JPS6356972A - Laser exciting device - Google Patents

Laser exciting device

Info

Publication number
JPS6356972A
JPS6356972A JP20108486A JP20108486A JPS6356972A JP S6356972 A JPS6356972 A JP S6356972A JP 20108486 A JP20108486 A JP 20108486A JP 20108486 A JP20108486 A JP 20108486A JP S6356972 A JPS6356972 A JP S6356972A
Authority
JP
Japan
Prior art keywords
discharge
discharge electrode
capacitor
anode
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20108486A
Other languages
Japanese (ja)
Inventor
Takekuni Azuma
吾妻　健国
Akira Usui
明 臼井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP20108486A priority Critical patent/JPS6356972A/en
Publication of JPS6356972A publication Critical patent/JPS6356972A/en
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
    • H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To stabilize the laser oscillation by using a porous metal plate having a large number of openings as one of a pair of primary discharge electrodes to be oppositely placed in the laser exciting space, and disposing pin-shaped preliminary discharge electrodes on the reverse side of this porous primary discharge electrode with the openings being respectively matched with axis centers. CONSTITUTION:When a switch 10 is turned on for a short time with a capacitor C1 being charged by a d.c. power supply 7 through resistors R1 and R2, the high voltage of the capacitor C1 is applied across an anode 3a and a cathode 2 and simultaneously also applied across the anode 3a and the common connecting terminal of a capacitor 12. By this, corona discharge occurs between preliminary discharge electrodes 11 and the anode 3a, and since the preliminary discharge electrodes 11 are positioned on the central axis of openings B, the discharge light is introduced into a primary discharge space A and ionizes a CO2 gas. And, as the charging voltage of the capacitor 12 increases, the primary discharge space A is destroyed, thereby forming a uniform glow discharge. With this, stable laser oscillation can be generated for a long period of time.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、グロー放電を起こしてレーザ媒質ガスを励
起させるレーザ励起装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a laser excitation device that excites a laser medium gas by generating a glow discharge.

〔従来の技術〕[Conventional technology]

この種のレーザとしては、エキシマワーザ（Ｅｘｃｉｍ
ｅｒ　Ｌａ５ｅｒ）あるいは横方向励起式大気圧；χ酸
ガスレーザ（Ｔｒａｎｓｖｅｒｓｅｌｙ　Ｅｘｃｉｔｅ
ｄ　Ａｔ！Ｉｏｓｐｈｅｒ−ｉｃ　ｐｒｅｓｓｕｒｅ　
００２　Ｌａ５ｅｒ、以下ＴＥＡ　ｃｏ２レーザと言う
）等がある。第４図は従来のＴＥＡ　ｃｏ２レーザ励起
装置の概略構成図である。同図において、レーザ本体（
１）は主放電電極として所定の間隙で対向する陰極（２
）と陽極（３）とを備えている。このうち、陰極（２）
は幅８．５ｃ＋ａ　、　＆さ５０ｃｍのアルミ板で、陽
極（３）は幅８．５ｃｍ　、長さＢＯｃｍのステンレス
金１網で形成され、これらが４ｃｍの間隔で対向してい
る。そして、図面で見た陽極（３）の下方１ｃ＋ａの位
置に予備放電電極対（４）、（５）が２列設置されてい
る。このうち、予備放電電極（４）は真鍮平板でなり、
予備放電電極（５）は測針で、１列につき　１３７木配
列されている。また、予備放電電極対（４）。This type of laser is known as an excimer laser (Excim laser).
er La5er) or transversely excited atmospheric pressure; χ acid gas laser (Transversely Excite
d At! Iospher-ic pressure
002 La5er (hereinafter referred to as TEA co2 laser), etc. FIG. 4 is a schematic diagram of a conventional TEA co2 laser excitation device. In the figure, the laser body (
1) is a main discharge electrode with a cathode (2) facing each other with a predetermined gap.
) and an anode (3). Of these, cathode (2)
is an aluminum plate with a width of 8.5c+a and a length of 50cm, and the anode (3) is formed of a stainless wire mesh with a width of 8.5cm and a length of BOcm, and these are opposed to each other at an interval of 4cm. Two rows of preliminary discharge electrode pairs (4) and (5) are installed at a position 1c+a below the anode (3) as seen in the drawing. Among these, the preliminary discharge electrode (4) is made of a flat brass plate.
The preliminary discharge electrodes (5) are measuring needles and are arranged in 137 trees per row. Also, a preliminary discharge electrode pair (4).

