JPS6350654U - - Google Patents
Info
- Publication number
- JPS6350654U JPS6350654U JP1986143708U JP14370886U JPS6350654U JP S6350654 U JPS6350654 U JP S6350654U JP 1986143708 U JP1986143708 U JP 1986143708U JP 14370886 U JP14370886 U JP 14370886U JP S6350654 U JPS6350654 U JP S6350654U
- Authority
- JP
- Japan
- Prior art keywords
- surface plate
- wafer
- carrier
- upper inner
- upper outer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 4
- 230000008878 coupling Effects 0.000 claims description 2
- 238000010168 coupling process Methods 0.000 claims description 2
- 238000005859 coupling reaction Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986143708U JPS6350654U (US07122547-20061017-C00032.png) | 1986-09-18 | 1986-09-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986143708U JPS6350654U (US07122547-20061017-C00032.png) | 1986-09-18 | 1986-09-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6350654U true JPS6350654U (US07122547-20061017-C00032.png) | 1988-04-06 |
Family
ID=31053637
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986143708U Pending JPS6350654U (US07122547-20061017-C00032.png) | 1986-09-18 | 1986-09-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6350654U (US07122547-20061017-C00032.png) |
-
1986
- 1986-09-18 JP JP1986143708U patent/JPS6350654U/ja active Pending
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