JPS6348443A - Gas analyzer - Google Patents

Gas analyzer

Info

Publication number
JPS6348443A
JPS6348443A JP61192410A JP19241086A JPS6348443A JP S6348443 A JPS6348443 A JP S6348443A JP 61192410 A JP61192410 A JP 61192410A JP 19241086 A JP19241086 A JP 19241086A JP S6348443 A JPS6348443 A JP S6348443A
Authority
JP
Japan
Prior art keywords
detector
component
detectors
analyzer
cell
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61192410A
Other languages
Japanese (ja)
Other versions
JPH0529060B2 (en
Inventor
Tsukasa Satake
司 佐竹
Masahiko Fujiwara
雅彦 藤原
Takao Imaki
隆雄 今木
Kimio Miyatake
宮武 公夫
Hiroyuki Amimoto
網本 宏之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Ltd
Original Assignee
Horiba Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Ltd filed Critical Horiba Ltd
Priority to JP61192410A priority Critical patent/JPS6348443A/en
Publication of JPS6348443A publication Critical patent/JPS6348443A/en
Publication of JPH0529060B2 publication Critical patent/JPH0529060B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE:To approximate the output characteristic of a detector for a component having a large coefft. of absorption to linearity and to enhance the accuracy of measurement by providing the detector for the component having the large coefft. of absorption among the plural detectors corresponding to the plural components to the side face of a cell. CONSTITUTION:Both of the direct light which is emitted from a light source 20 and advances rectilinearly along an optical axis L and the reflected light enters the detectors 41, 43 provided on the optical axis L, but only the reflected light enters the detector 42 provided to the side face 10s of the cell 10; therefore, the quantity of the incident light on the detector 42 corresponding to the component having the large coefft. of absorption is sizably smaller than the quantity of the incident light on the other detectors 41, 43 and since the effective cell length of the detector 42 is shorter than the effective cell length of the other detectors 41, 43 the output of the detector 42 is not saturated to be broken of the linearily, unlike with the conventional analyzer, and the signal output characteristic itself approximates to the linearily; therefore, the signal correctly indicating the concn. of CO2 which is the component to be measured is outputted. As a result, the need for providing a costly linearizer on the output side of the detector 42 is eliminated and the constitution of this kind of the analyzer is simplified; in addition, the cost of the analyzer is reduced.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、複数の成分に対応してそれぞれ検出器を設け
たガス分析計の改良に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an improvement in a gas analyzer that is provided with detectors for each of a plurality of components.

〔従来の技術〕[Conventional technology]

赤外線分析計において、サンプルガス中の複数成分を単
一のセルによって測定する場合、各成分ガスの吸収係数
に相違があることに注意する必要がある。例えば、Co
w(炭酸ガス)の吸収係数はC0(−酸化炭素)のそれ
に比べてかなり大きいので、これらの成分ガスを単一の
セルによって測定するのに、従来は第3図に示すように
構成していた。
When measuring multiple components in a sample gas using a single cell in an infrared analyzer, it is necessary to be careful that the absorption coefficients of each component gas are different. For example, Co
Since the absorption coefficient of w (carbon dioxide gas) is considerably larger than that of C0 (-carbon oxide), the conventional configuration for measuring these component gases with a single cell was as shown in Figure 3. Ta.

同図において、10はサンプルガスSGが供給される例
えばアルミニウムブロックより成るセルで、その内周壁
は光を反射し易いように形成されている。 11.12
はそれぞれサンプルガスの導入口、導出口、13.14
はセル10の両端を閉塞するセル窓である。20は一方
のセル窓13の外方に設けられる赤外線を発する光源、
30はセル窓13と光源20との間に介装される変調手
段としてのチョッパである。
In the figure, reference numeral 10 denotes a cell made of, for example, an aluminum block, to which sample gas SG is supplied, and its inner circumferential wall is formed to easily reflect light. 11.12
13.14 are the sample gas inlet and outlet, respectively.
are cell windows that close both ends of the cell 10. 20 is a light source that emits infrared rays and is provided outside one cell window 13;
30 is a chopper interposed between the cell window 13 and the light source 20 as a modulation means.

