JPS6354294U - - Google Patents

Info

Publication number

JPS6354294U

JPS6354294U JP14818386U JP14818386U JPS6354294U JP S6354294 U JPS6354294 U JP S6354294U JP 14818386 U JP14818386 U JP 14818386U JP 14818386 U JP14818386 U JP 14818386U JP S6354294 U JPS6354294 U JP S6354294U

Authority

JP

Japan

Prior art keywords

inert gas

quartz tube

housed

sealed

maintained

Prior art date

1986-09-27

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000011261 inert gas Substances 0.000 claims description 3
• 239000010453 quartz Substances 0.000 claims description 3
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
• 230000001105 regulatory effect Effects 0.000 claims 1
• 238000004519 manufacturing process Methods 0.000 description 2
• 239000004065 semiconductor Substances 0.000 description 2
• 238000010438 heat treatment Methods 0.000 description 1