JPS6346945B2 - - Google Patents
Info
- Publication number
- JPS6346945B2 JPS6346945B2 JP6993280A JP6993280A JPS6346945B2 JP S6346945 B2 JPS6346945 B2 JP S6346945B2 JP 6993280 A JP6993280 A JP 6993280A JP 6993280 A JP6993280 A JP 6993280A JP S6346945 B2 JPS6346945 B2 JP S6346945B2
- Authority
- JP
- Japan
- Prior art keywords
- aluminum
- ring
- ray
- flange
- entrance window
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052782 aluminium Inorganic materials 0.000 claims description 19
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 19
- 229910000833 kovar Inorganic materials 0.000 claims description 12
- 239000011521 glass Substances 0.000 claims description 10
- 229910000838 Al alloy Inorganic materials 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 238000003466 welding Methods 0.000 description 12
- 238000000034 method Methods 0.000 description 10
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical group [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 9
- 238000007747 plating Methods 0.000 description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000004876 x-ray fluorescence Methods 0.000 description 5
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 239000000945 filler Substances 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 229910000531 Co alloy Inorganic materials 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000289 melt material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/86—Vessels; Containers; Vacuum locks
Description
【発明の詳細な説明】 この発明はＸ線像増倍管の製造方法に関する。[Detailed description of the invention] The present invention relates to a method for manufacturing an X-ray image intensifier.
一般にＸ線像増倍管例えばＸ線蛍光増倍管は、
被写体を通過したＸ線像を可視光像に変換するも
ので、従来、その外囲器はガラスからなるＸ線入
射窓部及びガラスからなる出力側の外囲器本体よ
り構成されている。そしてＸ線入射窓部と出力側
の外囲器本体の接合は、直接接合するか或いは両
者にコバルト合金材よりなる環体（コバール環）
を介して接合していた。この特にガラス製のＸ線
入射窓部を用いたＸ線蛍光増倍管は、管の内部が
高度の真空が保たれているため、ガラスの厚さは
３〜５mm必要としている。このため入射窓部のガ
ラスにより入射Ｘ線は散乱されると同時に減衰す
るので、Ｘ線蛍光増倍管のコントラスト、解像度
などの特性を悪くする。 In general, an X-ray image intensifier, such as an X-ray fluorescence intensifier,
It converts an X-ray image that has passed through an object into a visible light image, and its envelope has conventionally been comprised of an X-ray entrance window made of glass and an output-side envelope body made of glass. The X-ray entrance window and the output side envelope body can be joined directly or by a ring made of a cobalt alloy material (Kovar ring).
It was connected through. In particular, this X-ray fluorescence multiplier tube using an X-ray entrance window made of glass requires a glass thickness of 3 to 5 mm because a high degree of vacuum is maintained inside the tube. For this reason, the incident X-rays are scattered and attenuated by the glass of the entrance window, which deteriorates characteristics such as contrast and resolution of the X-ray fluorescence intensifier tube.
こうした欠点を除くため、Ｘ線入射窓部を薄い
金属板、例えば0.5〜1.5mm厚のアルミニウム、0.2
〜0.4mm厚のチタニウム、0.2〜0.4mm厚の鋼材等を
用いることが提案されている。この中でアルミニ
ウムは、他の金属に比べＸ線に対する質量吸収係
数が小さいため、板厚を比較的厚くして外側に凸
構造（鍔を形成）にすることができ、更にＸ線入
射窓部以外に外囲器の胴部にも用いＸ線蛍光増倍
管の軽量化を図ることができる。しかしながら、
外囲器の出力部は可射光を外部に取り出す必要
上、ガラスでできており、Ｘ線入射窓部に用いた
アルミニウムと、出力側ガラスを何らかの中間部
材を介して真空気密且つ大気圧に十分耐える接合
がされなければならない。一般にこのような中間
部材としては、ガラスと良く接合できるコバルト
合金（コバール）が用いられている。しかしアル
ミニウムとコバールの接合には互いに接合できな
いので、両者の間にニツケル環、或いは銅環を介
在させて溶接する方法が提案されている（例えば
実用新案49−25810号、実用新案50−14440号）。
しかしながら、この溶接方法はアルミニウムとコ
バールが溶融するため、コバール中の鉄とアルミ
ニウムで金属間化合物を形成し、溶接部は非常に
脆くなつてしまう欠点があつた。 In order to eliminate these drawbacks, the X-ray entrance window should be made of a thin metal plate, such as aluminum with a thickness of 0.5 to 1.5 mm, or
It has been proposed to use titanium with a thickness of ~0.4 mm, steel with a thickness of 0.2 to 0.4 mm, etc. Among these, aluminum has a smaller mass absorption coefficient for X-rays than other metals, so it is possible to make the plate relatively thick and create an outwardly convex structure (forming a flange). In addition, it can also be used in the body of the envelope to reduce the weight of the X-ray fluorescence multiplier tube. however,
The output part of the envelope is made of glass because it is necessary to take out the visible light to the outside, and the aluminum used for the X-ray entrance window and the output side glass are connected through some intermediate member to be vacuum-tight and sufficiently resistant to atmospheric pressure. A durable bond must be made. Cobalt alloy (Kovar), which can bond well with glass, is generally used as such an intermediate member. However, since aluminum and Kovar cannot be joined to each other, methods have been proposed in which a nickel ring or a copper ring is interposed between the two for welding (for example, Utility Model No. 49-25810, Utility Model No. 50-14440). ).
