at least one alkali metal selected from the group consisting of Rb and Cs, and Xo
is at least one kind of halogen selected from the group consisting of F, Cf; L, Br and I, and b is o<b≦
10.0); b described in JP-A-60-221483 is
・d M "X"" 3 (However, the 1M seal is S
At least one trivalent metal selected from the group consisting of c, Y, La, Gd and Lu, and X'' halogen, and s, c and d are respectively O≦b≦2.0.0≦C≦
2゜0.0≦d≦2.0, and 2×10−
1≦l)+C+d): JP-A-60-228592
yB (however, y is 2XlO''
4≦y≦2xlO−”t'al); JP-A-60-228
bA described in Publication No. 593 (however, 2A is 5i
02, p, o, and b is 10-4≦b≦2×l.
O-''): bSin described in the specification of Japanese Patent Application No. 59-240452 (however, b is 0<b≦3xl
bSnX”2 described in Japanese Patent Application No. 59-240454 (where X is at least one halogen selected from the group consisting of F, 0, Br and I) , and b satisfies o<b≦1o−a): bCsX”·cSnX”□ described in Japanese Patent Application No. 78033/1983.

(However, X″ and X″′ are respectively F and C1°Br
and I, and b and C are each o<b≦1
O80 and 10-"≦C≦2×1O-2): and bCsX"・y L n " (where X" is F, C1
, Br, and ■, and Ln is Sc, Y, Ce, Pr, and Nd.
, Sm, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu, and b and y are each o<b≦
10.0 and 10-"≦y≦1.8XIO-').

Among the above-mentioned stimulable phosphors, divalent europium-activated alkaline earth metal halide phosphors and rare earth element-activated rare earth oxyhalide phosphors are particularly preferred because they exhibit high-intensity stimulated luminescence. However, the stimulable phosphor used in the present invention is not limited to the above-mentioned phosphors, but any phosphor that exhibits stimulated luminescence when irradiated with an electron beam and then irradiated with excitation light can be used. There may be.

Examples of binders for the margin stimulable phosphor layer include proteins such as gelatin, polysaccharides such as dextran, or natural polymeric substances such as gum arabic; and polyvinyl butyral, polyvinyl acetate, nitrocellulose, Binders represented by synthetic polymeric substances such as ethyl cellulose, vinylidene chloride/vinyl chloride copolymer, polyalkyl (meth)acrylate, vinyl chloride/vinyl acetate copolymer, polyurethane, cellulose acetate butyrate, polyvinyl alcohol, linear polyester, etc. can be mentioned. Particularly preferred among such binders are nitrocellulose, linear polyesters, polyalkyl (meth)acrylates, mixtures of nitrocellulose and linear polyesters, and mixtures of nitrocellulose and polyalkyl (meth)acrylates. be. Note that these binders may be crosslinked with a crosslinking agent.

The mixing ratio of the binder and the stimulable phosphor varies depending on the characteristics of the desired stimulable phosphor sheet, the type of phosphor, etc., but generally the mixing ratio of the binder and the stimulable phosphor is 1:1. It is selected from the range of 1:Zoo (weight ratio), and is particularly preferably selected from the range of 1:8 to 1:40 (weight ratio).

The support may be arbitrarily selected from various materials used as supports for intensifying screens (or intensifying screens) in conventional X-ray photography, or materials known as supports for stimulable phosphor sheets. be able to. Examples of such materials include films of plastic substances such as cellulose acetate, polyester, polyethylene terephthalate, polyamide, polyimide, triacetate, polycarbonate, metal sheets such as aluminum foil, aluminum alloy foil, regular paper, baryta paper, resin coated Examples include paper, pigment paper containing pigments such as titanium dioxide, and paper sized with polyvinyl alcohol. However, when considering the characteristics and handling of the stimulable phosphor sheet as an information recording material, a particularly preferred material for the support in the present invention is a plastic film. This plastic film may be kneaded with a light-absorbing substance such as carbon black, or may be kneaded with a light-reflecting substance such as titanium divolucide.

In known stimulable phosphor sheets, the phosphor layer is added in order to strengthen the bond between the support and the phosphor layer, or to improve the sensitivity or image quality (g sharpness 1 graininess) of the stimulable phosphor sheet. A polymeric substance such as gelatin is coated on the surface of the support on the side where it is provided to form an adhesion-imparting layer, or a light-reflecting layer made of a light-reflecting substance such as titanium dioxide, or a light-absorbing substance such as carbon black. It is known to provide a light absorption layer made of. These various layers can also be provided on the support of the sperm storage phosphor sheet used in the present invention.

