JPS6350384A - Manufacture of coated zro2 ceramics - Google Patents

Abstract

(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

Detailed Description of the Invention [Industrial Application Field] The present invention relates to a method for manufacturing ZrOz ceramics having a hard coating layer on the surface, and to improve the wear resistance of cutlery, dies, injection molding tools, valves, pump parts, etc. The present invention relates to a method for producing coated ZrO-based ceramics that are effective for use in decorative parts such as tools, watch cases, and tie bins.

[Conventional technology]

Some ZrO-based ceramics have excellent toughness, and especially when y2o is added, they have high strength and MgO
Alternatively, high toughness can be obtained by adding CeO□, and its application to tools such as knives and dies is being considered.

[Problem that the invention seeks to solve]

Conventionally, cemented carbide has been mainly used in fields that require wear resistance such as blades and dies, while Zr
O,-based ceramics have a problem of inferior wear resistance because of their lower hardness than cemented carbide. The present invention was made in view of the above problems, and aims to provide a method for manufacturing ZrO2 ceramics with improved wear resistance.

[Means for solving problems]

In the present invention, Ti, Ti,
In forming a coating layer of one or more of nitrides, carbides, and carbonitrides of Zr, Hf, V, and Nb, the ZrO2-based ceramics are exposed to one of a nitriding gas and a carbonizing gas.
The total partial pressure of the species or two or more species is 1 x 10-4 to 9
10 at 400-700℃ in an atmosphere of 1O-1torr
After holding for a minute to form a film layer,
Coated Zr characterized by heat treatment in the temperature range of °C
This is a method for producing O, series ceramics.

[Effect]

According to the present invention, the surface of the ZrO□ base ceramic is coated with nitrides and carbides such as TiN and TiC with good adhesion.
It is presumed that this is because Tie, etc. are formed by reacting with Tie, etc., and this is strongly bonded to the vapor deposited substances such as TiN, TxC, etc.

In particular, N2, NH,
at a temperature of 400 to 70°C in an atmosphere of nitriding gases such as nitriding gases, carbonizing gases such as CH4, C, H, or mixed gases thereof.
If the temperature is maintained at 0° C. for 1 hour and 10 minutes to 3 hours, a coating with good adhesion will be formed. In this case, if the total partial pressure of the reactive gas is less than I x 10-' torr, there will be virtually no effect, whereas if it exceeds 9 x 10-1 torr, the reaction film will become porous and the adhesion will be impaired. Since I X 10-' ~ 9 X 10-' torr
Adjust the flow rate so that

In the present invention, after forming the coating layer as described above, 1
By heat treatment in the temperature range of 000 to 1600°C, the base material ZrO-based ceramics and TiN and Ti
A major feature is that it has been found that the adhesion with a coating layer such as C is improved. The reason for this is that when the coating layer is heat-treated in an atmosphere that does not decompose, T, which is a component in the coating layer,
This is because i, Zr, Hf, etc. diffuse into the base material, forming a coating layer with high adhesion. However, in an atmosphere with a high O2 partial pressure such as the atmosphere, the nitrides and carbides of the coating layer are likely to be oxidized and decomposed, and it is preferable to perform the heat treatment in a reducing atmosphere.

In addition, Table 1 shows ZrO containing ZrO□, A1□o3
, hardness of ceramics and coating layer material H
v) indicates the coefficient of thermal expansion. From the wood surface, it can be seen that ZrO-based ceramics containing A1□O1 are preferable as the base material because the coefficient of thermal expansion is similar to that of the coating material.

Table 1 [Example] ZrO-based ceramics consisting of ZrO□ containing 20 wt% AlzOi and 3 nlo 1% Y, O, balance was coated with TiN by hollow cathode ion blating. The conditions were a temperature of 600°C, a N3 partial pressure of 4 x 10-' torr, and a holding time of 1 hour.

After further coating treatment, a test piece was prepared which was heat treated in an atmosphere of N21stm.

The wear resistance was evaluated using a large end type wear test. Conditions are ring material 5US304, sliding speed 0.74m
/s, a final load of 2.1 kg, and a sliding distance of 600 m. The evaluation was made by measuring the specific wear amount. The results are shown in Table 2, and the coating ZrO of N003.4 according to the present invention,
It can be seen that the ceramics have good improved wear resistance.

In this embodiment, an example in which ZrO2-20% Al2O and ceramics are used as the base material and TiN is coated is explained, but it goes without saying that the present invention is not limited to this.

Table 2 *: O indicates the present invention;
Durability is improved when applied to tools such as dies, and the coated ZrO ceramics of the present invention have a glossy surface and can be used as decorative items, making them industrially useful.

Claims (1)

[Claims] 1 Ti, Zr on the surface of ZrO_2 ceramics containing stabilizers such as Y_2O_3, MgO, CeO_2, etc.
, Hf, V, Nb nitrides, carbides and carbonitrides 1
In forming the seed or two or more types of coating layer, the Zr
The partial pressure of one or more types of nitriding gas and carbonizing gas is 1×10^-^4 to 9×1 in O_2 series ceramics.
1 at 400-700℃ in an atmosphere of 0^-^1 torr
After forming a coating layer by holding for 0 minutes to 3 hours,
A method for producing coated ZrO_2 ceramics, characterized by heat treatment in a temperature range of ~1600°C. 2 ZrO_2 ceramics are Al_2O_35~6
The coating Z according to claim 1 containing 0 wt%
Method for manufacturing rO_2 ceramics.