JPS635248A - Illuminator for automatically inspecting appearance - Google Patents
Illuminator for automatically inspecting appearanceInfo
- Publication number
- JPS635248A JPS635248A JP14873686A JP14873686A JPS635248A JP S635248 A JPS635248 A JP S635248A JP 14873686 A JP14873686 A JP 14873686A JP 14873686 A JP14873686 A JP 14873686A JP S635248 A JPS635248 A JP S635248A
- Authority
- JP
- Japan
- Prior art keywords
- liquid crystal
- inspected
- projection optical
- illumination
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004973 liquid crystal related substance Substances 0.000 claims abstract description 37
- 238000007689 inspection Methods 0.000 claims abstract description 28
- 230000003287 optical effect Effects 0.000 claims abstract description 19
- 239000011159 matrix material Substances 0.000 claims abstract description 16
- 238000000149 argon plasma sintering Methods 0.000 claims description 11
- 238000005286 illumination Methods 0.000 abstract description 19
- 238000009792 diffusion process Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 238000011179 visual inspection Methods 0.000 description 5
- 230000010287 polarization Effects 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
Landscapes
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は立体物等の検査対象物を照明して、この対象物
の疵や欠陥を検査する外観自動検査の照明装置に関する
ものである。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to an illumination device for automatic appearance inspection that illuminates an object to be inspected, such as a three-dimensional object, to inspect the object for flaws and defects.
従来の技術
生産工程中の外観自動検査はあらゆる製品・生製品に適
用され、製品の良・不良を判別している。Conventional technology Automatic visual inspection during the production process is applied to all kinds of products and raw products to determine whether the product is good or bad.
この外観検査項目は、それぞれの製品が具備すべき性能
・特性に応じて種々雑多であるが、大別すると製品の色
や汚れなど物体色に関する検査項目と割れ・打こんなど
形状に関する検査項目にわけられる。These visual inspection items vary widely depending on the performance and characteristics that each product should have, but they can be roughly divided into inspection items related to object color such as product color and dirt, and inspection items related to shape such as cracks and dents. It can be divided.
このうち、物体色の検査については紙やシート材の一部
のように検査対象物の形状が平面で、拡散反射特性をも
つものについては、検査用照明の方向性（照射角）に関
して大きな問題とならない。Among these, when it comes to inspecting object color, there is a big problem with the directionality (irradiation angle) of the inspection lighting when the inspection object is flat and has diffuse reflection characteristics, such as a part of paper or sheet material. Not.
しかし、鏡面性を帯びているものについては、どんな投
光照明を行なってもこの対象物の画像パターンには必ら
ず正反射成分の１点がいくつか現われ、この画像を処理
して色や汚れを検出するのに多くの検査アルゴリズムと
時間を要する。そこでこの欠点をなくするため、通常は
第４図に示すように検査対象物のあらゆる方向から光を
照射する拡散照明を行ない、輝度の発生を防いでいる。However, for specular objects, no matter what kind of floodlighting is used, some specular reflection components will always appear in the image pattern of this object, and this image must be processed to determine the color and color. It takes many inspection algorithms and time to detect dirt. In order to eliminate this drawback, diffuse illumination is normally used to irradiate the object to be inspected from all directions, as shown in FIG. 4, to prevent the occurrence of brightness.
−方、検査対象物の割れや打こんを検査しようとすると
上記の拡散照明では検査・判別に有効な輝度パターンが
現われない。そこで、−方向から光を照射する投光照明
方式をとって割れや打こんによって生ずる陰影を強調し
、疵検出を容易にしている。この投光照明の照射方向は
検査対象物により、また同じ対象物でも疵の種類に応じ
て変える必要があり、第６図に示すように投光照明装置
を機械的に動かす方法がとられてきた。また、スリット
パターンやグリッド（格子）パターンを投影して、これ
による画像を処理することにより、外観自動検査のアル
ゴリズムの簡易化と検査スピードの向上をはかろうとす
るパターン照明も、上記照明装置とは別に実施されてき
た。- On the other hand, when trying to inspect an object to be inspected for cracks or dents, the above-mentioned diffused illumination does not produce a brightness pattern that is effective for inspection and discrimination. Therefore, a floodlighting method that emits light from the negative direction is used to emphasize shadows caused by cracks and dents, making it easier to detect flaws. The irradiation direction of this floodlight needs to be changed depending on the object to be inspected, and even on the same object depending on the type of flaw, so a method of mechanically moving the floodlight device as shown in Figure 6 has been adopted. Ta. In addition, pattern lighting, which aims to simplify automatic appearance inspection algorithms and improve inspection speed by projecting a slit pattern or grid pattern and processing the resulting image, is also used with the above-mentioned lighting device. has been carried out separately.