41、42.43は他方のセル窓14の外方に互いに並
列配置された半導体センサ又はパイロセンサ等より成る
検出器である。検出器41はCOの吸収波長帯域の赤外
線のみを通過させるソリッドタイプのバンドパスフィル
タ41Fを備えており、サンプルガスSG中のCOを主
として検出する。検出器42はCotの吸収波長帯域の
赤外線のみを通過させるソリッドタイプのバンドパスフ
ィルタ42Fを備えており、サンプルガスSG中のCO
オを主として検出する。又、検出器43は前記バンドパ
スフィルタ41F、42Fの吸収波長帯域とは異なる特
定の吸収波長帯域の赤外線を通過させるフィルタ43F
を備えており、比較検出器として作用する。
Detectors 41, 42, and 43 are semiconductor sensors, pyro sensors, or the like arranged in parallel with each other outside the other cell window 14. The detector 41 includes a solid type bandpass filter 41F that passes only infrared rays in the absorption wavelength band of CO, and mainly detects CO in the sample gas SG. The detector 42 is equipped with a solid type bandpass filter 42F that passes only the infrared rays in the absorption wavelength band of Cot, and it detects CO in the sample gas SG.
Mainly detected. Further, the detector 43 includes a filter 43F that passes infrared rays in a specific absorption wavelength band different from the absorption wavelength band of the bandpass filters 41F and 42F.
and acts as a comparison detector.

51.52.53は検出器41.42.43の出力信号
をそれぞれ増幅する増幅器、61.62は引算器、70
は引算器62の出力側に設けられるリニアライザ、81
゜82は出力端子である。
51, 52, and 53 are amplifiers that amplify the output signals of the detectors 41, 42, and 43, respectively, 61.62 is a subtracter, and 70
is a linearizer 81 provided on the output side of the subtracter 62;
82 is an output terminal.

このように構成したガス分析計において、サンプルガス
SG中のCOの濃度は検出器41の出力と検出器43の
出力の差として出力端子81に出力される。
In the gas analyzer configured in this manner, the concentration of CO in the sample gas SG is output to the output terminal 81 as the difference between the output of the detector 41 and the output of the detector 43.

又、サンプルガスSG中のCotの濃度は検出器42の
出力と検出器43の出力の差として出力端子82に出力
される。ここで、吸収係数が大きいCOlに対応する検
出器42側の演算系にはリニアライザ70が設けられて
いるので、出力信号が直線化され、CO□濃度に比例し
た所定の検出出力が出力端子82に出力される。
Further, the concentration of Cot in the sample gas SG is outputted to the output terminal 82 as the difference between the output of the detector 42 and the output of the detector 43. Here, since a linearizer 70 is provided in the calculation system on the detector 42 side corresponding to COl having a large absorption coefficient, the output signal is linearized, and a predetermined detection output proportional to the CO□ concentration is output to the output terminal 82. is output to.

〔発明が解決しようとする問題点〕 しかしながら、上記構成のガス分析計においては、リニ
アライザ70を設けているため構成が複雑であり、又、
この種リニアライザ70は高価であるので分析計全体と
してのコストがアップするという欠点がある。
[Problems to be Solved by the Invention] However, in the gas analyzer having the above configuration, the configuration is complicated because the linearizer 70 is provided.
Since this type of linearizer 70 is expensive, it has the disadvantage of increasing the cost of the analyzer as a whole.

これに対して、特開昭51−40192号公報に示すよ
うに、複数の反射鏡を用いて各成分ガスに最適な光路長
を存する複数の光路を形成し、そのそれぞれに検出器を
配置して各成分ガスを最適の条件の下で測定しようとし
たものがあるが、セルの構成が複雑化するという欠点が
ある。
On the other hand, as shown in Japanese Patent Application Laid-Open No. 51-40192, a plurality of optical paths having the optimum optical path length for each component gas are formed using a plurality of reflecting mirrors, and a detector is placed in each of the optical paths. Some attempts have been made to measure each component gas under optimal conditions, but this method has the disadvantage of complicating the cell configuration.

本発明は、上述の事柄に留意してなされたもので、その
目的とするところは、簡単な構成で安価かつ正確に成分
ガスを測定し得るガス分析針を提供することにある。
The present invention has been made with the above-mentioned considerations in mind, and an object thereof is to provide a gas analysis needle that has a simple configuration, can inexpensively and accurately measure component gases.

〔問題点を解決するための手段〕[Means for solving problems]

上述の目的を達成するため、本発明に係るガス分析計は
、吸収係数の大きな成分に対応する検出器をセルの側面
に設けている。
In order to achieve the above object, the gas analyzer according to the present invention is provided with a detector corresponding to a component having a large absorption coefficient on the side of the cell.

〔作用〕[Effect]

吸収係数が大きい成分ガスに対応する検出器への入射光
量が減少すると共に、前記成分ガスに対する実効セル長
が短くなるので、吸収係数が大きい成分ガスをも最適の
条件下において測定することができる。
Since the amount of light incident on the detector corresponding to a component gas with a large absorption coefficient is reduced and the effective cell length for the component gas is shortened, component gases with a large absorption coefficient can also be measured under optimal conditions. .