However, this welding method has the disadvantage that since the aluminum and Kovar are melted, an intermetallic compound is formed between the iron and aluminum in the Kovar, making the welded part extremely brittle.
この発明は上記従来の欠点を除去したＸ線像増
倍管の製造方法を提供することを目的とする。 An object of the present invention is to provide a method for manufacturing an X-ray image intensifier tube that eliminates the above-mentioned conventional drawbacks.
以下、図面を参照してこの発明の一実施例を詳
細に説明する。この発明のＸ線像増倍管例えばＸ
線蛍光増倍管は第１図及び第２図に示すように構
成され、第２図は第１図の要部を拡大して示して
いる。即ち、この発明によるＸ線蛍光増倍管の外
囲器は、Ｘ線入射窓部１１と、このＸ線入射窓部
１１に接合される胴部２１と、この胴部２１に接
合される環体３１を有する出力部４１とから構成
されている。この場合、Ｘ線入射窓部１１は外方
へ凸面状あるいは平面に近い凸面状にして鍔１１
ａを有し、アルミニウム又はアルミニウム合金か
らなつている。又、胴部２１は筒状にして両端に
はそれぞれ鍔２１ａ，２１ｂを有し、アルミニウ
ム又はアルミニウム合金からなつている。更に出
力部４１はガラスからなり、環体３１は鍔３１ａ
を備えコバール（コバルト合金）からなつてい
る。そして、図から明らかなように、胴部２１の
鍔２１ｂの外形は環体３１の鍔３１ａの外形より
も大きいことが必要であり、約10mm位の外形寸法
差が適当である。而も環体３１の鍔３１ａの先端
形状は、後述の溶接時に環体３１の温度が上り易
いようにくさび状に形成されている。尚、図中、
５１はアルミニウム又はアルミニウム合金からな
る溶加材であり、胴部２１の鍔２１ｂと環体３１
の鍔３１ａとに接し、気密封着の役割を果してい
る。 Hereinafter, one embodiment of the present invention will be described in detail with reference to the drawings. The X-ray image intensifier of this invention, for example
The linear fluorescence intensifier tube is constructed as shown in FIGS. 1 and 2, and FIG. 2 shows an enlarged view of the main part of FIG. 1. That is, the envelope of the X-ray fluorescence multiplier tube according to the present invention includes an X-ray entrance window 11, a body 21 joined to the X-ray entrance window 11, and a ring joined to the body 21. The output section 41 has a body 31. In this case, the X-ray entrance window 11 is formed into an outwardly convex surface or a convex surface close to a flat surface, so that the flange 11
a, and is made of aluminum or aluminum alloy. The body 21 is cylindrical, has flanges 21a and 21b at both ends, and is made of aluminum or aluminum alloy. Furthermore, the output part 41 is made of glass, and the ring body 31 is made of a flange 31a.
It is made of Kovar (cobalt alloy). As is clear from the figure, the outer shape of the flange 21b of the body 21 needs to be larger than the outer shape of the flange 31a of the ring body 31, and a difference in the outer dimensions of about 10 mm is appropriate. Moreover, the tip of the collar 31a of the ring body 31 is formed into a wedge shape so that the temperature of the ring body 31 can easily rise during welding, which will be described later. In addition, in the figure,
51 is a filler material made of aluminum or aluminum alloy, and is used to connect the collar 21b of the body 21 and the ring body 31.
It is in contact with the flange 31a and plays the role of airtight sealing.
このような外囲器６１内には、図示していない
が、Ｘ線入射窓部１１の内側には入力面が配設さ
れ、出力部４１の内側には出力面及び陽極が設け
られ、胴部２１内壁に沿つて集束電極が配設され
ている。 Although not shown in the envelope 61 , an input surface is provided inside the X-ray entrance window 11, an output surface and an anode are provided inside the output section 41, and a body A focusing electrode is arranged along the inner wall of the portion 21 .
