JPS6356261U - - Google Patents
Info
- Publication number
- JPS6356261U JPS6356261U JP14829186U JP14829186U JPS6356261U JP S6356261 U JPS6356261 U JP S6356261U JP 14829186 U JP14829186 U JP 14829186U JP 14829186 U JP14829186 U JP 14829186U JP S6356261 U JPS6356261 U JP S6356261U
- Authority
- JP
- Japan
- Prior art keywords
- reaction chamber
- shutter
- chamber
- entrance
- incident
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 238000007599 discharging Methods 0.000 claims 1
- 239000002994 raw material Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14829186U JPS6356261U (OSRAM) | 1986-09-27 | 1986-09-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14829186U JPS6356261U (OSRAM) | 1986-09-27 | 1986-09-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6356261U true JPS6356261U (OSRAM) | 1988-04-15 |
Family
ID=31062420
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14829186U Pending JPS6356261U (OSRAM) | 1986-09-27 | 1986-09-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6356261U (OSRAM) |
-
1986
- 1986-09-27 JP JP14829186U patent/JPS6356261U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| IT1020892B (it) | Procedimento per la deposizione di una pellicola antiriflettente sulla superficie di un materiale ottico | |
| JPS62104438U (OSRAM) | ||
| ATE368297T1 (de) | Verfahren zur säuberung einer vorrichtung zum herstellen von dünnfilm-silizium | |
| EP0166787A4 (en) | COLOR IMAGE DETECTOR. | |
| JPS6356261U (OSRAM) | ||
| CA927009A (en) | Thin film optoelectronic semiconductor device using light coupling | |
| JPS5648032A (en) | Phosphor screen forming method for color picture tube | |
| JPS6237918U (OSRAM) | ||
| JPS61129334U (OSRAM) | ||
| JPS6035250B2 (ja) | 可撓性フイルムの接着方法 | |
| JPS5311525A (en) | Pickup tube face plate for color camera | |
| JPS5617079A (en) | Solid imazing device | |
| JPH01108925U (OSRAM) | ||
| JPS6453758U (OSRAM) | ||
| JPH01100461U (OSRAM) | ||
| JPH05166759A (ja) | 半導体製造装置及びそのプラズマクリーニング方法 | |
| JPS57159125A (en) | Analog-to-digital converter | |
| JPS5642387A (en) | Manufacture of solid state color image pickup element board | |
| JPS6443751A (en) | Semiconductor biosensor and its production | |
| JPS62129060U (OSRAM) | ||
| JPS547942A (en) | Production of optical diffusive plate | |
| JPH0545672B2 (OSRAM) | ||
| JPS6144830U (ja) | 光ｃｖｄ装置 | |
| JPS5355977A (en) | Rotary type chemical evaporation thin film formation device | |
| JPH01172025U (OSRAM) |