発明が解決しようとする問題点
このように、一つの検査対象物に対して多種の外観検査
を実施しようとすると、それぞれの検査目的に応じて照
明装置や撮像装置を必要とし、検査に要する時間も長く
なるなど外観自動検査用照明装置として実用性に乏しい
という問題を有していた。Problems to be Solved by the Invention As described above, when attempting to perform various visual inspections on a single inspection object, lighting devices and imaging devices are required depending on the purpose of each inspection, and the time required for inspection increases. However, there were problems in that it was not practical as a lighting device for automatic appearance inspection, such as the length of the lighting device.
本発明は、このような従来の問題を解消するもので、拡
散照明、投光照明およびパターン照明を簡単な構成電気
的に、短時間のうちに切換えることができる、外観自動
検査用照明装置を実現することを目的としている。The present invention solves these conventional problems by providing a lighting device for automatic external inspection that can electrically switch between diffused lighting, floodlighting, and pattern lighting in a short period of time with a simple configuration. The aim is to achieve this goal.
問題点を解決するための手段
本発明は上記問題点を解決するため、検査対象物に照射
可能な全立体角に配置した、光源、液晶シャッタマトリ
ックス、偏光板および投影レンズからなる複数個の投影
光学系ユニットと、これらの投影光学系ユニットと検査
対象物との間に配置した光散乱液晶素子と、これらの液
晶シャッタマトリックスと光散乱液晶素子を制御する液
晶駆動制御部とから構成している。Means for Solving the Problems In order to solve the above problems, the present invention provides a plurality of projections consisting of a light source, a liquid crystal shutter matrix, a polarizing plate, and a projection lens arranged in all solid angles capable of irradiating the object to be inspected. It consists of an optical system unit, a light-scattering liquid crystal element placed between these projection optical system units and the object to be inspected, and a liquid crystal drive control section that controls these liquid crystal shutter matrices and the light-scattering liquid crystal element. .
作用
本発明は上記の構成とすることにより、液晶シャッタマ
） ＩＪフックス光散乱液晶素子を電気的に制御して、
拡散照明、投光照明、パターン照明およびこれらの併存
した照明を高速時分割で選択提示を可能とするものであ
る。Operation The present invention has the above-mentioned configuration, and the liquid crystal shutter (IJ Fuchs light scattering liquid crystal element) is electrically controlled.
This makes it possible to selectively present diffused lighting, floodlighting, patterned lighting, and their coexisting lighting in a high-speed time division manner.
実施例
第１図は本発明の外観自動検査用照明装置の一実施例を
示すもので、光源１から出た光は液晶シャッタマトリッ
クス２を経て偏光板３、投影レンズ４、光散乱液晶素子
５を通過してのち検査対象物６に照射される。ここで光
源１、液晶シャ、タマトリックス２、偏光板３、投影レ
ンズ４が投影光学系ユニット７を構成する。Embodiment FIG. 1 shows an embodiment of the lighting device for automatic appearance inspection of the present invention, in which light emitted from a light source 1 passes through a liquid crystal shutter matrix 2, a polarizing plate 3, a projection lens 4, and a light scattering liquid crystal element 5. After passing through, the object to be inspected 6 is irradiated. Here, the light source 1, liquid crystal shutter, data matrix 2, polarizing plate 3, and projection lens 4 constitute a projection optical system unit 7.
液晶シャッタマトリックス２はツイストモードで動作し
、第２図のように２１．２２．２３の各パターンが独立
あるいは同時に、それぞれの偏光面を９００変えること
ができる。このだめ、液晶シャッタマトリックスが動作
している時の偏光面と偏光板３の偏光面とを直交させて
おけば、液晶シャッタマトリックスの各パターンに電圧
を印加して偏光面を９０°変えた時、光は透過し、その
パターンに応じた像が検査対象物に照射されることにな
る。The liquid crystal shutter matrix 2 operates in a twist mode, and as shown in FIG. 2, each pattern 21, 22, 23 can change its polarization plane by 900 degrees independently or simultaneously. If this is not the case, if the polarization plane when the liquid crystal shutter matrix is operating is made orthogonal to the polarization plane of the polarizing plate 3, then when a voltage is applied to each pattern of the liquid crystal shutter matrix and the polarization plane is changed by 90 degrees, , the light passes through, and an image corresponding to the pattern is irradiated onto the object to be inspected.
