JPS6357571U - - Google Patents

Info

Publication number

JPS6357571U

JPS6357571U JP15141686U JP15141686U JPS6357571U JP S6357571 U JPS6357571 U JP S6357571U JP 15141686 U JP15141686 U JP 15141686U JP 15141686 U JP15141686 U JP 15141686U JP S6357571 U JPS6357571 U JP S6357571U

Authority

JP

Japan

Prior art keywords

gas

chlorine

oxygen gas

concentration

gas concentration

Prior art date

1986-10-03

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims 3
• 229910001882 dioxygen Inorganic materials 0.000 claims 3
• IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
• KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 claims 2
• MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims 2
• ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims 1
• 239000000460 chlorine Substances 0.000 claims 1
• 229910052801 chlorine Inorganic materials 0.000 claims 1
• 238000001514 detection method Methods 0.000 claims 1
• 239000007789 gas Substances 0.000 claims 1
• 239000011261 inert gas Substances 0.000 claims 1
• 229910052757 nitrogen Inorganic materials 0.000 claims 1
• QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
• 238000010586 diagram Methods 0.000 description 2
• 229920006395 saturated elastomer Polymers 0.000 description 1
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1

Cited By (1)