JPS635631U - - Google Patents
Info
- Publication number
- JPS635631U JPS635631U JP9772186U JP9772186U JPS635631U JP S635631 U JPS635631 U JP S635631U JP 9772186 U JP9772186 U JP 9772186U JP 9772186 U JP9772186 U JP 9772186U JP S635631 U JPS635631 U JP S635631U
- Authority
- JP
- Japan
- Prior art keywords
- dry etching
- measuring device
- groove depth
- etching apparatus
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001312 dry etching Methods 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 3
- 238000005259 measurement Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9772186U JPS635631U (enExample) | 1986-06-27 | 1986-06-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9772186U JPS635631U (enExample) | 1986-06-27 | 1986-06-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS635631U true JPS635631U (enExample) | 1988-01-14 |
Family
ID=30964966
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9772186U Pending JPS635631U (enExample) | 1986-06-27 | 1986-06-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS635631U (enExample) |
-
1986
- 1986-06-27 JP JP9772186U patent/JPS635631U/ja active Pending
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