Furthermore, as described in Japanese Unexamined Patent Publication No. 58-200200 by the present applicant, in order to improve the sharpness of the obtained image, the surface of the support on the phosphor layer side (the phosphor layer of the support When an adhesion-imparting layer, a light-reflecting layer, a light-absorbing layer, or the like is provided on the side surface, minute irregularities may be formed on the surface (meaning the surface).

In the present invention, the layer thickness of the phosphor layer of the stimulable phosphor sheet is usually 300 lumen or less. However, the thickness of the phosphor layer is preferably within the range of 10 to 150 gm.

Note that the stimulable phosphor layer does not necessarily need to be formed by directly applying a coating liquid onto a support as described above; for example, it is not necessary to form the stimulable phosphor layer by separately applying a coating liquid onto a sheet such as a glass plate, metal plate, or plastic sheet. After a phosphor layer is formed by coating and drying, it is pressed onto a support, or the support and the phosphor layer may be bonded using an adhesive or the like. Alternatively, as described in JP-A-61-61100 and JP-A-61-80100, a coating solution containing dispersed stimulable phosphor and a coating solution consisting only of a binder may be simultaneously layered. By applying the
A certain region on the surface side of the phosphor layer may be made to consist essentially only of the binder.

In addition, the stimulable phosphor sheet contains colorants such as those disclosed in JP-A-55-163500 and JP-A-57-96300 for the purpose of improving the sharpness of one image. It's okay. Alternatively, for the purpose of improving image sharpness, the stimulable phosphor layer may contain white powder as described in JP-A-55-146447.

Next, the method for recording and reproducing electron beam image information of the present invention will be explained in detail by taking as an example the case where the stimulable phosphor sheet with a holder shown in FIG. 1 is used in an electron microscope apparatus. Note that the holder-attached stimulable phosphor sheet used has light-shielding and X-ray-shielding properties in both the holder body and lid.

FIG. 3 is a diagram schematically showing an electronic aim mirror device preferably used in carrying out the recording/reproducing method of the present invention.

In FIG. 3, the electron microscope armor N31 consists of an electron microscope mirror body part 31a and an imaging part 31b provided below the mirror body part 31a. The mirror body section 31a and the photographing section 31b are maintained in a vacuum state by well-known means during operation of the electron microscope.

The mirror body part 31a is an electron with a −-like velocity! ! An electron gun 33 that emits I32, at least one focusing lens 34 consisting of a magnetic lens, an electrostatic lens, etc. that focuses the electron beam 32 onto the sample surface, and a sample stage 35. It is composed of an objective lens 36 and a projection lens 37 similar to the focusing lens 34. Sample stand 35
The electron beam 32 transmitted through the sample 38 placed above is refracted by the objective lens 36, resulting in an enlarged scattered image 38a of the sample 38.
form. This enlarged scattered image 38a is projected onto the imaging plane 39 by the projection lens 37 (38b in the figure).

The photographing section 31b includes magazines 41a and 41b that can accommodate a plurality of stimulable phosphor sheets 40 with holders in a stacked manner.
, coil springs 42a and 42b that support the holder-equipped phosphor sheet in each magazine, a photographing table 43, and a feeding mechanism 44 for moving the holder-equipped phosphor sheet 40 to the photographing table 43. a roller 45a that assists in moving the phosphor sheet with a holder;
45b, and an opening/closing mechanism 46 that opens and closes the lid portion 40'B of the phosphor sheet 40' with a holder on the photographing stand 43.

When photographing an electron microscope image, first, the uppermost holder-attached stimulable phosphor sheet 40 stacked in the magazine 41a is supported at the same height as the photographing table 43 by a coil spring 42a, and is moved by a pair of rollers by a feeding mechanism 44. 45a and is fixed at a predetermined position on the photographing table 43 (phosphor sheet 40' with holder). Next, the phosphor sheet 4 with a holder is opened and closed by an opening/closing mechanism 46 equipped with a suction cup at the tip.
The 0" boulder lid portion 40'B is opened upward at an angle of about 90" to expose the surface of the phosphor layer of the built-in phosphor sheet.

When the shutter (not shown) provided between the mirror unit 1a and the imaging unit ib is opened, the phosphor layer surface of the holder-attached phosphor sheet 40' arranged on the imaging platform 43 (i.e., the imaging surface 39) is exposed. The sample 38 is irradiated with an electron beam that has passed through the sample 38, and an electron beam energy image (latent image) corresponding to the enlarged scattered image 38b of the sample is accumulated and recorded on the phosphor sheet.