（５）の下方２．５ｃｍの位置に紫外光用の反射鏡（６
）が設置されている。かかるレーザ本体（１）を駆動す
るために直流電源（７）を備え、その正極および負極に
はそれぞれ抵抗器（ＲＯ）を介して、コンデンサ（Ｃ１
）、（Ｃ２）の直列回路が接続されている。この場合、
コンデンサ（Ｃｚ　）、（Ｃ２）の相互接合点は接地さ
れると共に、陽ｉ　（３）および予備放電電極（４）に
接続されている。また、コンデンサ（Ｃ１）と抵抗器（
Ｒａ）との相互接合点が抵抗器（Ｒ１）およびグロー放
電を効果的に行なわせるためのＬＣ回路（８）を介して
陽極（３）に接続されている。一方、コンデンサ（Ｃ２
）と抵抗器（ＲＯ）との相互接合点は、パルス電源（９
）によって短時間だけオン状態にされるスイッチ（１０
）と、抵抗器（Ｒ２）とを介して予備放電電極（５）に
接続されている。なお、レーザ本体（りの内部にはレー
ザ媒質ガスであるＣＯ２含有ガスが一気圧程度充填され
ている。(5) A reflector for ultraviolet light (6
) is installed. A DC power supply (7) is provided to drive the laser main body (1), and a capacitor (C1
), (C2) are connected in series. in this case,
The mutual junction of the capacitors (Cz), (C2) is grounded and connected to positive i (3) and to the pre-discharge electrode (4). In addition, a capacitor (C1) and a resistor (
The mutual junction with Ra) is connected to the anode (3) via a resistor (R1) and an LC circuit (8) for effective glow discharge. On the other hand, the capacitor (C2
) and the resistor (RO) are connected to the pulse power supply (9
) is turned on for a short time (10
) and the preliminary discharge electrode (5) via a resistor (R2). Note that the inside of the laser body is filled with CO2-containing gas, which is a laser medium gas, at about one atmosphere.

以下、このレーザ励起装置の概略動作について説明する
。The general operation of this laser excitation device will be described below.

先ず、直流電源（７）によってコンデンサ（Ｃ１）。First, the capacitor (C1) is connected to the DC power supply (7).

（Ｃ２）に高圧の電荷が蓄植されたあとに、パルス電源
（９）によってスイー、チ（１０）を短時間オン状態に
するとコンデンサ（Ｃ２）の電圧がそれぞれ抵抗器（Ｒ
２）を介して予備放電電極（４）、（５）間に印加、さ
れてこの両者間にコロナ放電が発生する。そして、その
放電光はレーザ媒質ガスを弱く電離させるが、反射鏡（
６）はより多くの放電光を主放電空間に導く機能を持っ
ている。このとき、陰極（２）および陽極（３）間には
コンデンサ（Ｃ１）の電圧が印加されており、予備電離
されたレーザ媒質がアーク放電に移行する前に放電を終
らせるべくＬＣ回路（８）が設けられている。そして、
この短時間のグロー放電によってレーザ媒質ガスが励起
され、レーザ発振が起こる。After high-voltage charge has been stored in (C2), when switch and switch (10) are turned on for a short time by pulse power supply (9), the voltage of capacitor (C2) is transferred to each resistor (R
2) is applied between the preliminary discharge electrodes (4) and (5) to generate a corona discharge between them. The discharge light weakly ionizes the laser medium gas, but the reflecting mirror (
6) has the function of guiding more discharge light into the main discharge space. At this time, the voltage of the capacitor (C1) is applied between the cathode (2) and the anode (3), and the LC circuit (8 ) is provided. and,
This short-time glow discharge excites the laser medium gas, causing laser oscillation.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

