JPS6355426U - - Google Patents
Info
- Publication number
- JPS6355426U JPS6355426U JP14770586U JP14770586U JPS6355426U JP S6355426 U JPS6355426 U JP S6355426U JP 14770586 U JP14770586 U JP 14770586U JP 14770586 U JP14770586 U JP 14770586U JP S6355426 U JPS6355426 U JP S6355426U
- Authority
- JP
- Japan
- Prior art keywords
- molecular beam
- beam source
- heater
- heating
- vapor deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000001451 molecular beam epitaxy Methods 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
- 230000005855 radiation Effects 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14770586U JPS6355426U (enExample) | 1986-09-29 | 1986-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14770586U JPS6355426U (enExample) | 1986-09-29 | 1986-09-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6355426U true JPS6355426U (enExample) | 1988-04-13 |
Family
ID=31061310
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14770586U Pending JPS6355426U (enExample) | 1986-09-29 | 1986-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6355426U (enExample) |
-
1986
- 1986-09-29 JP JP14770586U patent/JPS6355426U/ja active Pending