After recording, the holder cover 40°B is closed again by the opening/closing mechanism 46, and then the holder-attached phosphor sheet 40' is moved to the magazine 41b on the opposite side through a pair of rollers 45b. In this way, the plurality of holder-attached phosphor sheets 40 are sequentially sent to the photographing section, and an electron microscope image of the sample is recorded with the phosphor sheets housed in the holders.

The phosphor sheet with a holder on which the electron microscope image has been recorded is taken out from the electron microscope device and then attached to an image reading device (not shown), where the electron microscope image is read and erased. , a known device can be used.

In the reading device, the holder-attached phosphor sheet is first conveyed directly from the storage section to the reading section. In the reading section, after being fixed in a predetermined position, the holder cover is opened by the same means as above, and the surface of the phosphor layer of the built-in phosphor sheet is chronologically exposed to excitation light such as He-Ne laser light. is scanned. Fluorescence emitted from the phosphor layer by scanning the excitation light is detected by a photodetector such as a photomultiplier tube and converted into an electrical signal.

The electrical signal read by the photodetector is sent to an image processing circuit, subjected to necessary image processing, and then sent to an image reproduction device. Image processing includes, for example, gradation processing, frequency emphasis processing, density processing, subtraction processing, and addition processing performed for the purpose of making images easier to see; three-dimensional image reconstruction using Fourier analysis, image binarization, and Image analysis for particle size measurement, etc.; and processing of diffraction patterns (
(Analysis of product information, elucidation of lattice constants, dislocations, lattice defects, etc.)
The following processing can be mentioned.

The image reproduction device may be a display such as a CRT,
It may be a recording device that performs optical scanning recording on photographic film, or it may be one that records and saves data on a storage device such as a magnetic tape. In this way, the electron beam image information can be visualized directly as an electron microscope image, or can be displayed as a combination of numerical values, symbols, etc. through the above image processing.

The holder-attached phosphor sheet that has been read is transported to an erasing section within the reading device. In the erasing section, the holder lid is opened again and the surface of the phosphor layer of the phosphor sheet is irradiated with erasing light such as a fluorescent lamp. This light irradiation can remove afterimages remaining in the phosphor layer and noise caused by radioactive elements accumulated during the reading process.

In the above-mentioned reading section, in order to eliminate the influence of fluctuations in recording conditions or to obtain an electron S microscopic image with excellent observability, the transmission magnification recording state of the electron beam image accumulated and recorded on the stimulable phosphor sheet is , the recording pattern determined by the properties of the sample or the recording method, etc. is grasped before outputting a visible image for specimen observation, and the reading gain is adjusted to an appropriate value based on this grasped accumulated record information. In order to obtain reproduced images with excellent observability, it is preferable to perform appropriate signal processing, and to determine the recording scale factor so that the resolution is optimized according to the contrast of the recorded pattern. be done.

As a method of grasping the M product recording information of a phosphor sheet before outputting a visible image, for example, Japanese Patent Laid-Open No. 58-8
A method such as that shown in Japanese Patent No. 9245 can be used. That is, it can be carried out by scanning the phosphor sheet with excitation light of lower energy than the energy of the excitation light to be irradiated during the reading operation (reading) (pre-reading). Then, the accumulated recorded information of the phosphor sheet is grasped in a pre-read operation, and then, in the main read operation, the read gain is appropriately adjusted based on the pre-read information or signal processing is performed to obtain suitable image information. Can be done.

Furthermore, as a photoelectric reading means for detecting stimulated luminescence light emitted from a phosphor sheet, in addition to using a photomultiplier tube as described above, solid-state photoelectric conversion elements such as photoconductors and photodiodes can be used. (Special application 1988-8)
No. 6226, No. 58-86227, No. 58-2193
13 and 58-219314, and JP-A-58-121874). In this case, a large number of solid-state photoelectric conversion elements may be configured to cover the entire surface of the phosphor sheet, and may be integrated with the phosphor sheet, or may be placed close to the phosphor sheet. Good too. Further, the photoelectric reading means may be a plurality of photoelectric conversion elements or a linearly connected line sensor, or one solid-state photoelectric conversion element corresponding to one pixel may be scanned and moved over the entire surface of the phosphor sheet. It may also be configured to do so.

In addition to a point light source such as a laser, the reading light source in the above case may be a line light source such as an array of light emitting diodes (LEDs), semiconductor lasers, etc. arranged in a row. By performing reading using such a device, the reading efficiency of the stimulated luminescence light emitted from the phosphor sheet is increased, and at the same time, the solid angle of light reception is increased to improve the S/N.
can be increased. Further, since the obtained electrical signal is converted into a time series by electrical processing of a photodetector rather than by time-series irradiation of excitation light, it is possible to increase the reading speed.

