JPS6355103U

JPS6355103U -

Info

Publication number: JPS6355103U
Application number: JP14886886U
Authority: JP
Priority date: 1986-09-30
Filing date: 1986-09-30
Publication date: 1988-04-13
Also published as: JPH049533Y2

Description

[Brief explanation of the drawing]

第１図乃至第３図は本考案の一実施例に係わる
フラツトネス測定装置を示すものであり、第１図
は外観を示す斜視図、第２図は装置全体を示す正
面図、第３図は要部を示す断面図であり、第４図
は従来のフラツトネス測定装置を示す斜視図、第
５図は距離測定センサの測定原理を説明するため
の模式図である。２１…フラツトネス測定機本体、２４…測定台
、２８…ケース、２９…上面、３１…サーボモー
タ、３２…測定アーム、３３…方形窓、３３ａ，
３３ｂ…窓枠、３４…丸棒（棒体）、３６…距離
測定センサ、３７…貫通孔、３９，４０…レール
、４１，４２…リニア軸受体、４３…ボールねじ
、４４…ナツト、４６…送りモータ。 1 to 3 show a flatness measuring device according to an embodiment of the present invention, FIG. 1 is a perspective view showing the external appearance, FIG. 2 is a front view showing the entire device, and FIG. 3 is a flatness measuring device according to an embodiment of the present invention. FIG. 4 is a perspective view showing a conventional flatness measuring device, and FIG. 5 is a schematic diagram for explaining the measurement principle of a distance measuring sensor. 21...Flatness measuring device body, 24...Measuring table, 28...Case, 29...Top surface, 31...Servo motor, 32...Measuring arm, 33...Rectangular window, 33a,
33b...Window frame, 34...Round bar (rod body), 36...Distance measurement sensor, 37...Through hole, 39, 40...Rail, 41, 42...Linear bearing body, 43...Ball screw, 44...Nut, 46... feed motor.

Claims

[Claims for Utility Model Registration] A case, a rectangular window bored on one side of the top surface of the case, and a measurement device provided on the other side of the top surface of the case, on which a thin plate-shaped object to be measured is placed. a stand, a rail laid in the case parallel to the measuring stand and parallel to the measurement direction of the object to be measured, and a rail provided so as to be engaged with the rail and movable in the direction in which the rail is laid. a linear bearing body;
a measuring arm having one end fixed to the linear bearing body and the other end passing through the rectangular window to the outside of the case and positioned above the measuring stand; and the measuring arm connected to the rail via the linear bearing body. a moving mechanism that moves the measurement arm in the measurement direction of the object to be measured placed on the measurement stand; and a movement mechanism that is attached to the other end of the measurement arm, and a movement mechanism that moves the measurement arm in the measurement direction of the object to be measured placed on the measurement stand; In the flatness measuring device equipped with a distance measuring sensor that non-contactly measures changes in the flatness of the measuring arm, holes are arranged in a row at positions facing the window frame of the rectangular window facing the direction of movement of the measuring arm. 1. A flatness measuring device comprising a plurality of through holes and a plurality of rods that penetrate through each of the through holes with gaps and are fitted into each of the window frames with both ends facing each other.