JPS6349232U - - Google Patents
Info
- Publication number
- JPS6349232U JPS6349232U JP14298586U JP14298586U JPS6349232U JP S6349232 U JPS6349232 U JP S6349232U JP 14298586 U JP14298586 U JP 14298586U JP 14298586 U JP14298586 U JP 14298586U JP S6349232 U JPS6349232 U JP S6349232U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- rotating brush
- wafer cleaning
- rotating
- reciprocating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims 2
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14298586U JPS6349232U (en18) | 1986-09-17 | 1986-09-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14298586U JPS6349232U (en18) | 1986-09-17 | 1986-09-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6349232U true JPS6349232U (en18) | 1988-04-04 |
Family
ID=31052241
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14298586U Pending JPS6349232U (en18) | 1986-09-17 | 1986-09-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6349232U (en18) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5216163A (en) * | 1975-07-30 | 1977-02-07 | Hitachi Ltd | Waste removal method |
| JPS59121939A (ja) * | 1982-12-28 | 1984-07-14 | Fujitsu Ltd | ウエ−ハのブラツシング方法 |
-
1986
- 1986-09-17 JP JP14298586U patent/JPS6349232U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5216163A (en) * | 1975-07-30 | 1977-02-07 | Hitachi Ltd | Waste removal method |
| JPS59121939A (ja) * | 1982-12-28 | 1984-07-14 | Fujitsu Ltd | ウエ−ハのブラツシング方法 |