上記のように構成された従来のレーザ励起装置にあって
は、予備放電電ａｌｉ（４）、（５）間の放電光を主放
電空間へより多く入射させるために反射鏡（６）を設け
ているけれども、この反射鏡（６）としては材質的にア
ルミニウム（１）に限定され、これ以外の金属は有効に
作用しなかった０周知の如くこのアルミニウム（ＡＭ）
は経時変化が大きく、このためにレーザ発振の安定性に
欠けたり、その分だけ寿命が短くなったりするという問
題点があった。In the conventional laser excitation device configured as described above, a reflecting mirror (6) is provided to allow more discharge light between the preliminary discharge electrodes ali (4) and (5) to enter the main discharge space. However, the material of this reflecting mirror (6) is limited to aluminum (1), and other metals do not work effectively.As is well known, this aluminum (AM)
has a large change over time, which causes problems such as a lack of stability in laser oscillation and a correspondingly shortened lifespan.

この発明は上記の問題点を解決するためになされたもの
で、簡易に構成でしかも寿命要素なしで予備放電光を効
率よく主放電空間へ導くことのできるレーザ励磁装置を
得ることを目的とする。This invention has been made to solve the above problems, and aims to provide a laser excitation device that has a simple configuration and can efficiently guide preliminary discharge light to the main discharge space without any lifespan factors. .

〔問題点を解決するための手段〕[Means for solving problems]

この発明に係るレーザ励起装置は、レーザ励起空間に対
向配置される一対の主放電電極のうち、少なくとも一方
に多数の開孔を有する多孔性金属板を用い、主放電空間
から見て多孔性の主放電電極の裏面に、それぞれ開孔と
軸心を一致させてピン状の予備放電電極を配設したもの
である。A laser excitation device according to the present invention uses a porous metal plate having a large number of holes in at least one of a pair of main discharge electrodes arranged opposite to each other in a laser excitation space, and has a porous metal plate having a large number of holes when viewed from the main discharge space. Pin-shaped preliminary discharge electrodes are arranged on the back side of the main discharge electrode, with the axes aligned with the respective openings.

〔作用〕[Effect]

この発明においては、予備放電電極と多孔性の主放電電
極との間で予備放電させるが、このときピン状の予備放
電電極を各開孔の軸心に配置しであるため、予備放電光
は主放電電極の開孔を通して極めて高効率にて主放電電
極に導かれる。この場合、各開孔部にピン状の予備放電
電極を配設するだけで反射鏡が不要化されるため、簡易
な構成でしかも寿命要素のないものが実現できる。In this invention, a preliminary discharge is caused between a preliminary discharge electrode and a porous main discharge electrode. At this time, since the pin-shaped preliminary discharge electrode is arranged at the axis of each opening, the preliminary discharge light is It is guided to the main discharge electrode with extremely high efficiency through the opening in the main discharge electrode. In this case, simply arranging a pin-shaped pre-discharge electrode in each opening eliminates the need for a reflecting mirror, so a simple configuration and no lifespan factor can be realized.