さて、上記の外囲器６１の組立に当つては、先
ずＸ線入射窓１１の鍔１１ａと胴部２１の鍔２１
ａを溶接する。一方、出力部４１を環体３１の一
端に接合した後、胴部２１の鍔２１ｂと環体３１
の鍔３１ａを溶接する。この溶接は不活性ガスア
ーク溶接（AC―TIG溶接）であり、環体３１の
鍔３１ａの外形より１mm程度外側に不活性ガスア
ークを当て、胴部２１を溶解させながら、溶解し
たアルミニウムで環体３１の鍔３１ａ先端を濡ら
し、溶解したアルミニウムで環体３１を包んでい
く。この時、アルミニウム又はアルミニウム合金
よりなる溶加材５１を使用した方が継手強度は強
く気密性が向上する。 Now, in assembling the above-mentioned envelope 61 , first, the flange 11a of the X-ray entrance window 11 and the flange 21 of the body 21 are assembled.
Weld a. On the other hand, after joining the output part 41 to one end of the ring body 31, the collar 21b of the body part 21 and the ring body 31 are connected to each other.
Weld the collar 31a. This welding is inert gas arc welding (AC-TIG welding), in which an inert gas arc is applied to an area about 1 mm outside the outer shape of the collar 31a of the ring body 31, and while the body 21 is melted, the molten aluminum is applied to the ring body 31. Wet the tip of the collar 31a and wrap the ring body 31 in molten aluminum. At this time, if the filler metal 51 made of aluminum or aluminum alloy is used, the joint strength will be stronger and the airtightness will be improved.
この発明のＸ線像増倍管の製造方法は上記説明
及び図示のように構成されているので、従来見ら
れた溶接部は脆いという欠点が改善され、十分な
真空気密が行なわれると共に、大気圧に十分耐え
る接合が行なわれる。而も製造容易にして安価な
ことは言う迄もない。 Since the method for manufacturing an X-ray image intensifier according to the present invention is configured as described above and shown in the drawings, the conventional disadvantage of brittle welded parts is improved, sufficient vacuum sealing is achieved, and large A bond is formed that is sufficiently resistant to atmospheric pressure. Needless to say, it is easy to manufacture and inexpensive.
尚、第３図乃至第８図はこの発明の変形例を示
したものである。即ち、第３図はコバールの環体
３１に予め約1μmのニツケルメツキ層３２を施
し、更にこのニツケルメツキ層３２の上に銅メツ
キ層３３を設け、AC―TIG溶接で前述した方法
により溶接を行なう。これによると更に溶解した
アルミニウムの濡れ性が改善できる。 Incidentally, FIGS. 3 to 8 show modified examples of this invention. That is, in FIG. 3, a nickel plating layer 32 of about 1 .mu.m thick is applied in advance to a Kovar ring 31, a copper plating layer 33 is further provided on the nickel plating layer 32, and welding is performed by AC-TIG welding using the method described above. According to this, the wettability of molten aluminum can be further improved.
第４図はコバールの環体３１に銅メツキ層３４
を施し、溶加材５１を用いて気密性、強度を向上
させたものである。 Figure 4 shows a copper plating layer 34 on a Kovar ring 31.
, and a filler metal 51 is used to improve airtightness and strength.
第５図は、胴部２１の板厚が１mm以下である場
合、溶接時に胴部２１の変形をさせるため、中間
に１mm以上の板厚を有するアルミニウム或いはア
ルミニウム合金よりなるアルミリング７１を介在
させ、ニツケル、銅の順にメツキされたメツキ層
３５とアルミリング７１を溶加材５１を用いて
AC―TIG溶接を行ない、次に胴部２１の鍔２１
ｂとアルミリング７１を溶接している。 FIG. 5 shows that when the body part 21 has a thickness of 1 mm or less, an aluminum ring 71 made of aluminum or aluminum alloy and having a thickness of 1 mm or more is interposed in the middle in order to deform the body part 21 during welding. , nickel, and copper in this order, and the aluminum ring 71 using the filler metal 51.
AC-TIG welding is performed, and then the tsuba 21 of the body 21 is
b and aluminum ring 71 are welded.
第６図はコバールの環体３１と胴部２１との間
にステンレスよりなる中間胴部８１を介在させ、
中間胴部８１の胴部２１側の端をニツケルメツキ
層、銅メツキ層よりなるメツキ層３５を設け、中
間胴部８１とアルミ胴部２１を上記に示す方法で
AC―TIG溶接を行なう。一方、中間胴部８１と
コバール環体３１は通常のDC（直流）―TIG溶接
で接合する。 FIG. 6 shows an intermediate body part 81 made of stainless steel interposed between the Kovar ring body 31 and the body part 21,
A plating layer 35 consisting of a nickel plating layer and a copper plating layer is provided on the end of the intermediate body part 81 on the body part 21 side, and the intermediate body part 81 and the aluminum body part 21 are formed by the method shown above.
