JPS6350123U - - Google Patents

Info

Publication number

JPS6350123U

JPS6350123U JP14366886U JP14366886U JPS6350123U JP S6350123 U JPS6350123 U JP S6350123U JP 14366886 U JP14366886 U JP 14366886U JP 14366886 U JP14366886 U JP 14366886U JP S6350123 U JPS6350123 U JP S6350123U

Authority

JP

Japan

Prior art keywords

doping gas

gas supply

vapor phase

supply section

phase growth

Prior art date

1986-09-19

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000758 substrate Substances 0.000 claims description 3
• 238000001947 vapour-phase growth Methods 0.000 claims description 3
• 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 2
• 238000003756 stirring Methods 0.000 claims description 2
• 239000013078 crystal Substances 0.000 claims 1
• 238000010438 heat treatment Methods 0.000 description 1
• 239000010453 quartz Substances 0.000 description 1
• 239000002994 raw material Substances 0.000 description 1
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1