したがって、これらの投影光学系ユニットを検査対象物
６の周りに２次元的に配置し、第２図の２１あるいは２
２のどちらかを単独で動作させると、検査対象物の表面
には上記２１ある（／″１は２２の線状パターンが互に
重畳されて連続しスリットパターンが生ずることになる
。もし、第２図の２１と２２を同時に動作させると検査
対象物の表面には十字パターンが重畳されて連続しグリ
ッドパターン（格子パターン）が現われる。Therefore, these projection optical system units are arranged two-dimensionally around the inspection object 6, and are arranged at 21 or 2 in FIG.
When either one of 2 is operated alone, there are the above 21 on the surface of the object to be inspected. When 21 and 22 in FIG. 2 are operated simultaneously, a cross pattern is superimposed on the surface of the object to be inspected, and a continuous grid pattern appears.
さらに、−部の投影光学系ユニットについて、第２図の
２１’、２２．２３のすべてを動作させると、−定方向
からの投光照明が可能になる。Furthermore, if all of the projection optical system units 21', 22, and 23 in FIG. 2 are operated in the - part projection optical system unit, flood illumination from the - fixed direction becomes possible.
このようにして、液晶シャッタマトリックスの動作パタ
ーンを電気的に制御することにより、スリットパターン
やグリッドパターンなどのパターン照明と、−定角度か
らの投光照明を容易疋変更できる。By electrically controlling the operation pattern of the liquid crystal shutter matrix in this way, pattern illumination such as a slit pattern or grid pattern and flood illumination from a fixed angle can be easily changed.
しかし、検査対象物が球面でその表面が鏡面性を帯びて
いる時、検査対象物の画像パターンには動作している投
影光学系の数だけ輝点が生ずることになる。これをなく
するため、投影光学系ユニット７と検査対象物６の間に
光散乱液晶素子５を挿入し、これに電圧を印加すること
により、光散乱現象を起させる。同時に、すべての投影
光学系ユニットのすべての液晶マトリックスパターンヲ
動作させ、各投影光学系から出た光はすべて光散乱液晶
上で散乱させる。これにより検査対象物は完全な拡散照
明で照射されることになる。なお、投影レンズ４に分布
屈折率レンズアレーを用いると、液晶シャッタマトリッ
クス２から検査対象物６までの物像間距離を小さくする
ことができ、照明装置全体を一体化するのに有力となる
。However, when the object to be inspected is spherical and has a specular surface, as many bright spots as there are operating projection optical systems are generated in the image pattern of the object to be inspected. In order to eliminate this, a light scattering liquid crystal element 5 is inserted between the projection optical system unit 7 and the object to be inspected 6, and a voltage is applied to it to cause a light scattering phenomenon. At the same time, all liquid crystal matrix patterns of all projection optical system units are operated, and all light emitted from each projection optical system is scattered on the light scattering liquid crystal. As a result, the object to be inspected is illuminated with completely diffused illumination. Note that if a distributed index lens array is used for the projection lens 4, the object-to-image distance from the liquid crystal shutter matrix 2 to the inspection object 6 can be reduced, which is effective in integrating the entire illumination device.
このほか、これらの複数の液晶シャッタマトリックス２
のそれぞれと、光散乱液晶素子の印加電圧をアナログ的
に変えることにより照射光量を変えることができ、また
各投影光学系ユニット７の動作を個々に制御することに
より投光照明と拡散照明の混合照明が可能となり、検査
対象物の必要とする検査項目にもつとも適合した照射パ
ターンが選択でき、一つの対象物に対する検査項目の多
くを同時または短時間で実施できる特徴をもつ。In addition, these multiple liquid crystal shutter matrices 2
The amount of irradiated light can be changed by changing the voltage applied to each of the light scattering liquid crystal elements in an analog manner, and by individually controlling the operation of each projection optical system unit 7, it is possible to mix flood lighting and diffused lighting. It enables illumination, allows selection of an irradiation pattern that matches the inspection items required by the object to be inspected, and has the feature that many inspection items for one object can be performed simultaneously or in a short period of time.
この照明装置はまた、疵の’ｐＨ別結果全結果−ドバッ
クして照明方法の優先順位を変えていく、いわゆる学習
効果をもった外観検査システムを実現するうえで有力な
装置となる。第３図は、上記の外観検査システムの全体
を示すもので撮像素子９の画像信号をうけて画１象処理
判別部１４が必要と定めた照明方法を液晶、駆動制御部
１３に伝え、光散乱液晶素子５および液晶シャッタマト
リックスの双方が動作して検査対象物６の照明方法を項
次変えていく制御の流れを示している。This illumination device is also a powerful device for realizing a visual inspection system with a so-called learning effect, in which the priority order of illumination methods is changed by backing up all results by pH of defects. FIG. 3 shows the overall appearance inspection system described above. Upon receiving the image signal from the image sensor 9, the image processing discrimination unit 14 transmits the illumination method determined as necessary to the liquid crystal display and the drive control unit 13, and This shows a flow of control in which both the scattering liquid crystal element 5 and the liquid crystal shutter matrix operate to sequentially change the method of illuminating the inspection object 6.
