JPS6348417A - Multiple rotation type absolute encoder - Google Patents

Multiple rotation type absolute encoder

Info

Publication number
JPS6348417A
JPS6348417A JP19473386A JP19473386A JPS6348417A JP S6348417 A JPS6348417 A JP S6348417A JP 19473386 A JP19473386 A JP 19473386A JP 19473386 A JP19473386 A JP 19473386A JP S6348417 A JPS6348417 A JP S6348417A
Authority
JP
Japan
Prior art keywords
main shaft
shaft
absolute
driven shaft
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19473386A
Other languages
Japanese (ja)
Inventor
Takayuki Hoshitani
孝幸 星谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Omron Tateisi Electronics Co filed Critical Omron Tateisi Electronics Co
Priority to JP19473386A priority Critical patent/JPS6348417A/en
Publication of JPS6348417A publication Critical patent/JPS6348417A/en
Pending legal-status Critical Current

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  • Optical Transform (AREA)

Abstract

PURPOSE:To detect a rotational quantity over a wide range by connecting a driven shaft to a main shaft through a planetary differential speed reducer and providing absolute rotational quantity detection parts to the main shaft and drive shaft respectively, and thus obtaining a large speed reduction rate. CONSTITUTION:The main shaft 2, planetary differential speed reducer 3, driven shaft 4, etc., are put and arranged in a cylindrical case 1. The absolute rotational quantity detection parts 5 and 6 are provided to the main shaft 2 and driven shaft 4 respectively. The main shaft 2 is supported by a bearing 8 provided to a front plate 7. Then when the main shaft 2 is rotated, its rotational quantity is transmitted to the speed reducer 3 and an operating shaft 18 and a cylindrical body 25 rotate in one body to rotate an eccentric cylinder 22 eccentrically. This eccentric rotation is transmitted through the gear system composed of external gears 27 and 28 and internal gears 29 and 30 through the cylindrical body 25 and a visco-elastic material 26 the this gear system enters specific speed reducing operating to outputs a rotational quantity based upon the speed reduction ratio from the drive shaft 4. Consequently, the rotational quantity is detected over a wide range.

Description

【発明の詳細な説明】 〈産業上の利用分野〉 この発明は、多回転にわたって主軸の絶対回転量を検出
する多回転型アブソリュートエンコーダに関する。
DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a multi-rotation type absolute encoder that detects the absolute rotation amount of a main shaft over multiple rotations.

〈従来の技術〉 従来、多回転型アブソリュートエンコーダとして、複数
個のアブソリュートエンコーダを歯車機構を介して順次
連動させたもの(特開昭58−106691号)や、ハ
ーモニックドライブを用いて2つのレゾルバを同軸上に
並べた構造のもの(特開昭59−154319号)が提
案されている。
<Prior art> Conventionally, multi-rotation type absolute encoders include those in which multiple absolute encoders are sequentially linked via a gear mechanism (Japanese Patent Application Laid-open No. 106691/1983), and two resolvers using a harmonic drive. A structure arranged coaxially (Japanese Patent Application Laid-Open No. 154319/1983) has been proposed.

〈発明が解決しようとする問題点〉 ところが前者のタイプは複数個のアブソリュートエンコ
ーダを同軸的に連結できないため、装置全体が必然的に
大型化する等の欠点がある。
<Problems to be Solved by the Invention> However, in the former type, since a plurality of absolute encoders cannot be connected coaxially, there is a drawback that the entire device inevitably becomes larger.

一方後者のタイプは装置全体がコンパクトになる反面、
ハーモニックドライブの製作が困難であるためコスト高
となり、またハーモニ、7クドライブのコストモーショ
ンが検出精度の低下を促がすという問題がある。
On the other hand, while the latter type makes the entire device more compact,
There is a problem in that the manufacturing cost of the harmonic drive is high because it is difficult, and the cost motion of the harmonic drive causes a decrease in detection accuracy.

この発明は、上記問題を解消するためのものであって、
遊星差動型減速機がもつ特徴、すなわち簡単な構造で大
きな減速比が得られるという特徴に着目し、この種減速
機をその機構中に導入することによって、小型化、低コ
スト化。
This invention is intended to solve the above problem,
We focused on the feature of the planetary differential type reducer, namely its ability to obtain a large reduction ratio with a simple structure, and by incorporating this type of reducer into the mechanism, we reduced the size and cost.

