JPS6348707U - - Google Patents

Info

Publication number
JPS6348707U
JPS6348707U JP14238486U JP14238486U JPS6348707U JP S6348707 U JPS6348707 U JP S6348707U JP 14238486 U JP14238486 U JP 14238486U JP 14238486 U JP14238486 U JP 14238486U JP S6348707 U JPS6348707 U JP S6348707U
Authority
JP
Japan
Prior art keywords
transfer device
cleanliness
clean room
cargo
clean
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14238486U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0318407Y2 (US07655688-20100202-C00086.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986142384U priority Critical patent/JPH0318407Y2/ja
Publication of JPS6348707U publication Critical patent/JPS6348707U/ja
Application granted granted Critical
Publication of JPH0318407Y2 publication Critical patent/JPH0318407Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Intermediate Stations On Conveyors (AREA)
  • Ventilation (AREA)
  • Warehouses Or Storage Devices (AREA)
JP1986142384U 1986-09-17 1986-09-17 Expired JPH0318407Y2 (US07655688-20100202-C00086.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986142384U JPH0318407Y2 (US07655688-20100202-C00086.png) 1986-09-17 1986-09-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986142384U JPH0318407Y2 (US07655688-20100202-C00086.png) 1986-09-17 1986-09-17

Publications (2)

Publication Number Publication Date
JPS6348707U true JPS6348707U (US07655688-20100202-C00086.png) 1988-04-02
JPH0318407Y2 JPH0318407Y2 (US07655688-20100202-C00086.png) 1991-04-18

Family

ID=31051071

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986142384U Expired JPH0318407Y2 (US07655688-20100202-C00086.png) 1986-09-17 1986-09-17

Country Status (1)

Country Link
JP (1) JPH0318407Y2 (US07655688-20100202-C00086.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009154983A (ja) * 2007-12-25 2009-07-16 Asyst Technologies Japan Inc 保管庫及び入出庫方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6168005U (US07655688-20100202-C00086.png) * 1984-10-11 1986-05-09

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6168005U (US07655688-20100202-C00086.png) * 1984-10-11 1986-05-09

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009154983A (ja) * 2007-12-25 2009-07-16 Asyst Technologies Japan Inc 保管庫及び入出庫方法

Also Published As

Publication number Publication date
JPH0318407Y2 (US07655688-20100202-C00086.png) 1991-04-18

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