Perform AC-TIG welding. On the other hand, the intermediate body portion 81 and the Kovar ring body 31 are joined by normal DC (direct current)-TIG welding.
第７図はアルミニウム又はアルミニウム合金よ
りなる凸構造のＸ線入射窓部１１にコバールより
なるか或いはステンレスよりなる胴部２２を前述
した方法で胴部２２にメツキ層を設け溶接した例
である。 FIG. 7 shows an example in which a body part 22 made of Kovar or stainless steel is attached to a convex X-ray entrance window part 11 made of aluminum or an aluminum alloy, and a plating layer is provided and welded to the body part 22 by the method described above.
第８図は第７図で示した例に対しアルミニウム
あるいはアルミニウム合金よりなるアルミリング
９１を介在させ前述した方法により溶接した例で
ある。 FIG. 8 shows an example in which an aluminum ring 91 made of aluminum or an aluminum alloy is interposed in the example shown in FIG. 7 and welded by the method described above.
以上説明したようにこの発明によれば、工業的
価値大なるＸ線像増倍管の製造方法を提供するこ
とができる。 As explained above, according to the present invention, it is possible to provide a method for manufacturing an X-ray image intensifier tube of great industrial value.
第１図はこの発明の一実施例に係るＸ線像増倍
管を示す断面図、第２図は第１図の要部を拡大し
て示す断面図、第３図乃至第８図はいずれもこの
発明の変形例を示す断面図である。
１１…Ｘ線入射窓部、２１…胴部、３１…環
体、４１…出力部、５１…溶加材、１１ａ，２１
ａ，２１ｂ，３１ａ…鍔、６１…外囲器。
FIG. 1 is a cross-sectional view showing an X-ray image intensifier according to an embodiment of the present invention, FIG. 2 is a cross-sectional view showing an enlarged main part of FIG. 1, and FIGS. 3 to 8 are FIG. 7 is a cross-sectional view showing a modification of the present invention. DESCRIPTION OF SYMBOLS 11... X-ray entrance window part, 21... Body part, 31... Annular body, 41... Output part, 51... Melt material, 11a, 21
a, 21b, 31a...Tsuba, 61 ...Envelope.
Claims (1)
ニウム合金からなるＸ線入射窓部と、このＸ線入
射窓部に接合された筒状のアルミニウム又はアル
ミニウム合金からなる胴部と、この胴部に接合さ
れたコバール環体を有するガラス製出力部とより
構成されてなるＸ線像増倍管の製造方法におい
て、 前記胴部と前記環体との接合部にそれぞれ鍔を
設け、且つ環体の鍔を胴部の鍔より短かくすると
共にくさび状に形成し、溶融部が前記環体の鍔部
を覆つて気密接合を得ることを特徴としたＸ線像
増倍管の製造方法。[Scope of Claims] 1. The envelope includes a convex X-ray entrance window made of aluminum or aluminum alloy, and a cylindrical body made of aluminum or aluminum alloy joined to the X-ray entrance window. In this method of manufacturing an X-ray image intensifier tube, the tube includes a glass output section having a Kovar ring joined to the body, and a collar is provided at each joint between the body and the ring. , and the flange of the annular body is made shorter than the flange of the body and is formed into a wedge shape, and the fused portion covers the flange of the annular body to obtain an airtight seal. Production method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6993280A JPS56167246A (en) | 1980-05-26 | 1980-05-26 | X-ray image intensifier and its manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6993280A JPS56167246A (en) | 1980-05-26 | 1980-05-26 | X-ray image intensifier and its manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56167246A JPS56167246A (en) | 1981-12-22 |
| JPS6346945B2 true JPS6346945B2 (en) | 1988-09-19 |
Family
ID=13416933
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6993280A Granted JPS56167246A (en) | 1980-05-26 | 1980-05-26 | X-ray image intensifier and its manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56167246A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2565407B1 (en) * | 1984-05-30 | 1987-07-24 | Thomson Csf | VACUUM SHELL FOR RADIATION IMAGE ENHANCER TUBE AND METHOD FOR MANUFACTURING SUCH A SHELL |
| FR2576146B1 (en) * | 1985-01-15 | 1987-02-06 | Thomson Csf | VACUUM ENVELOPE FOR RADIOLOGICAL IMAGE INTENSIFIER TUBE |
-
1980
- 1980-05-26 JP JP6993280A patent/JPS56167246A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56167246A (en) | 1981-12-22 |
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