さらには精度の向上をはかった新規な多回転型アブソリ
ュートエンコーダを提供することを目的とする。
Furthermore, it is an object of the present invention to provide a new multi-rotation type absolute encoder with improved accuracy.

く問題点を解決するための手段〉 上記目的を達成するため、この発明では、主軸に対し遊
星差動型減速機を介して従動軸を接続すると共に、主軸
および従動軸のそれぞれに絶対回転量検出部を設けて多
回転型アブソリュートエンコーダを構成することにした
ゆく作用〉 主軸に回転が与えられると、その回転量は遊星差動型減
速機に伝達され、この遊星差動型減速機内での所定の減
速動作が行われて、従動軸からは減速比に応じた回転量
が出力される。主軸および従動軸の各回転量はそれぞれ
の絶対回転量検出部にて検出されるもので、演算回路等
においてその検出イ直を用いて主軸の多回転にわたる絶
対回転量が求められる。
Means for Solving the Problems> In order to achieve the above object, the present invention connects the driven shaft to the main shaft via a planetary differential type reducer, and also sets the absolute rotation amount to each of the main shaft and the driven shaft. Effects of configuring a multi-rotation type absolute encoder by providing a detection section> When rotation is applied to the main shaft, the amount of rotation is transmitted to the planetary differential type reducer, and the amount of rotation is transmitted to the planetary differential type reducer. A predetermined deceleration operation is performed, and the driven shaft outputs a rotation amount according to the deceleration ratio. The respective rotation amounts of the main shaft and the driven shaft are detected by respective absolute rotation amount detection sections, and the absolute rotation amounts over multiple rotations of the main shaft are determined using the detected values directly in an arithmetic circuit or the like.

〈実施例〉 第1図はこの発明の一実施例にかかる多回転型アブソリ
ュートエンコーダの内部構造を示す。
<Embodiment> FIG. 1 shows the internal structure of a multi-rotation type absolute encoder according to an embodiment of the present invention.

図示例のものは円筒状ケース1の内部に主軸2、遊星差
動型減速機3.従動軸4等を収容配備し、主軸2および
従動軸4にはそれぞれ絶対回転量検出部5.6を設ける
と共に、主軸2は前板7に設けた軸受8にて支持して、
その先端を前面より突出させている。
The illustrated example includes a main shaft 2, a planetary differential type reducer 3. The driven shaft 4 and the like are housed and arranged, and the main shaft 2 and the driven shaft 4 are each provided with an absolute rotation amount detection section 5.6, and the main shaft 2 is supported by a bearing 8 provided on the front plate 7.
Its tip protrudes from the front.

前記一方の絶対回転量検出部5は主軸2の絶対回転量を
検出するためのものであって、この絶対回転量の検出パ
ターンが施された回転ディスク9を主軸2に装着し、こ
の回転ディスク9を中間に挟んで複数の発光ダイオード
より成る発光素子群10と、複数のフォトトランジスタ
より成る受光素子群11とを対向配備して構成されてい
る。
The one absolute rotation amount detection section 5 is for detecting the absolute rotation amount of the main spindle 2, and a rotating disk 9 on which a detection pattern for the absolute rotation amount has been applied is attached to the main spindle 2, and this rotating disk A light emitting element group 10 made up of a plurality of light emitting diodes and a light receiving element group 11 made up of a plurality of phototransistors are disposed facing each other with a light emitting element 9 sandwiched therebetween.

また他方の絶対回転検出部6は従動軸4の絶対回転量を
検出するためのもので、主軸2の絶対回転量検出部5と
同様、回転ディスク12゜発光素子群13および、受光
素子群14を含んで成る。
The other absolute rotation detecting section 6 is for detecting the absolute rotation amount of the driven shaft 4, and similarly to the absolute rotation amount detecting section 5 of the main shaft 2, it includes a rotating disk 12, a light emitting element group 13, and a light receiving element group 14. It consists of

