JPS6348131U - - Google Patents

Info

Publication number
JPS6348131U
JPS6348131U JP14053886U JP14053886U JPS6348131U JP S6348131 U JPS6348131 U JP S6348131U JP 14053886 U JP14053886 U JP 14053886U JP 14053886 U JP14053886 U JP 14053886U JP S6348131 U JPS6348131 U JP S6348131U
Authority
JP
Japan
Prior art keywords
semiconductor
fixing part
shaft part
strain gauge
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14053886U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14053886U priority Critical patent/JPS6348131U/ja
Publication of JPS6348131U publication Critical patent/JPS6348131U/ja
Pending legal-status Critical Current

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  • Force Measurement Appropriate To Specific Purposes (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案の微小トルク検出器の一実施例
の斜視図で、トルクを与えたときの半導体ストレ
インゲージの撓み状況を示す平面図が第２図であ
る。第３図、第５図は半導体ストレインゲージの
原理を示すパターン図であり、その電気的ブリツ
ジ回路を第４図に示す。第６図および第７図は本
考案の微小トルク検出器の別の実施例である。第
８図および第９図は従来の通常のストレインゲー
ジを使用したトルク検出器を示す説明用図である
。 １……シヤフト部、２……固定部、３，４……
板バネ、５，６，２６，２９，３７，３８，３９
，４０……半導体ストレインゲージ、７，８……
支点、４１……弾性体シヤフト、４２，４３……
通常のストレンゲージ、４４……バネ、４５……
変位計または角度計。 FIG. 1 is a perspective view of one embodiment of the minute torque detector of the present invention, and FIG. 2 is a plan view showing the state of deflection of the semiconductor strain gauge when torque is applied. 3 and 5 are pattern diagrams showing the principle of a semiconductor strain gauge, and its electrical bridge circuit is shown in FIG. 6 and 7 show another embodiment of the minute torque detector of the present invention. FIGS. 8 and 9 are explanatory diagrams showing a conventional torque detector using a normal strain gauge. 1...Shaft part, 2...Fixing part, 3, 4...
Leaf spring, 5, 6, 26, 29, 37, 38, 39
, 40... Semiconductor strain gauge, 7, 8...
Fulcrum, 41... Elastic shaft, 42, 43...
Normal strain gauge, 44... Spring, 45...
Displacement or angle meter.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] シヤフト部、固定部および該シヤフト部を該固
定部に支持する板バネと、その両端をそれぞれ該
シヤフト部および該固定部に固定した、半導体単
結晶のチツプの表と裏に同一形状、同一寸法で、
かつ対称的に該半導体のＮ（またはＰ）型の組成
のパターンを有する半導体ストレインゲージとか
ら成る微小トルク検出器。 A shaft part, a fixing part, a leaf spring that supports the shaft part on the fixing part, and a semiconductor single crystal chip having both ends fixed to the shaft part and the fixing part, respectively, each having the same shape and dimensions on the front and back sides. in,
and a semiconductor strain gauge having a symmetrical pattern of N (or P) type composition of the semiconductor.
JP14053886U 1986-09-16 1986-09-16 Pending JPS6348131U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14053886U JPS6348131U (en) 1986-09-16 1986-09-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14053886U JPS6348131U (en) 1986-09-16 1986-09-16

Publications (1)

Publication Number Publication Date
JPS6348131U true JPS6348131U (en) 1988-04-01

Family

ID=31047478

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14053886U Pending JPS6348131U (en) 1986-09-16 1986-09-16

Country Status (1)

Country Link
JP (1) JPS6348131U (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03223635A (en) * 1989-12-08 1991-10-02 Nippondenso Co Ltd Steering-torque detecting apparatus
JP2006322470A (en) * 2005-05-17 2006-11-30 Yutaka Seimitsu Kogyo Ltd Bearing fastening device
JP2010169586A (en) * 2009-01-23 2010-08-05 Minebea Co Ltd Torque amount converter
JP2012132814A (en) * 2010-12-22 2012-07-12 Automotive Research & Testing Center Torque sensor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5441176A (en) * 1977-09-07 1979-04-02 Hitachi Ltd Semiconductor strain measuring device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5441176A (en) * 1977-09-07 1979-04-02 Hitachi Ltd Semiconductor strain measuring device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03223635A (en) * 1989-12-08 1991-10-02 Nippondenso Co Ltd Steering-torque detecting apparatus
JP2006322470A (en) * 2005-05-17 2006-11-30 Yutaka Seimitsu Kogyo Ltd Bearing fastening device
JP4555147B2 (en) * 2005-05-17 2010-09-29 豊精密工業株式会社 Bearing tightening device
JP2010169586A (en) * 2009-01-23 2010-08-05 Minebea Co Ltd Torque amount converter
JP2012132814A (en) * 2010-12-22 2012-07-12 Automotive Research & Testing Center Torque sensor

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