〔実施例〕〔Example〕

第１図はこの発明の一実施例の概略構成図であり、図中
第４図と同一の符号を付したものはそれぞれ同一の要素
を示している。ここで、レーザ本体（ｌａ）は所定の間
隙で対向する陰極（２）および陽極（３ａ）を備えてい
る。このうち、陰極（２）は上述したと同様にアルミ板
を用いるが、陽極（３ａ）は多数の開孔Ｂを有する金属
板、例えばステンレス板を用いている。この陽極（３ａ
）の下方、すなわち、主放電空間Ａから見て陽極（３ａ
）の裏面には、ピン状の予備放電電極（！１）が各開孔
Ｂに対応して多数個設けられている。ピン状の予備放電
電極（１工）は第２図に拡大して示すように、予備励起
用のコンデンサ（１２）の端部から突出する状態でコン
デンサ（１２）に固定され、さらに、尖端が少なくとも
陽極、陰極間の間隙よりも小さい間隔で主放電空間Ａを
向き、その軸心が開孔Ｂの軸心と一致するようにコンデ
ンサ（１２）がネジ（１４）によって支持板（１３）に
固定されている。FIG. 1 is a schematic diagram of an embodiment of the present invention, and the same reference numerals as in FIG. 4 indicate the same elements. Here, the laser main body (la) includes a cathode (2) and an anode (3a) facing each other with a predetermined gap. Among these, the cathode (2) uses an aluminum plate as described above, but the anode (3a) uses a metal plate having a large number of holes B, for example, a stainless steel plate. This anode (3a
), that is, when viewed from the main discharge space A, the anode (3a
), a large number of pin-shaped preliminary discharge electrodes (!1) are provided corresponding to each opening B. The pin-shaped pre-discharge electrode (1 piece) is fixed to the capacitor (12) in a state protruding from the end of the capacitor (12) for pre-excitation, as shown in the enlarged view in Figure 2, and the tip is The capacitor (12) is attached to the support plate (13) with a screw (14) so that the main discharge space A faces the main discharge space A with an interval smaller than the gap between the anode and the cathode, and its axis coincides with the axis of the opening B. Fixed.

次に、直流電源（７）の正極は抵抗器（Ｒ１）およびコ
ンデンサ（Ｃ１）を介して陰極（２）に接続され、負極
は陽極（３ａ）に接続されている。予備放電電極（１１
）が一端に接合された形になっているコンデンサ（１２
）の他端は相互に接続されていると共に陰極（２）にも
接続されている。また、抵抗（Ｒ１）と直流電源（７）
の負極との間に、パルス電源（９）によって短時間オン
状態にすることのできるスイッチ（１０）が接続され、
さらに、陰極（２）および陽極（３ａ）間に抵抗器（Ｒ
１）が接続されている。Next, the positive electrode of the DC power supply (7) is connected to the cathode (2) via the resistor (R1) and the capacitor (C1), and the negative electrode is connected to the anode (3a). Pre-discharge electrode (11
) is connected to one end of the capacitor (12
) are connected to each other and also to the cathode (2). Also, resistor (R1) and DC power supply (7)
A switch (10) that can be turned on for a short time by a pulse power source (9) is connected between the negative electrode of the
Furthermore, a resistor (R
1) is connected.

上記のように構成された実施例動作を以下に説明する。The operation of the embodiment configured as described above will be described below.

コンデンサ（Ｃ１）が抵抗（Ｒ１）および（Ｒ２）を介
して直流電源（７）によって十分に充電された状態にて
、スイッチ（１０）を短時間オン状態にすると、コンデ
ンサ（Ｃ１）の高電圧が陽極（３ａ）と陰極（２）との
間に印加されると同時に、陽極（３ａ）とコンデンサ（
１２）の共通接続端子との間にも印加される。これによ
って、先ず、予備放電電極（１１）と陽極（３ａ）との
間にコロナ放電が発生するが、予備放電電極（１１）は
開孔Ｂの中心軸上に位置しているので、放電光が極めて
効率的に主放電空間Ａに導入され、ここに供給されてい
るＣ０２ガスを′￥Ｌ離させる。そして、コンデン（１
２）の充電電圧が高くなると共に、主放電空間Ａが破壊
し、均質・−様なグロー放電が形成される。When the switch (10) is turned on for a short time while the capacitor (C1) is sufficiently charged by the DC power supply (7) through the resistors (R1) and (R2), the high voltage of the capacitor (C1) is applied between the anode (3a) and the cathode (2), and at the same time, the anode (3a) and the capacitor (
12) is also applied between the common connection terminal. As a result, corona discharge first occurs between the preliminary discharge electrode (11) and the anode (3a), but since the preliminary discharge electrode (11) is located on the central axis of the opening B, the discharge light is introduced into the main discharge space A very efficiently, and the CO2 gas supplied there is separated by '\L. And condensate (1
As the charging voltage of 2) increases, the main discharge space A is destroyed and a homogeneous -like glow discharge is formed.