前記遊星差動型減速機3は主軸2の回転を減速して従動
軸4に伝達するためのもので、ハウジング15内の中心
位置に軸受16.17により作動軸18を回転自由に支
持し、この作動軸18の先端を蓋板19より突出させて
前記主軸2に一体連結すると共に、前記従動軸4をハウ
ジング15内へ挿入して軸受20,21にて支持してい
る。前記作動軸18には偏心円筒22が偏心させて一体
回転可能に嵌着してあり、この偏心円筒22上に軸受2
3,24を介して円筒体25が独立回転自由に配備しで
ある。
The planetary differential type reducer 3 is for decelerating the rotation of the main shaft 2 and transmitting it to the driven shaft 4. The operating shaft 18 is rotatably supported at the center of the housing 15 by bearings 16 and 17. The tip of the operating shaft 18 projects from the cover plate 19 and is integrally connected to the main shaft 2, and the driven shaft 4 is inserted into the housing 15 and supported by bearings 20 and 21. An eccentric cylinder 22 is fitted on the operating shaft 18 so as to be able to rotate integrally therewith, and a bearing 2 is mounted on the eccentric cylinder 22.
3 and 24, the cylindrical body 25 is arranged to freely rotate independently.

前記円筒体25上にはゴム等より成る円筒状の粘弾性材
26が一体に嵌着してあり、この粘弾性材26上に外歯
車27.28が一体回転可能に装着すると共に、各外歯
車27.28の外周位置にはそれぞれ外歯車27.28
の偏心部分が噛合する内歯車29.30が配備しである
A cylindrical viscoelastic material 26 made of rubber or the like is integrally fitted onto the cylindrical body 25, and external gears 27 and 28 are mounted on this viscoelastic material 26 so as to be integrally rotatable. External gears 27 and 28 are located on the outer periphery of the gears 27 and 28, respectively.
An internal gear 29, 30 is provided in which the eccentric portion of the gear meshes.

一方の内歯車29はハウジング15および蓋板19に支
持固定され、他方の内歯車30は従動軸4に一体に連結
固定されている。
One internal gear 29 is supported and fixed to the housing 15 and the cover plate 19, and the other internal gear 30 is integrally connected and fixed to the driven shaft 4.

なお図中、31〜34は回路基板であり、このうち回路
基板31.32には絶対回転量検出部5.6を構成する
に必要な回路が組み込まれ、また回路基板33.34に
は各絶対回転量検出部5.6での検出信号を所定の信号
コードに変換したり、多回転にわたる主軸2の絶対回転
量を演算するための回路が組み込まれている。
In the figure, numerals 31 to 34 are circuit boards, among which circuit boards 31 and 32 are equipped with circuits necessary to configure the absolute rotation amount detection section 5.6, and circuit boards 33 and 34 are equipped with circuits necessary to configure the absolute rotation amount detection section 5.6. A circuit is incorporated for converting the detection signal from the absolute rotation amount detection section 5.6 into a predetermined signal code and for calculating the absolute rotation amount of the main shaft 2 over multiple rotations.

第2図はこの発明の他の実施例を示すもので、前記遊星
差動型減速機3として偏心遊星差動ローラによる減速機
が用いられている。同図のものは、前記外歯車27.2
8がアウターローラ35.36に、また内歯車29.3
0がインナーローラ37.38に、それぞれ置き代えら
れた構造であって、その他の構成は前記第1実施例と同
様である。従ってここでは対応する構成に対応する符号
を付することによって、個々の説明は省略する。
FIG. 2 shows another embodiment of the present invention, in which the planetary differential type reducer 3 is a reducer using eccentric planetary differential rollers. In the same figure, the external gear 27.2
8 to the outer roller 35.36, and the internal gear 29.3
0 is replaced with inner rollers 37 and 38, respectively, and the other configurations are the same as in the first embodiment. Therefore, by assigning corresponding symbols to corresponding configurations, individual explanations will be omitted here.

