JPS6346472U - - Google Patents
Info
- Publication number
- JPS6346472U JPS6346472U JP1986139695U JP13969586U JPS6346472U JP S6346472 U JPS6346472 U JP S6346472U JP 1986139695 U JP1986139695 U JP 1986139695U JP 13969586 U JP13969586 U JP 13969586U JP S6346472 U JPS6346472 U JP S6346472U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust system
- gas source
- liquid nitrogen
- nitrogen trap
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986139695U JPS6346472U (enExample) | 1986-09-10 | 1986-09-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986139695U JPS6346472U (enExample) | 1986-09-10 | 1986-09-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6346472U true JPS6346472U (enExample) | 1988-03-29 |
Family
ID=31045842
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986139695U Pending JPS6346472U (enExample) | 1986-09-10 | 1986-09-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6346472U (enExample) |
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1986
- 1986-09-10 JP JP1986139695U patent/JPS6346472U/ja active Pending