JPS6351592U - - Google Patents
Info
- Publication number
- JPS6351592U JPS6351592U JP14380386U JP14380386U JPS6351592U JP S6351592 U JPS6351592 U JP S6351592U JP 14380386 U JP14380386 U JP 14380386U JP 14380386 U JP14380386 U JP 14380386U JP S6351592 U JPS6351592 U JP S6351592U
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- stator
- actuator
- mover
- contracts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Control Of Position Or Direction (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986143803U JPH0445437Y2 (el) | 1986-09-19 | 1986-09-19 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986143803U JPH0445437Y2 (el) | 1986-09-19 | 1986-09-19 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6351592U true JPS6351592U (el) | 1988-04-07 |
JPH0445437Y2 JPH0445437Y2 (el) | 1992-10-26 |
Family
ID=31053820
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986143803U Expired JPH0445437Y2 (el) | 1986-09-19 | 1986-09-19 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0445437Y2 (el) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6195586A (ja) * | 1984-10-16 | 1986-05-14 | Nec Corp | 変位発生装置 |
JPS62147976A (ja) * | 1985-12-20 | 1987-07-01 | Ngk Spark Plug Co Ltd | 直進型圧電モ−タの作動装置 |
JPH09101812A (ja) * | 1995-10-05 | 1997-04-15 | Fanuc Ltd | 数値制御装置 |
-
1986
- 1986-09-19 JP JP1986143803U patent/JPH0445437Y2/ja not_active Expired
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6195586A (ja) * | 1984-10-16 | 1986-05-14 | Nec Corp | 変位発生装置 |
JPS62147976A (ja) * | 1985-12-20 | 1987-07-01 | Ngk Spark Plug Co Ltd | 直進型圧電モ−タの作動装置 |
JPH09101812A (ja) * | 1995-10-05 | 1997-04-15 | Fanuc Ltd | 数値制御装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0445437Y2 (el) | 1992-10-26 |