JPS6346467U - - Google Patents
Info
- Publication number
- JPS6346467U JPS6346467U JP14050486U JP14050486U JPS6346467U JP S6346467 U JPS6346467 U JP S6346467U JP 14050486 U JP14050486 U JP 14050486U JP 14050486 U JP14050486 U JP 14050486U JP S6346467 U JPS6346467 U JP S6346467U
- Authority
- JP
- Japan
- Prior art keywords
- sputter etching
- sputtering
- chamber
- sub
- partial pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000992 sputter etching Methods 0.000 claims 4
- 238000004544 sputter deposition Methods 0.000 claims 3
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14050486U JPS6346467U (enExample) | 1986-09-16 | 1986-09-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14050486U JPS6346467U (enExample) | 1986-09-16 | 1986-09-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6346467U true JPS6346467U (enExample) | 1988-03-29 |
Family
ID=31047413
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14050486U Pending JPS6346467U (enExample) | 1986-09-16 | 1986-09-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6346467U (enExample) |
-
1986
- 1986-09-16 JP JP14050486U patent/JPS6346467U/ja active Pending