〔実施例〕〔Example〕

以下、本発明の実施例を図面を参照しながら説明する。 Embodiments of the present invention will be described below with reference to the drawings.

第1図は本発明の一実施例を示し、特に、サンプルガス
中の複数の成分(図示例では、co、 co。
FIG. 1 shows an embodiment of the present invention, in particular, a plurality of components (in the illustrated example, co, co, etc.) in a sample gas.

の2成分)の濃度をそれぞれ互いに独立して測定するこ
とができるガス分析計の構成例を示す。
An example of the configuration of a gas analyzer that can independently measure the concentrations of two components) is shown below.

同図において第3図に示す符号と同一の符号は同−物又
は相当物を示し、その説明を省略する。
In this figure, the same reference numerals as those shown in FIG. 3 indicate the same or equivalent parts, and their explanation will be omitted.

この第1図に示すガス分析計が第3図に示すものと大き
く異なるところは、セル10の側面10Sに、セル窓1
3.14と同様の構成を有するセル窓15を設け、この
セル窓15の外方に吸収係数の大きい成分(本実施例で
はC(h )に対応する検出器42を、バンドパスフィ
ルタ42Fと共に設けた点である。
The gas analyzer shown in FIG. 1 is largely different from the one shown in FIG.
A cell window 15 having the same configuration as in 3.14 is provided, and a detector 42 corresponding to a component with a large absorption coefficient (in this example, C(h)) is installed outside the cell window 15 together with a bandpass filter 42F. This is the point I made.

即ち、光源20から検出器41.43に向かって直線的
に進む光の軸(以下、光軸という)Lに対して直角な位
置であってしかも、前記検出器41.43の実効セル長
より短い位置に、検出器42を設けたのである。
That is, it is a position perpendicular to the axis (hereinafter referred to as optical axis) L of light that travels linearly from the light source 20 toward the detector 41.43, and furthermore, the position is longer than the effective cell length of the detector 41.43. The detector 42 was provided at a short position.

このように構成することにより、光軸り上に設けられた
検出器41.43には、光源20から発せられる光のう
ち光軸りに沿って直進する直接光及び反射光の双方が入
射するが、セルlOの側面10Sに設けられた検出器4
2には反射光しか入射しないので、吸収係数の大きい成
分に対応する検出器42への入射光量は他の検出器41
.43のそれに比較してかなり少なく、又、検出器42
の実効セル長は他の検出器41.43のそれに比較して
短いので、検出器42の出力信号が従来のように飽和し
て直線性が崩れたすせず、信号出力特性自体が直線に近
づくので、測定対象成分であるCOlの濃度に正しく表
す信号が出力される。その結果、検出器42の出力側に
高価なりニアライザを設ける必要がなくなり、この種分
析計の構成が簡単になると共に、分析計のコストを低減
することができる。尚、上記構成により、CO,より吸
収係数が小さいCOの濃度を正確に測定できることは云
うまでもない。
With this configuration, both the direct light that travels straight along the optical axis and the reflected light out of the light emitted from the light source 20 enter the detectors 41 and 43 provided on the optical axis. However, the detector 4 provided on the side surface 10S of the cell IO
Since only the reflected light is incident on the detector 42, the amount of light incident on the detector 42 corresponding to the component with a large absorption coefficient is smaller than that on the other detector 41.
.. The number of detectors 42 is considerably smaller than that of 43, and the number of detectors 42
Since the effective cell length of the detector 42 is shorter than that of the other detectors 41 and 43, the output signal of the detector 42 does not saturate and lose linearity as in the conventional case, but the signal output characteristic itself becomes linear. Therefore, a signal that correctly represents the concentration of COI, which is the component to be measured, is output. As a result, there is no need to provide an expensive nearer on the output side of the detector 42, which simplifies the configuration of this type of analyzer and reduces the cost of the analyzer. It goes without saying that with the above configuration, it is possible to accurately measure the concentration of CO, which has a smaller absorption coefficient than CO.

第2図は本発明の他の実施例を示し、特に、すラブルガ
ス中に含まれる干渉成分(図示例では、CO’t ンの
影響を除去して特定の測定対象成分(図示例では、CO
)の濃度を測定することができるガス分析計の構成例を
示す。
FIG. 2 shows another embodiment of the present invention, in particular, removes the influence of interference components (in the illustrated example, CO'ton) contained in the rubble gas and selects a specific measurement target component (in the illustrated example, CO'ton).
) shows an example of the configuration of a gas analyzer that can measure the concentration of

