JPS6357379U - - Google Patents
Info
- Publication number
- JPS6357379U JPS6357379U JP15109786U JP15109786U JPS6357379U JP S6357379 U JPS6357379 U JP S6357379U JP 15109786 U JP15109786 U JP 15109786U JP 15109786 U JP15109786 U JP 15109786U JP S6357379 U JPS6357379 U JP S6357379U
- Authority
- JP
- Japan
- Prior art keywords
- turbo molecular
- molecular pump
- pump
- rotational speed
- rotary pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15109786U JPS6357379U (cs) | 1986-10-01 | 1986-10-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15109786U JPS6357379U (cs) | 1986-10-01 | 1986-10-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6357379U true JPS6357379U (cs) | 1988-04-16 |
Family
ID=31067852
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15109786U Pending JPS6357379U (cs) | 1986-10-01 | 1986-10-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6357379U (cs) |
-
1986
- 1986-10-01 JP JP15109786U patent/JPS6357379U/ja active Pending
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