JPS6357736U - - Google Patents
Info
- Publication number
- JPS6357736U JPS6357736U JP15165286U JP15165286U JPS6357736U JP S6357736 U JPS6357736 U JP S6357736U JP 15165286 U JP15165286 U JP 15165286U JP 15165286 U JP15165286 U JP 15165286U JP S6357736 U JPS6357736 U JP S6357736U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- mask
- cushion material
- comes
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002131 composite material Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 238000000427 thin-film deposition Methods 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims 2
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
Description
第１図は本考案の薄膜蒸着用複合マスクの一実
施例の構造を示す断面図、第２図は従来例の構造
を示す断面図である。
１…金属マスク、２…有機樹脂等のクツシヨン
材。
FIG. 1 is a sectional view showing the structure of an embodiment of a composite mask for thin film deposition of the present invention, and FIG. 2 is a sectional view showing the structure of a conventional example. 1...Metal mask, 2...Cushion material such as organic resin.
Claims (1)
材を備えてなることを特徴とする薄膜蒸着用複合
マスク。[Claims for Utility Model Registration] A composite mask for thin film deposition, which is a mask used when forming a thin film, and is characterized by comprising a cushion material on the side of the metal mask that comes into contact with the lower thin film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15165286U JPS6357736U (en) | 1986-10-01 | 1986-10-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15165286U JPS6357736U (en) | 1986-10-01 | 1986-10-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6357736U true JPS6357736U (en) | 1988-04-18 |
Family
ID=31068914
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15165286U Pending JPS6357736U (en) | 1986-10-01 | 1986-10-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6357736U (en) |
-
1986
- 1986-10-01 JP JP15165286U patent/JPS6357736U/ja active Pending