この第2図においては、測定対象成分COに対応する検
出器41をバンドパスフィルタ41Fと共に光軸り上に
設け、他方、COより吸収係数の大きい干渉成分Cot
に対応する検出器42を、セル10の側面10Sに形成
したセル窓15の外方にバンドパスフィルタ42Fと共
に設け、更に、各検出器41.42の出力をそれぞれ増
幅する増幅器51.52の後段に引算器63を設け、こ
の引算器63において干渉成分CO!の濃度を引算し、
測定対象成分COの濃度を表す信号を出力端子83に出
力させるようにしている。
In FIG. 2, a detector 41 corresponding to the component to be measured CO is provided on the optical axis together with a bandpass filter 41F, and an interference component Cot having a larger absorption coefficient than CO is arranged on the optical axis.
A detector 42 corresponding to the detector 42 is provided outside the cell window 15 formed on the side surface 10S of the cell 10 together with a bandpass filter 42F, and further, an amplifier 51.52 is provided at the rear stage of the amplifier 51.52 to amplify the output of each detector 41.42. A subtracter 63 is provided in the subtracter 63, and the interference component CO! Subtract the concentration of
A signal representing the concentration of the measurement target component CO is outputted to the output terminal 83.

尚、本発明は上記2つの実施例にのみ限定されるもので
はなく、例えば3以上の複数の成分を同時に独立して測
定する分析計や、2以上の干渉成分の影響を除去して特
定の測定対象成分の濃度を測定するようにした分析計に
適用することができる。又、セルに対して比較ガスとサ
ンプルガスとを交互に供給するようにした所謂流体変調
方式の分析計にも通用することができる。
It should be noted that the present invention is not limited to the above two embodiments; for example, an analyzer that measures three or more components simultaneously and independently, or a specific analyzer that removes the influence of two or more interfering components. It can be applied to an analyzer that measures the concentration of a component to be measured. Furthermore, the present invention can also be applied to a so-called fluid modulation type analyzer in which a comparison gas and a sample gas are alternately supplied to a cell.

〔発明の効果〕〔Effect of the invention〕

以上説明したように、本発明に係るガス分析計は、吸収
係数の大きな成分に対応する検出器をセルの側面に設け
ているので、吸収係数の大きな成分に対する検出器の出
力特性が直線に近くなって改善されるので、高価なリニ
アライザを用いたりしなくても複数成分の測定を高精度
で測定することができる。又、分析計の構成が簡単とな
り、しかも安価に構成することができる。
As explained above, the gas analyzer according to the present invention has a detector corresponding to a component with a large absorption coefficient on the side of the cell, so the output characteristic of the detector for a component with a large absorption coefficient is close to a straight line. Therefore, multiple components can be measured with high accuracy without using an expensive linearizer. Furthermore, the structure of the analyzer becomes simple and can be constructed at low cost.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例を示す構成図、第2図は本発
明の他の実施例を示す構成図、第3図は従来技術を説明
するための構成図である。 10・・・セル、10S・・・側面、41,42.43
・・・検出器。
FIG. 1 is a block diagram showing one embodiment of the present invention, FIG. 2 is a block diagram showing another embodiment of the present invention, and FIG. 3 is a block diagram for explaining the prior art. 10... Cell, 10S... Side, 41, 42.43
···Detector.

Claims (1)

【特許請求の範囲】[Claims] 複数の成分に対応してそれぞれ検出器を設けたガス分析
計において、吸収係数の大きな成分に対応する検出器を
セルの側面に設けたことを特徴とするガス分析計。
What is claimed is: 1. A gas analyzer comprising detectors for each of a plurality of components, characterized in that a detector corresponding to a component with a large absorption coefficient is provided on the side of a cell.
JP61192410A 1986-08-18 1986-08-18 Gas analyzer Granted JPS6348443A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61192410A JPS6348443A (en) 1986-08-18 1986-08-18 Gas analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61192410A JPS6348443A (en) 1986-08-18 1986-08-18 Gas analyzer

Publications (2)

Publication Number Publication Date
JPS6348443A true JPS6348443A (en) 1988-03-01
JPH0529060B2 JPH0529060B2 (en) 1993-04-28

Family

ID=16290852

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61192410A Granted JPS6348443A (en) 1986-08-18 1986-08-18 Gas analyzer

Country Status (1)

Country Link
JP (1) JPS6348443A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021009987A1 (en) * 2019-07-16 2021-01-21 株式会社日立製作所 Sample measurement device and sample measurement method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5398889A (en) * 1977-02-09 1978-08-29 Yokogawa Hokushin Electric Corp Infrared gas analyzer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5398889A (en) * 1977-02-09 1978-08-29 Yokogawa Hokushin Electric Corp Infrared gas analyzer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021009987A1 (en) * 2019-07-16 2021-01-21 株式会社日立製作所 Sample measurement device and sample measurement method

Also Published As

Publication number Publication date
JPH0529060B2 (en) 1993-04-28

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