JPS6350442U - - Google Patents
Info
- Publication number
- JPS6350442U JPS6350442U JP14344986U JP14344986U JPS6350442U JP S6350442 U JPS6350442 U JP S6350442U JP 14344986 U JP14344986 U JP 14344986U JP 14344986 U JP14344986 U JP 14344986U JP S6350442 U JPS6350442 U JP S6350442U
- Authority
- JP
- Japan
- Prior art keywords
- scintillator
- detection means
- cylindrical collector
- electrode
- arranged opposite
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 5
- 238000010894 electron beam technology Methods 0.000 claims description 2
- 230000005684 electric field Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Tests Of Electronic Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986143449U JPH067557Y2 (ja) | 1986-09-20 | 1986-09-20 | ２次電子検出器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986143449U JPH067557Y2 (ja) | 1986-09-20 | 1986-09-20 | ２次電子検出器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6350442U true JPS6350442U (enrdf_load_stackoverflow) | 1988-04-05 |
| JPH067557Y2 JPH067557Y2 (ja) | 1994-02-23 |
Family
ID=31053141
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986143449U Expired - Lifetime JPH067557Y2 (ja) | 1986-09-20 | 1986-09-20 | ２次電子検出器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH067557Y2 (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008257914A (ja) * | 2007-04-02 | 2008-10-23 | Jeol Ltd | ビーム装置 |
| JP2010097844A (ja) * | 2008-10-17 | 2010-04-30 | National Institute Of Advanced Industrial Science & Technology | 走査型電子顕微鏡およびその使用方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58148867U (ja) * | 1982-03-30 | 1983-10-06 | 株式会社島津製作所 | ２次電子検出装置 |
-
1986
- 1986-09-20 JP JP1986143449U patent/JPH067557Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58148867U (ja) * | 1982-03-30 | 1983-10-06 | 株式会社島津製作所 | ２次電子検出装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008257914A (ja) * | 2007-04-02 | 2008-10-23 | Jeol Ltd | ビーム装置 |
| JP2010097844A (ja) * | 2008-10-17 | 2010-04-30 | National Institute Of Advanced Industrial Science & Technology | 走査型電子顕微鏡およびその使用方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH067557Y2 (ja) | 1994-02-23 |