JPS6350665Y2 - - Google Patents
Info
- Publication number
- JPS6350665Y2 JPS6350665Y2 JP1984189680U JP18968084U JPS6350665Y2 JP S6350665 Y2 JPS6350665 Y2 JP S6350665Y2 JP 1984189680 U JP1984189680 U JP 1984189680U JP 18968084 U JP18968084 U JP 18968084U JP S6350665 Y2 JPS6350665 Y2 JP S6350665Y2
- Authority
- JP
- Japan
- Prior art keywords
- wiring board
- photoresist film
- vacuum
- film
- transparent film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229920002120 photoresistant polymer Polymers 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 7
- 238000010586 diagram Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984189680U JPS6350665Y2 (enEXAMPLES) | 1984-12-13 | 1984-12-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984189680U JPS6350665Y2 (enEXAMPLES) | 1984-12-13 | 1984-12-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61104452U JPS61104452U (enEXAMPLES) | 1986-07-03 |
| JPS6350665Y2 true JPS6350665Y2 (enEXAMPLES) | 1988-12-27 |
Family
ID=30747130
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984189680U Expired JPS6350665Y2 (enEXAMPLES) | 1984-12-13 | 1984-12-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6350665Y2 (enEXAMPLES) |
-
1984
- 1984-12-13 JP JP1984189680U patent/JPS6350665Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61104452U (enEXAMPLES) | 1986-07-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6350665Y2 (enEXAMPLES) | ||
| JPH0196287U (enEXAMPLES) | ||
| JPH1184633A (ja) | 感光性樹脂版の製造方法及び装置 | |
| JPH04182199A (ja) | 自動製図機における通気性シートの製図及びカッティング方法 | |
| JPS5732914A (en) | Manufacture of formed piece | |
| JPS6130282Y2 (enEXAMPLES) | ||
| JPH0645951Y2 (ja) | 露光装置の焼枠 | |
| JPS593430A (ja) | ホトレジスト膜形成方法 | |
| JPS6053464B2 (ja) | ウエ−ハ整合装置 | |
| JPS5924048Y2 (ja) | 写真製版用焼付機 | |
| JPS63100825U (enEXAMPLES) | ||
| JPH02164021A (ja) | 角型半導体基板の固定治具 | |
| JPH0438277Y2 (enEXAMPLES) | ||
| JPH02142664U (enEXAMPLES) | ||
| JPH02123940U (enEXAMPLES) | ||
| JPS626714Y2 (enEXAMPLES) | ||
| JPS6163835U (enEXAMPLES) | ||
| JPS6212000Y2 (enEXAMPLES) | ||
| JPS63900U (enEXAMPLES) | ||
| JPS58207621A (ja) | 半導体ウエ−ハ | |
| JPH028135U (enEXAMPLES) | ||
| JPS5877343U (ja) | 印刷原版の露光装置 | |
| JPH03251847A (ja) | ホトレジスト露光方法及びホトレジスト露光装置 | |
| JPS61270379A (ja) | エツチング方法 | |
| JPH03122533U (enEXAMPLES) |