JPS6350125U - - Google Patents

Info

Publication number
JPS6350125U
JPS6350125U JP14468986U JP14468986U JPS6350125U JP S6350125 U JPS6350125 U JP S6350125U JP 14468986 U JP14468986 U JP 14468986U JP 14468986 U JP14468986 U JP 14468986U JP S6350125 U JPS6350125 U JP S6350125U
Authority
JP
Japan
Prior art keywords
substrate
cup
nozzle
scattering
developer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14468986U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0238441Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986144689U priority Critical patent/JPH0238441Y2/ja
Publication of JPS6350125U publication Critical patent/JPS6350125U/ja
Application granted granted Critical
Publication of JPH0238441Y2 publication Critical patent/JPH0238441Y2/ja
Expired legal-status Critical Current

Links

JP1986144689U 1986-09-19 1986-09-19 Expired JPH0238441Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986144689U JPH0238441Y2 (cg-RX-API-DMAC7.html) 1986-09-19 1986-09-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986144689U JPH0238441Y2 (cg-RX-API-DMAC7.html) 1986-09-19 1986-09-19

Publications (2)

Publication Number Publication Date
JPS6350125U true JPS6350125U (cg-RX-API-DMAC7.html) 1988-04-05
JPH0238441Y2 JPH0238441Y2 (cg-RX-API-DMAC7.html) 1990-10-17

Family

ID=31055526

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986144689U Expired JPH0238441Y2 (cg-RX-API-DMAC7.html) 1986-09-19 1986-09-19

Country Status (1)

Country Link
JP (1) JPH0238441Y2 (cg-RX-API-DMAC7.html)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58123731A (ja) * 1982-01-19 1983-07-23 Toshiba Corp 半導体処理装置
JPS59134829A (ja) * 1983-01-22 1984-08-02 Nec Corp 半導体スプレ−現像装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58123731A (ja) * 1982-01-19 1983-07-23 Toshiba Corp 半導体処理装置
JPS59134829A (ja) * 1983-01-22 1984-08-02 Nec Corp 半導体スプレ−現像装置

Also Published As

Publication number Publication date
JPH0238441Y2 (cg-RX-API-DMAC7.html) 1990-10-17

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