JPS6349893Y2 - - Google Patents
Info
- Publication number
- JPS6349893Y2 JPS6349893Y2 JP1982115591U JP11559182U JPS6349893Y2 JP S6349893 Y2 JPS6349893 Y2 JP S6349893Y2 JP 1982115591 U JP1982115591 U JP 1982115591U JP 11559182 U JP11559182 U JP 11559182U JP S6349893 Y2 JPS6349893 Y2 JP S6349893Y2
- Authority
- JP
- Japan
- Prior art keywords
- tape
- adapter
- cassette
- small
- motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11559182U JPS5925675U (ja) | 1982-07-31 | 1982-07-31 | テ−プカセツト用アダプタ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11559182U JPS5925675U (ja) | 1982-07-31 | 1982-07-31 | テ−プカセツト用アダプタ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5925675U JPS5925675U (ja) | 1984-02-17 |
| JPS6349893Y2 true JPS6349893Y2 (en)van) | 1988-12-21 |
Family
ID=30266775
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11559182U Granted JPS5925675U (ja) | 1982-07-31 | 1982-07-31 | テ−プカセツト用アダプタ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5925675U (en)van) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7372541B2 (en) | 2002-11-12 | 2008-05-13 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| US7388648B2 (en) | 2002-11-12 | 2008-06-17 | Asml Netherlands B.V. | Lithographic projection apparatus |
| US9256136B2 (en) | 2010-04-22 | 2016-02-09 | Asml Netherlands B.V. | Fluid handling structure, lithographic apparatus and device manufacturing method involving gas supply |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58212674A (ja) * | 1982-06-04 | 1983-12-10 | Matsushita Electric Ind Co Ltd | カセツトアダプタ− |
-
1982
- 1982-07-31 JP JP11559182U patent/JPS5925675U/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7372541B2 (en) | 2002-11-12 | 2008-05-13 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
| US7388648B2 (en) | 2002-11-12 | 2008-06-17 | Asml Netherlands B.V. | Lithographic projection apparatus |
| US9091940B2 (en) | 2002-11-12 | 2015-07-28 | Asml Netherlands B.V. | Lithographic apparatus and method involving a fluid inlet and a fluid outlet |
| US9256136B2 (en) | 2010-04-22 | 2016-02-09 | Asml Netherlands B.V. | Fluid handling structure, lithographic apparatus and device manufacturing method involving gas supply |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5925675U (ja) | 1984-02-17 |