Although an example of recording and reproducing an enlarged scattering image of a sample using a transmitted enlarged electron beam has been described above, the method of the present invention can also be applied to recording and reproducing the above-described diffraction pattern of a sample.

When carrying out the method for recording and reproducing electron beam image information of the present invention, if the stimulable phosphor sheet with a holder is not light-shielding, the imaging section of the electron microscopy device is equipped with an erasing light source, An erasing operation may be performed on the phosphor sheet before recording. Or, without using a separate reader,
By using an integrated device that is integrated with the reading section and the erasing section in the imaging section of the electronic m-beam device, after the recording operation of the electron beam image, the reading operation and the erasing operation are performed continuously within the imaging section. It is also possible. Further, in the above, the case where a phosphor layer without any protective film or the like or an exposed sheet is used as the phosphor sheet is explained, but in the method of the present invention, M product recording of an electron beam image is possible. A thin film such as a protective film may be provided on the surface of the phosphor layer as much as possible.

[Brief explanation of the drawing]

FIG. 1a is a perspective view showing an example of a stimulable phosphor sheet with a holder according to the present invention. FIG. 1b is a sectional view taken along line II in FIG. 1a. FIG. 2a is a perspective view showing another example of the stimulable phosphor sheet with a holder of the present invention. Figure 2b is a sectional view taken along the line ■-■ in Figure tJ2a. FIG. 3 is a schematic diagram showing an example of an electron microscope device that can be used to implement the method for recording and reproducing electron beam image information of the present invention. 11.21: Box-shaped holder, 11A, 21A: Main body, 11B, 21B, 40'B: Lid, 12.22: Storable phosphor sheet, 31: Electron microscope device, 31a: Mirror body, 31b: Photography Part 32: Electron beam, 39: Imaging surface of electron microscope. 40.40": Storable phosphor sheet with holder, patent applicant Fuji Photo Film Co., Ltd. Patent attorney agent
Yasushi Yanagawa Younger brother Figure 1a IA Figure 20 Figure 1b

Claims (1)

[Claims] 1.1) By irradiating a stimulable phosphor sheet made of a stimulable phosphor with an electron beam transmitted through the sample or reflected by the sample, an electron beam image of the sample is converted into an electron beam image of the sample. a step of recording on a phosphor sheet as an energy accumulation image; and 2) irradiating the stimulable phosphor sheet with electromagnetic waves to emit the electron beam energy accumulated in the phosphor sheet as fluorescence, and photoelectrically converting this fluorescence In a method for recording and reproducing electron beam image information, the stimulable phosphor sheet is housed in a box-shaped holder having an openable and closable lid. and a method for recording and reproducing electron beam image information, characterized in that in the recording step 1) and the reading step 2), the phosphor sheet is irradiated with an electron beam and an electromagnetic wave, respectively, with the lid of the holder open. 2. Before the above recording step 1) and/or reading step 2)
After that, by opening the lid of the holder containing the stimulable phosphor sheet and irradiating the phosphor sheet with light or heat, the remaining radiation energy stored in the phosphor sheet is erased. A method for recording and reproducing electron beam image information according to claim 1. 3. The stimulable phosphor sheet has an exposed stimulable phosphor layer on its surface without a protective film, and the stimulable phosphor sheet is in a removable state and the stimulable phosphor layer is attached to the lid. 2. The method for recording and reproducing electron beam image information according to claim 1, wherein the method is housed in a holder so as to face the back surface of the holder. 4. Electron beam image information according to claim 1, wherein the lid of the holder has light-shielding properties and/or X-ray blocking properties, and has a locking function with the holder body. How to record and play. 5. A stimulable phosphor sheet having an exposed stimulable phosphor layer without a protective film on its surface is removably placed in a box-shaped holder with an openable lid and the stimulable phosphor layer is A stimulable phosphor sheet with a holder that has a built-in phosphor layer facing the back of the lid. 6. The stimulable phosphor sheet with a holder according to claim 5, wherein the lid of the holder has a light shielding property and/or an X-ray shielding property. 7. The stimulable phosphor sheet with a holder according to claim 5, wherein the lid of the holder has a locking function with the holder main body. 8. The stimulable phosphor sheet with a holder according to claim 5, wherein a cushioning material is provided on the inner surface of the holder. 9. The stimulable phosphor sheet with a holder according to claim 5, wherein the stimulable phosphor layer of the stimulable phosphor sheet has a layer thickness in the range of 10 to 150 μm.