JPS6356257U - - Google Patents

Info

Publication number
JPS6356257U
JPS6356257U JP14828386U JP14828386U JPS6356257U JP S6356257 U JPS6356257 U JP S6356257U JP 14828386 U JP14828386 U JP 14828386U JP 14828386 U JP14828386 U JP 14828386U JP S6356257 U JPS6356257 U JP S6356257U
Authority
JP
Japan
Prior art keywords
inner container
container
mounting portion
deposition substrate
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14828386U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14828386U priority Critical patent/JPS6356257U/ja
Publication of JPS6356257U publication Critical patent/JPS6356257U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP14828386U 1986-09-27 1986-09-27 Pending JPS6356257U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14828386U JPS6356257U (enrdf_load_stackoverflow) 1986-09-27 1986-09-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14828386U JPS6356257U (enrdf_load_stackoverflow) 1986-09-27 1986-09-27

Publications (1)

Publication Number Publication Date
JPS6356257U true JPS6356257U (enrdf_load_stackoverflow) 1988-04-15

Family

ID=31062404

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14828386U Pending JPS6356257U (enrdf_load_stackoverflow) 1986-09-27 1986-09-27

Country Status (1)

Country Link
JP (1) JPS6356257U (enrdf_load_stackoverflow)

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