JPS6357353U - - Google Patents
Info
- Publication number
- JPS6357353U JPS6357353U JP15040386U JP15040386U JPS6357353U JP S6357353 U JPS6357353 U JP S6357353U JP 15040386 U JP15040386 U JP 15040386U JP 15040386 U JP15040386 U JP 15040386U JP S6357353 U JPS6357353 U JP S6357353U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- purge
- discharge pipe
- chamber
- casing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010926 purge Methods 0.000 claims description 8
- 239000003463 adsorbent Substances 0.000 claims description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15040386U JPH0318689Y2 (pl) | 1986-09-30 | 1986-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15040386U JPH0318689Y2 (pl) | 1986-09-30 | 1986-09-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6357353U true JPS6357353U (pl) | 1988-04-16 |
| JPH0318689Y2 JPH0318689Y2 (pl) | 1991-04-19 |
Family
ID=31066516
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15040386U Expired JPH0318689Y2 (pl) | 1986-09-30 | 1986-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0318689Y2 (pl) |
-
1986
- 1986-09-30 JP JP15040386U patent/JPH0318689Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0318689Y2 (pl) | 1991-04-19 |
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