しかして主軸2に回転が与えられると、その回転量は遊
星差動型減速機3に伝達され、作動軸18が主軸2と一
体回転して偏心円筒22を偏心回動させる。この偏心回
動は円筒体25および粘弾性材26を介して外歯車27
.28および内歯車29.30より成る歯車系に伝達さ
れ、この歯車系における所定の減速動作によって従動軸
4からは減速比に応じた回転量が出力される。
When the main shaft 2 is rotated, the amount of rotation is transmitted to the planetary differential speed reducer 3, and the operating shaft 18 rotates integrally with the main shaft 2, causing the eccentric cylinder 22 to eccentrically rotate. This eccentric rotation is transmitted to the external gear 27 via the cylindrical body 25 and the viscoelastic material 26.
.. 28 and internal gears 29 and 30, and a predetermined deceleration operation in this gear system causes the driven shaft 4 to output a rotation amount according to the reduction ratio.

いま外歯車27の歯数をZl、内歯車29の歯数をZ2
.外歯車28の歯数をZ3+ 内歯車30の歯数をZ4
とし、また外歯車27と内歯車29との軸間距離をaI
+外歯車28と内歯車30との軸間距離をa2とすると
、これら各歯車の歯数はつぎの条件を満たしている。
Now, the number of teeth of the external gear 27 is Zl, and the number of teeth of the internal gear 29 is Z2.
.. The number of teeth of the external gear 28 is Z3 + The number of teeth of the internal gear 30 is Z4
Also, the distance between the shafts of the external gear 27 and the internal gear 29 is aI
+Assuming that the distance between the axes of the external gear 28 and the internal gear 30 is a2, the number of teeth of each of these gears satisfies the following conditions.

ZI < Zz 、 Z3 < Z4 Z+Za≠Zt Zs a、 =a2 =A (ただしAは定数)つぎに主軸2
の回転量がθ、とすれば、従動軸4の回転量θ2はつぎ
の0式で表せる。
ZI < Zz, Z3 < Z4 Z+Za≠Zt Zs a, =a2 =A (A is a constant) Next, spindle 2
If the amount of rotation of the driven shaft 4 is θ, the amount of rotation θ2 of the driven shaft 4 can be expressed by the following equation.

ZI Z4 また主軸2の検出分解能をn1/1回転、従動軸4の検
出分解能をn z / 1回転(ただしR2はZI Z
a / (ZI Z4Zt Z3)と等しいかまたはそ
の整数倍となるようにし、またZI 24/ (ZI 
 Z4  Zt Z3 )も整数となるようにする)と
すると、主軸2が1回転したときの従動軸4の検出値R
21はっぎの0式で与えられる。
ZI Z4 Also, the detection resolution of the main shaft 2 is n1/1 rotation, and the detection resolution of the driven shaft 4 is n z / 1 rotation (however, R2 is ZI Z
a / (ZI Z4Zt Z3) or an integral multiple thereof, and ZI 24/ (ZI
Z4 Zt Z3 ) is also an integer), then the detected value R of the driven shaft 4 when the main shaft 2 rotates once
21 is given by Huggi's 0 formula.

ZIZa よって一方の絶対回転量検出部5にて検出された主軸2
の検出値をR11他方の絶対回転量検出部6にて検出さ
れた従動軸4の検出値をR2とすれば、主軸2が複数回
転したときの主軸2の絶対回転量Nはつぎの0式で与え
られる。
ZIZa Therefore, the main shaft 2 detected by one absolute rotation amount detection section 5
If the detected value of the driven shaft 4 detected by the other absolute rotation amount detection unit 6 is R2, then the absolute rotation amount N of the main shaft 2 when the main shaft 2 rotates multiple times is expressed by the following equation 0. Given.

N−R+  + [Rz  / Rz+コ xn、、、
、、■ただし[]内の算出値については小数点以下は切
り捨てる。
N-R+ + [Rz / Rz+ko xn,,,
,,■However, for calculated values in [ ], decimal places are rounded down.

かくして前記回路基板33.34に組まれた回路にて上
記0式の演算を行って、その演算結果を所定の出力コー
ドに変換して出力する。
Thus, the circuit assembled on the circuit boards 33 and 34 performs the calculation of the above equation 0, and converts the calculation result into a predetermined output code and outputs it.

