JPS6350132U - - Google Patents

Info

Publication number
JPS6350132U
JPS6350132U JP14269086U JP14269086U JPS6350132U JP S6350132 U JPS6350132 U JP S6350132U JP 14269086 U JP14269086 U JP 14269086U JP 14269086 U JP14269086 U JP 14269086U JP S6350132 U JPS6350132 U JP S6350132U
Authority
JP
Japan
Prior art keywords
sample
holders
guide
holder
vacuum container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14269086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14269086U priority Critical patent/JPS6350132U/ja
Publication of JPS6350132U publication Critical patent/JPS6350132U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP14269086U 1986-09-19 1986-09-19 Pending JPS6350132U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14269086U JPS6350132U (enrdf_load_stackoverflow) 1986-09-19 1986-09-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14269086U JPS6350132U (enrdf_load_stackoverflow) 1986-09-19 1986-09-19

Publications (1)

Publication Number Publication Date
JPS6350132U true JPS6350132U (enrdf_load_stackoverflow) 1988-04-05

Family

ID=31051656

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14269086U Pending JPS6350132U (enrdf_load_stackoverflow) 1986-09-19 1986-09-19

Country Status (1)

Country Link
JP (1) JPS6350132U (enrdf_load_stackoverflow)

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