発明の効果
本発明による外観自動検査用照明装置は、光源、液晶シ
ャッタマトリックス、偏光板および投影レンズをもつ投
影光学系ユニットを複数個併置し、さらにこれらの出射
光全体を被う光散乱液晶素子を設けることにより、拡散
照明、投光照明、パターン照明およびこれらの併存した
照明方式を時分割で選択提示することができ、極めて汎
用性の高い外観検査用照明装置として、その実用的価値
はまことに大きい。Effects of the Invention The lighting device for automatic appearance inspection according to the present invention includes a plurality of projection optical system units having a light source, a liquid crystal shutter matrix, a polarizing plate, and a projection lens arranged side by side, and further includes a light scattering liquid crystal element that covers the entire emitted light from these units. By providing this, it is possible to select and present diffused lighting, floodlighting, pattern lighting, and lighting methods that coexist with these in a time-sharing manner, and its practical value is truly outstanding as an extremely versatile lighting device for visual inspection. big.
第１図は本発明による外観自動検査用照明装置の一実施
例を示す図、第２図１ｌ−ｉ液晶シャッタマトリックス
のパターン分割の一例を示す図、第３図は本発明による
照明装置を備えた外観自動検査装置のブロックダイヤグ
ラムの説明図、第４図は従来の拡散照明方式の説明図、
第５図は従来の投光照明方式の説明図である。
８・・・・・・撮像素子、９・・・・・・撮像用レンズ
、１０・・・・・・拡散照明用光源、１２・・・・・・
投光照明装置。
代理人の氏名 弁理士 中 尾 敏 男 ほか１名第３
図FIG. 1 is a diagram showing an embodiment of the lighting device for automatic appearance inspection according to the present invention, FIG. 2 is a diagram showing an example of pattern division of a 1l-i liquid crystal shutter matrix, and FIG. 3 is a diagram showing an example of the lighting device for automatic appearance inspection according to the present invention. Fig. 4 is an explanatory diagram of a block diagram of an automatic appearance inspection device, and Fig. 4 is an explanatory diagram of a conventional diffused lighting method.
FIG. 5 is an explanatory diagram of a conventional flood lighting system. 8... Imaging element, 9... Imaging lens, 10... Light source for diffused illumination, 12...
Floodlight equipment. Name of agent: Patent attorney Toshio Nakao and 1 other person No. 3
figure
Claims (1)
ンズからなる複数個の投影光学系ユニットと、前記複数
個の投影光学系ユニットと検査対象物との間に配置した
光散乱液晶素子と、前記複数個の投影光学系ユニットと
前記光散乱液晶素子を制御する液晶駆動制御部とから構
成され、拡散照明、投光照明およびパターン照明が電気
的に切換えられる機能を有する外観自動検査用照明装置
。a plurality of projection optical system units comprising a light source, a liquid crystal shutter matrix, a polarizing plate, and a projection lens; a light scattering liquid crystal element disposed between the plurality of projection optical system units and the object to be inspected; A lighting device for automatic appearance inspection, which is composed of a projection optical system unit and a liquid crystal drive control section that controls the light scattering liquid crystal element, and has a function of electrically switching between diffused lighting, floodlighting, and pattern lighting.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14873686A JPS635248A (en) | 1986-06-25 | 1986-06-25 | Illuminator for automatically inspecting appearance |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14873686A JPS635248A (en) | 1986-06-25 | 1986-06-25 | Illuminator for automatically inspecting appearance |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS635248A true JPS635248A (en) | 1988-01-11 |
| JPH054025B2 JPH054025B2 (en) | 1993-01-19 |
Family
ID=15459462
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14873686A Granted JPS635248A (en) | 1986-06-25 | 1986-06-25 | Illuminator for automatically inspecting appearance |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS635248A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002093227A (en) * | 2000-07-14 | 2002-03-29 | Kyoto Denkiki Kk | Linear lighting system |
-
1986
- 1986-06-25 JP JP14873686A patent/JPS635248A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002093227A (en) * | 2000-07-14 | 2002-03-29 | Kyoto Denkiki Kk | Linear lighting system |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH054025B2 (en) | 1993-01-19 |
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