JPS6346840U - - Google Patents
Info
- Publication number
- JPS6346840U JPS6346840U JP13955586U JP13955586U JPS6346840U JP S6346840 U JPS6346840 U JP S6346840U JP 13955586 U JP13955586 U JP 13955586U JP 13955586 U JP13955586 U JP 13955586U JP S6346840 U JPS6346840 U JP S6346840U
- Authority
- JP
- Japan
- Prior art keywords
- discharge tank
- inlet
- cooling
- cooling plate
- cooling device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001816 cooling Methods 0.000 claims description 13
- 239000000758 substrate Substances 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
Landscapes
- Control Of Temperature (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986139555U JPH062262Y2 (ja) | 1986-09-10 | 1986-09-10 | 基板の冷却装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986139555U JPH062262Y2 (ja) | 1986-09-10 | 1986-09-10 | 基板の冷却装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6346840U true JPS6346840U (th) | 1988-03-30 |
| JPH062262Y2 JPH062262Y2 (ja) | 1994-01-19 |
Family
ID=31045572
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986139555U Expired - Lifetime JPH062262Y2 (ja) | 1986-09-10 | 1986-09-10 | 基板の冷却装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH062262Y2 (th) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58176936A (ja) * | 1982-04-09 | 1983-10-17 | Fujitsu Ltd | 基板冷却方法 |
| JPS59149630U (ja) * | 1983-03-25 | 1984-10-06 | 株式会社日立製作所 | ウエハ処理電極 |
-
1986
- 1986-09-10 JP JP1986139555U patent/JPH062262Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58176936A (ja) * | 1982-04-09 | 1983-10-17 | Fujitsu Ltd | 基板冷却方法 |
| JPS59149630U (ja) * | 1983-03-25 | 1984-10-06 | 株式会社日立製作所 | ウエハ処理電極 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH062262Y2 (ja) | 1994-01-19 |