なお上記実施例において、偏心円筒22の偏心量Xは前
記歯車系の軸間距離にかかる定数Aより所定長さだけ大
きく設定してあり、これにより外歯車27と内歯車29
との間のバフクラッシュおよび外歯車28と内歯車30
との間のバックラッシュがゼロ以下となるようにしであ
る。この場合に歯車の加工誤差1組み付は誤差により歯
面間に接触圧が予圧として加わって、回転の円滑性が損
なわれるのを防ぐため、粘弾性材26を円筒体25と外
歯車27.28との間に介在させである。かくてこの粘
弾性材26の粘張性により歯車加工誤差や組み付は精度
の誤差が吸収され、加えて音、振動等も吸収されて、バ
ックラッシュのない円滑な回転が得られることになる。
In the above embodiment, the eccentricity X of the eccentric cylinder 22 is set to be larger than the constant A related to the distance between the shafts of the gear system by a predetermined length, so that the external gear 27 and the internal gear 29
Buff crush between external gear 28 and internal gear 30
This is done so that the backlash between the In this case, the viscoelastic material 26 is attached to the cylindrical body 25 and the external gear 27 in order to prevent contact pressure from being applied as a preload between the tooth surfaces due to the assembly error and impairing the smoothness of rotation. It is interposed between 28 and 28. Thus, the viscosity of the viscoelastic material 26 absorbs gear machining errors and assembly precision errors, and also absorbs sound, vibration, etc., resulting in smooth rotation without backlash. .

また第2図に示す第2実施例については、アウターロー
ラ35の径をdl、インナーローラ37の径をdl、ア
ウターロータ36の径をd3.インナーローラ38の径
をd4とし、またアウターローラ35とインナーローラ
37との軸間距離をal+ アウターローラ36とイン
ナーローラ38との軸間距離をa2とすると、これら各
ローラの径はつぎの条件を満たしている。
Regarding the second embodiment shown in FIG. 2, the diameter of the outer roller 35 is dl, the diameter of the inner roller 37 is dl, and the diameter of the outer rotor 36 is d3. Assuming that the diameter of the inner roller 38 is d4, the distance between the axes of the outer roller 35 and the inner roller 37 is al+, and the distance between the axes of the outer roller 36 and the inner roller 38 is a2, the diameter of each of these rollers satisfies the following conditions. Satisfied.

d、<dl、d、<d4 d、d4 ≠d2 d3 a、 !az =A (ただしAは定数)つぎに主軸2
の回転量がθ1とすれば、従動軸4の回転量θ2はつぎ
の0式で表せる。
d,<dl,d,<d4 d,d4 ≠d2 d3 a, ! az = A (However, A is a constant) Next, main axis 2
If the amount of rotation of the driven shaft 4 is θ1, the amount of rotation θ2 of the driven shaft 4 can be expressed by the following equation 0.

d、d4 よって前記実施例におけるZI、Zz 、Z3 。d, d4 Therefore, ZI, Zz, and Z3 in the above example.

Z4をd、、dl、d3.d4に置き換えて前記■■弐
の演算を実行することにより、主軸2の多回転にわたる
絶対回転量Nを算出でき、またその演算結果を所定の出
力コードに変換して出力できる。
Z4 to d,, dl, d3. By replacing d4 with the calculation in 2 above, it is possible to calculate the absolute rotation amount N over multiple rotations of the main shaft 2, and the calculation result can be converted into a predetermined output code and output.

〈発明の効果〉 この発明は上記の如く、主軸に対し遊星差動型減速機を
介して従動軸を接続すると共に、主軸および従動軸のそ
れぞれに絶対回転量検出部を設けることにしたから、遊
星差動型減速機がもつ特徴、すなわち簡単な構造で大き
な減速比が得られるという特徴を生かすことができ、多
回転型アブソリュートエンコーダのコンパクト化を実現
すると共に、広範囲にわたる回転量の検出が可能となる
。また遊星差動型減速機にバックラッシュ除去機構を容
易に組み込むことができるから、検出精度の向上をはか
ることができる等、発明目的を達成した顕著な効果を奏
する。
<Effects of the Invention> As described above, in this invention, the driven shaft is connected to the main shaft via a planetary differential type reducer, and an absolute rotation amount detection section is provided for each of the main shaft and the driven shaft. By taking advantage of the features of the planetary differential type reducer, namely the ability to obtain a large reduction ratio with a simple structure, it is possible to make the multi-rotation type absolute encoder more compact and to detect a wide range of rotation amounts. becomes. Furthermore, since the backlash removal mechanism can be easily incorporated into the planetary differential type speed reducer, the detection accuracy can be improved, and other remarkable effects are achieved in achieving the object of the invention.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の一実施例にかかる多回転型アブソリ
ュートエンコーダの内部構造を示す断面図、第2図は他
の実施例の内部構造を示す断面図である。 2・・・・主軸 3・・・・遊星差動型減速機 4・・・・従動軸
FIG. 1 is a sectional view showing the internal structure of a multi-rotation type absolute encoder according to one embodiment of the present invention, and FIG. 2 is a sectional view showing the internal structure of another embodiment. 2... Main shaft 3... Planetary differential type reducer 4... Driven shaft

