JPS6352095U - - Google Patents
Info
- Publication number
- JPS6352095U JPS6352095U JP14602486U JP14602486U JPS6352095U JP S6352095 U JPS6352095 U JP S6352095U JP 14602486 U JP14602486 U JP 14602486U JP 14602486 U JP14602486 U JP 14602486U JP S6352095 U JPS6352095 U JP S6352095U
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- furnace body
- fixed
- heat
- heat treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 5
- 229910010293 ceramic material Inorganic materials 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 claims description 4
- 239000010453 quartz Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 2
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Tunnel Furnaces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14602486U JPH023108Y2 (enExample) | 1986-09-24 | 1986-09-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14602486U JPH023108Y2 (enExample) | 1986-09-24 | 1986-09-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6352095U true JPS6352095U (enExample) | 1988-04-08 |
| JPH023108Y2 JPH023108Y2 (enExample) | 1990-01-24 |
Family
ID=31058103
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14602486U Expired JPH023108Y2 (enExample) | 1986-09-24 | 1986-09-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH023108Y2 (enExample) |
-
1986
- 1986-09-24 JP JP14602486U patent/JPH023108Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH023108Y2 (enExample) | 1990-01-24 |