JPS635640U - - Google Patents

Info

Publication number
JPS635640U
JPS635640U JP9667086U JP9667086U JPS635640U JP S635640 U JPS635640 U JP S635640U JP 9667086 U JP9667086 U JP 9667086U JP 9667086 U JP9667086 U JP 9667086U JP S635640 U JPS635640 U JP S635640U
Authority
JP
Japan
Prior art keywords
support
pair
wafer
bar
boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9667086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9667086U priority Critical patent/JPS635640U/ja
Publication of JPS635640U publication Critical patent/JPS635640U/ja
Pending legal-status Critical Current

Links

JP9667086U 1986-06-26 1986-06-26 Pending JPS635640U (US20030204162A1-20031030-M00001.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9667086U JPS635640U (US20030204162A1-20031030-M00001.png) 1986-06-26 1986-06-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9667086U JPS635640U (US20030204162A1-20031030-M00001.png) 1986-06-26 1986-06-26

Publications (1)

Publication Number Publication Date
JPS635640U true JPS635640U (US20030204162A1-20031030-M00001.png) 1988-01-14

Family

ID=30962660

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9667086U Pending JPS635640U (US20030204162A1-20031030-M00001.png) 1986-06-26 1986-06-26

Country Status (1)

Country Link
JP (1) JPS635640U (US20030204162A1-20031030-M00001.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03103044U (US20030204162A1-20031030-M00001.png) * 1990-02-05 1991-10-25

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5135283A (en) * 1974-09-20 1976-03-25 Kyoji Okamoto Ic hotomasukutonimochiirukeesu

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5135283A (en) * 1974-09-20 1976-03-25 Kyoji Okamoto Ic hotomasukutonimochiirukeesu

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03103044U (US20030204162A1-20031030-M00001.png) * 1990-02-05 1991-10-25

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