しかして、この実施例によれば、陽極に多孔性の金属板
を用い、この金属板の各開孔部に、軸心を一致させてビ
ン状の予備放電電極を設けるという簡単な構成により放
電光を効率よく主放電空間に導くことができ、しかも、
寿命の要素を除去したことから長期間に亘って安定なレ
ーザ発振を起こすことができる。According to this embodiment, a porous metal plate is used as the anode, and a bottle-shaped pre-discharge electrode is provided in each opening of the metal plate so that the axes coincide with each other. Light can be efficiently guided to the main discharge space, and
Since the element of lifetime has been removed, stable laser oscillation can occur over a long period of time.

なお、上記実施例ではコンデンサ（１１）によってパル
ス波形を整形する、いわゆる、コンデンサ移行形のもの
について説明したが、コンデンサ（１１）の代わりに抵
抗器を用いることもできる。In the above embodiment, a so-called capacitor transition type device in which the pulse waveform is shaped by the capacitor (11) has been described, but a resistor may be used instead of the capacitor (11).

第３図は抵抗器を用いた場合の予備放電電極の構成を示
したもので、予備放電電極（１１）は陽極（３ａ）に対
して第２図と同様な位置関係になるようにピン支持板（
１５）によって保持されている。この場合、ピン支持板
（Ｉ５）は絶縁物でなり、ネジ（１４）によって抵抗器
（１６）の一端がそれぞれ予備放電電極（１１）に接続
されている。また、ピン支持板（１５）の下方には導電
性のもう一つの支持板（１７）が設けられ、これに固定
抵抗（１６）の他端がそれぞれ接続されている。Figure 3 shows the configuration of the preliminary discharge electrode when a resistor is used, and the preliminary discharge electrode (11) is supported by pins so that it has the same positional relationship as in Figure 2 with respect to the anode (3a). Board (
15). In this case, the pin support plate (I5) is made of an insulator, and one end of the resistor (16) is connected to each preliminary discharge electrode (11) by a screw (14). Further, another conductive support plate (17) is provided below the pin support plate (15), and the other ends of the fixed resistors (16) are respectively connected to this.

このように構成しても、第１図に示したと同様、簡単な
構成により放電光を効率的に主放電空間Ａに導くことが
でき、しかも、長期間に亘って安定なレーザ発振を起こ
すことができる。Even with this configuration, as shown in FIG. 1, discharge light can be efficiently guided to the main discharge space A with a simple configuration, and stable laser oscillation can be caused over a long period of time. Can be done.

なお、上記実施例では主放電電極のうちの陽極のみ多孔
性の金ｌｌ板を用いて、その裏面にビン状の予備放電電
極を設ける場合について説明したが、陽極の代わりに陰
極側を同様な構成にしても、あるいは、陽極、陰極の両
方とも第２図または、第３図に示すように構成してもよ
い。In the above embodiment, only the anode of the main discharge electrode is made of a porous gold plate, and a bottle-shaped preliminary discharge electrode is provided on the back side of the porous gold plate. Alternatively, both the anode and the cathode may be constructed as shown in FIG. 2 or 3.

なおまた、上記実施例ではＴＥＡ　ＣＯ２レーザの場合
について述べたが、高圧力のレーザガスを用いたパルス
放電励起によって発振を行なわせるエキシマレーザにも
適用し得ることは言うまでもない。Furthermore, in the above embodiment, the case of a TEA CO2 laser has been described, but it goes without saying that the present invention can also be applied to an excimer laser in which oscillation is performed by pulsed discharge excitation using a high-pressure laser gas.

