JPS6357734U - - Google Patents
Info
- Publication number
- JPS6357734U JPS6357734U JP1986151468U JP15146886U JPS6357734U JP S6357734 U JPS6357734 U JP S6357734U JP 1986151468 U JP1986151468 U JP 1986151468U JP 15146886 U JP15146886 U JP 15146886U JP S6357734 U JPS6357734 U JP S6357734U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor manufacturing
- wafer transfer
- operation unit
- transfer area
- area side
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000012423 maintenance Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986151468U JPS6357734U (it) | 1986-10-03 | 1986-10-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986151468U JPS6357734U (it) | 1986-10-03 | 1986-10-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6357734U true JPS6357734U (it) | 1988-04-18 |
Family
ID=31068564
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986151468U Pending JPS6357734U (it) | 1986-10-03 | 1986-10-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6357734U (it) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02239611A (ja) * | 1989-03-14 | 1990-09-21 | Fujitsu Ltd | 半導体製造装置 |
| JP2012231150A (ja) * | 2012-06-13 | 2012-11-22 | Hitachi Ltd | 真空処理装置及び真空処理方法 |
-
1986
- 1986-10-03 JP JP1986151468U patent/JPS6357734U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02239611A (ja) * | 1989-03-14 | 1990-09-21 | Fujitsu Ltd | 半導体製造装置 |
| JP2012231150A (ja) * | 2012-06-13 | 2012-11-22 | Hitachi Ltd | 真空処理装置及び真空処理方法 |