JPS6348083U - - Google Patents
Info
- Publication number
- JPS6348083U JPS6348083U JP14159486U JP14159486U JPS6348083U JP S6348083 U JPS6348083 U JP S6348083U JP 14159486 U JP14159486 U JP 14159486U JP 14159486 U JP14159486 U JP 14159486U JP S6348083 U JPS6348083 U JP S6348083U
- Authority
- JP
- Japan
- Prior art keywords
- valve body
- sealing groove
- valve
- vacuum valve
- contact surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007789 sealing Methods 0.000 claims 4
Landscapes
- Electrodes Of Semiconductors (AREA)
- Details Of Valves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14159486U JPH0245585Y2 (de) | 1986-09-16 | 1986-09-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14159486U JPH0245585Y2 (de) | 1986-09-16 | 1986-09-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6348083U true JPS6348083U (de) | 1988-04-01 |
| JPH0245585Y2 JPH0245585Y2 (de) | 1990-12-03 |
Family
ID=31049525
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14159486U Expired JPH0245585Y2 (de) | 1986-09-16 | 1986-09-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0245585Y2 (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004150510A (ja) * | 2002-10-30 | 2004-05-27 | Matsushita Electric Ind Co Ltd | 遮断弁 |
| JP2006528330A (ja) * | 2003-05-26 | 2006-12-14 | ダンフォス アクチーセルスカブ | 真空システムのサーボ弁 |
-
1986
- 1986-09-16 JP JP14159486U patent/JPH0245585Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004150510A (ja) * | 2002-10-30 | 2004-05-27 | Matsushita Electric Ind Co Ltd | 遮断弁 |
| JP2006528330A (ja) * | 2003-05-26 | 2006-12-14 | ダンフォス アクチーセルスカブ | 真空システムのサーボ弁 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0245585Y2 (de) | 1990-12-03 |