JPS635627U - - Google Patents

Info

Publication number
JPS635627U
JPS635627U JP10076486U JP10076486U JPS635627U JP S635627 U JPS635627 U JP S635627U JP 10076486 U JP10076486 U JP 10076486U JP 10076486 U JP10076486 U JP 10076486U JP S635627 U JPS635627 U JP S635627U
Authority
JP
Japan
Prior art keywords
substrate
gas
gas blow
box
port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10076486U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10076486U priority Critical patent/JPS635627U/ja
Publication of JPS635627U publication Critical patent/JPS635627U/ja
Pending legal-status Critical Current

Links

JP10076486U 1986-06-28 1986-06-28 Pending JPS635627U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10076486U JPS635627U (enrdf_load_stackoverflow) 1986-06-28 1986-06-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10076486U JPS635627U (enrdf_load_stackoverflow) 1986-06-28 1986-06-28

Publications (1)

Publication Number Publication Date
JPS635627U true JPS635627U (enrdf_load_stackoverflow) 1988-01-14

Family

ID=30970891

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10076486U Pending JPS635627U (enrdf_load_stackoverflow) 1986-06-28 1986-06-28

Country Status (1)

Country Link
JP (1) JPS635627U (enrdf_load_stackoverflow)

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