〔発明の効果〕〔Effect of the invention〕

以上の説明によって明らかなように、この発明によれば
主放電電極に多孔性の金属板を用い、この金属板の裏面
にビン状の予備放電電極を設けるだけの極めて簡易な構
成によって高効率にて予備放電光を主放電空間に導入し
畳、しかも、寿命要素を含まないことから、長期間に亘
って安定なレーザ発振を起こすことができる。As is clear from the above explanation, according to the present invention, high efficiency can be achieved by using a porous metal plate as the main discharge electrode and using an extremely simple structure that only requires a bottle-shaped preliminary discharge electrode on the back side of the metal plate. Since the pre-discharge light is introduced into the main discharge space and there are no life-span factors, stable laser oscillation can be caused over a long period of time.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図はこの発明の一実施例の概略構成図、第２図は同
実施例の主要部を拡大して示した側面図、第３図は他の
実施例の主要部を示す側面図、第４図は従来のレーザ励
起装置の概略構成図である。 （！ａ）・・・レーザ本体、（２）・・・陰極、（３ａ
）・・・陽極、　　　　（１１）・・・予備放電電極、
（１２）・・・コンデンサ、（１６）・・・抵抗器。 なお、各図中、同一符号は同−又は相当部分を示す。FIG. 1 is a schematic configuration diagram of an embodiment of the present invention, FIG. 2 is a side view showing an enlarged main part of the same embodiment, and FIG. 3 is a side view showing main parts of another embodiment. FIG. 4 is a schematic diagram of a conventional laser excitation device. (!a)... Laser body, (2)... Cathode, (3a
)...anode, (11)...preliminary discharge electrode,
(12)...Capacitor, (16)...Resistor. In each figure, the same reference numerals indicate the same or corresponding parts.

Claims (2)

【特許請求の範囲】[Claims] （１）レーザ媒質ガスを供給するレーザ励起空間に、一
対の主放電電極を対向配置すると共に、この主放電電極
の近傍に予備放電電極を設け、この予備放電電極の放電
光によって前記主放電電極間にグロー放電を起こして前
記レーザ媒質ガスを励起するレーザ励起装置において、
前記主放電電極の少なくとも一方に多数の開孔を有する
多孔性金属板を用い、グロー放電空間から見てこの多孔
性の主放電電極の裏面にそれぞれ前記開口と軸心を一致
させてピン状の予備放電電極を配設し、このピン状の予
備放電電極と前記多孔性の主放電電極との間に予備放電
させることを特徴とするレーザ励起装置。(1) A pair of main discharge electrodes are disposed facing each other in a laser excitation space that supplies a laser medium gas, and a preliminary discharge electrode is provided near the main discharge electrode, and the discharge light of the preliminary discharge electrode is applied to the main discharge electrode. In a laser excitation device that excites the laser medium gas by generating a glow discharge in between,
A porous metal plate having a large number of holes is used for at least one of the main discharge electrodes, and a pin-shaped metal plate is formed on the back surface of the porous main discharge electrode when viewed from the glow discharge space, with the axes aligned with the openings. A laser excitation device characterized in that a preliminary discharge electrode is provided and a preliminary discharge is caused between the pin-shaped preliminary discharge electrode and the porous main discharge electrode. （２）前記ピン状の予備放電電極と前記多孔性の主放電
電極との間隙を、前記主放電電極相互の間隙よりも小さ
くしたことを特徴とする特許請求の範囲第１項記載のレ
ーザ励起装置。(2) Laser excitation according to claim 1, characterized in that the gap between the pin-shaped preliminary discharge electrode and the porous main discharge electrode is smaller than the gap between the main discharge electrodes. Device.
JP20108486A 1986-08-27 1986-08-27 Laser exciting device Pending JPS6356972A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20108486A JPS6356972A (en) 1986-08-27 1986-08-27 Laser exciting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20108486A JPS6356972A (en) 1986-08-27 1986-08-27 Laser exciting device

Publications (1)

Publication Number Publication Date
JPS6356972A true JPS6356972A (en) 1988-03-11

Family

ID=16435125

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20108486A Pending JPS6356972A (en) 1986-08-27 1986-08-27 Laser exciting device

Country Status (1)

Country Link
JP (1) JPS6356972A (en)

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