JPS6350126U - - Google Patents
Info
- Publication number
- JPS6350126U JPS6350126U JP14268886U JP14268886U JPS6350126U JP S6350126 U JPS6350126 U JP S6350126U JP 14268886 U JP14268886 U JP 14268886U JP 14268886 U JP14268886 U JP 14268886U JP S6350126 U JPS6350126 U JP S6350126U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- processing
- observation window
- processing apparatus
- observing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001681 protective effect Effects 0.000 claims 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14268886U JPS6350126U (enExample) | 1986-09-19 | 1986-09-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14268886U JPS6350126U (enExample) | 1986-09-19 | 1986-09-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6350126U true JPS6350126U (enExample) | 1988-04-05 |
Family
ID=31051652
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14268886U Pending JPS6350126U (enExample) | 1986-09-19 | 1986-09-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6350126U (enExample) |
-
1986
- 1986-09-19 JP JP14268886U patent/JPS6350126U/ja active Pending