JPS6355759B2 - - Google Patents
Info
- Publication number
- JPS6355759B2 JPS6355759B2 JP57156567A JP15656782A JPS6355759B2 JP S6355759 B2 JPS6355759 B2 JP S6355759B2 JP 57156567 A JP57156567 A JP 57156567A JP 15656782 A JP15656782 A JP 15656782A JP S6355759 B2 JPS6355759 B2 JP S6355759B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic shield
- ion source
- outer layer
- vacuum chamber
- neutralization cell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000006386 neutralization reaction Methods 0.000 claims description 33
- 150000002500 ions Chemical class 0.000 claims description 24
- 230000007935 neutral effect Effects 0.000 claims description 22
- 239000002245 particle Substances 0.000 claims description 22
- 238000002347 injection Methods 0.000 claims description 20
- 239000007924 injection Substances 0.000 claims description 20
- 230000002093 peripheral effect Effects 0.000 claims description 8
- 230000003472 neutralizing effect Effects 0.000 claims 4
- 239000000696 magnetic material Substances 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Landscapes
- Plasma Technology (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57156567A JPS5946800A (ja) | 1982-09-10 | 1982-09-10 | 中性粒子入射装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57156567A JPS5946800A (ja) | 1982-09-10 | 1982-09-10 | 中性粒子入射装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5946800A JPS5946800A (ja) | 1984-03-16 |
| JPS6355759B2 true JPS6355759B2 (enrdf_load_stackoverflow) | 1988-11-04 |
Family
ID=15630600
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57156567A Granted JPS5946800A (ja) | 1982-09-10 | 1982-09-10 | 中性粒子入射装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5946800A (enrdf_load_stackoverflow) |
-
1982
- 1982-09-10 JP JP57156567A patent/JPS5946800A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5946800A (ja) | 1984-03-16 |
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