JPS6348730U - - Google Patents

Info

Publication number
JPS6348730U
JPS6348730U JP14057286U JP14057286U JPS6348730U JP S6348730 U JPS6348730 U JP S6348730U JP 14057286 U JP14057286 U JP 14057286U JP 14057286 U JP14057286 U JP 14057286U JP S6348730 U JPS6348730 U JP S6348730U
Authority
JP
Japan
Prior art keywords
pallet
transfer device
wafer transfer
levitating
track
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14057286U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14057286U priority Critical patent/JPS6348730U/ja
Publication of JPS6348730U publication Critical patent/JPS6348730U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Non-Mechanical Conveyors (AREA)
  • Ventilation (AREA)
  • Control Of Vehicles With Linear Motors And Vehicles That Are Magnetically Levitated (AREA)
JP14057286U 1986-09-16 1986-09-16 Pending JPS6348730U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14057286U JPS6348730U (enrdf_load_stackoverflow) 1986-09-16 1986-09-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14057286U JPS6348730U (enrdf_load_stackoverflow) 1986-09-16 1986-09-16

Publications (1)

Publication Number Publication Date
JPS6348730U true JPS6348730U (enrdf_load_stackoverflow) 1988-04-02

Family

ID=31047543

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14057286U Pending JPS6348730U (enrdf_load_stackoverflow) 1986-09-16 1986-09-16

Country Status (1)

Country Link
JP (1) JPS6348730U (enrdf_load_stackoverflow)

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