JPS6351062B2 - - Google Patents
Info
- Publication number
- JPS6351062B2 JPS6351062B2 JP23654583A JP23654583A JPS6351062B2 JP S6351062 B2 JPS6351062 B2 JP S6351062B2 JP 23654583 A JP23654583 A JP 23654583A JP 23654583 A JP23654583 A JP 23654583A JP S6351062 B2 JPS6351062 B2 JP S6351062B2
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- injection
- port
- introduction
- processing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000002347 injection Methods 0.000 claims description 63
- 239000007924 injection Substances 0.000 claims description 63
- 229920003002 synthetic resin Polymers 0.000 claims description 6
- 239000000057 synthetic resin Substances 0.000 claims description 6
- 230000007423 decrease Effects 0.000 claims description 3
- 238000005507 spraying Methods 0.000 claims 1
- 239000007789 gas Substances 0.000 description 12
- 230000005540 biological transmission Effects 0.000 description 4
- 238000009832 plasma treatment Methods 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- 230000004308 accommodation Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000003973 paint Substances 0.000 description 2
- -1 polypropylene Polymers 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 102000004190 Enzymes Human genes 0.000 description 1
- 108090000790 Enzymes Proteins 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- VMTCKFAPVIWNOF-UHFFFAOYSA-N methane tetrahydrofluoride Chemical compound C.F.F.F.F VMTCKFAPVIWNOF-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Nozzles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23654583A JPS60129157A (ja) | 1983-12-15 | 1983-12-15 | プラズマ処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23654583A JPS60129157A (ja) | 1983-12-15 | 1983-12-15 | プラズマ処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60129157A JPS60129157A (ja) | 1985-07-10 |
| JPS6351062B2 true JPS6351062B2 (enrdf_load_stackoverflow) | 1988-10-12 |
Family
ID=17002251
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23654583A Granted JPS60129157A (ja) | 1983-12-15 | 1983-12-15 | プラズマ処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60129157A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0571375U (ja) * | 1992-02-28 | 1993-09-28 | 株式会社栃木屋 | ロック機構つきラッチ |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010274423A (ja) * | 2009-05-26 | 2010-12-09 | Hitachi Appliances Inc | 家電用部品、その塗装方法及び家電製品 |
-
1983
- 1983-12-15 JP JP23654583A patent/JPS60129157A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0571375U (ja) * | 1992-02-28 | 1993-09-28 | 株式会社栃木屋 | ロック機構つきラッチ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60129157A (ja) | 1985-07-10 |
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