Claims (3)

【特許請求の範囲】[Claims] (1)主軸に対し遊星差動型減速機を介して従動軸が接
続されると共に、主軸および従動軸のそれぞれに絶対回
転量検出部を設けて成る多回転型アブソリュートエンコ
ーダ。
(1) A multi-rotation type absolute encoder in which a driven shaft is connected to the main shaft via a planetary differential type reducer, and an absolute rotation amount detection unit is provided on each of the main shaft and the driven shaft.
(2)前記遊星差動型減速機には、外歯車と内歯車との
間のバックラッシュをゼロ以下に設定するための粘弾性
材より成るバックラッシュ除去機構が設けられている特
許請求の範囲第1項記載の多回転型アブソリュートエン
コーダ。
(2) Claims in which the planetary differential type reducer is provided with a backlash removal mechanism made of a viscoelastic material for setting the backlash between the external gear and the internal gear to zero or less. The multi-rotation type absolute encoder according to item 1.
(3)前記絶対回転量検出部は、絶対回転量の検出パタ
ーンが施された回転ディスクを軸固定すると共に、この
回転ディスクを中間に挟んで発光素子群と受光素子群と
を対向配備して形成されている特許請求の範囲第1項記
載の多回転型アブソリュートエンコーダ。
(3) The absolute rotation amount detection unit has a rotary disk on which an absolute rotation amount detection pattern is applied, which is fixed to the shaft, and a light emitting element group and a light receiving element group are arranged facing each other with this rotating disk in between. A multi-rotation type absolute encoder according to claim 1.
JP19473386A 1986-08-19 1986-08-19 Multiple rotation type absolute encoder Pending JPS6348417A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19473386A JPS6348417A (en) 1986-08-19 1986-08-19 Multiple rotation type absolute encoder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19473386A JPS6348417A (en) 1986-08-19 1986-08-19 Multiple rotation type absolute encoder

Publications (1)

Publication Number Publication Date
JPS6348417A true JPS6348417A (en) 1988-03-01

Family

ID=16329328

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19473386A Pending JPS6348417A (en) 1986-08-19 1986-08-19 Multiple rotation type absolute encoder

Country Status (1)

Country Link
JP (1) JPS6348417A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002122444A (en) * 2000-10-17 2002-04-26 Harmonic Drive Syst Ind Co Ltd Absolute sensor
JP2005140210A (en) * 2003-11-05 2005-06-02 Tamagawa Seiki Co Ltd Gear unit with built-in sensor
CN106054734A (en) * 2016-07-15 2016-10-26 常州灵骏机器人科技有限公司 Integrated servo actuator based on industrial ethernet
JP2021089229A (en) * 2019-12-05 2021-06-10 東京コスモス電機株式会社 Rotation angle detector

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002122444A (en) * 2000-10-17 2002-04-26 Harmonic Drive Syst Ind Co Ltd Absolute sensor
DE10151179B4 (en) * 2000-10-17 2013-09-05 Harmonic Drive Systems Inc. absolute probe
JP2005140210A (en) * 2003-11-05 2005-06-02 Tamagawa Seiki Co Ltd Gear unit with built-in sensor
JP4482311B2 (en) * 2003-11-05 2010-06-16 多摩川精機株式会社 Gear unit with built-in sensor
CN106054734A (en) * 2016-07-15 2016-10-26 常州灵骏机器人科技有限公司 Integrated servo actuator based on industrial ethernet
JP2021089229A (en) * 2019-12-05 2021-06-10 東京コスモス電機株式会社 Rotation angle detector

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