JPS6346210Y2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a moving stage, and more particularly to a moving stage in which a table that moves under guidance is positioned at a predetermined position by an external driving force, that is, a driving actuator.

Conventionally, when positioning this type of moving stage discretely, especially when positioning it at two locations, an air cylinder or the like was used to turn it on and off (ON/OFF).
OFF) control drive structure is often adopted.
In addition, if positioning is to be performed at three or four locations, either directly connect two stages of movement stages driven by ON/OFF control (first configuration), or adopt a drive structure for continuous positioning using a motor and feed screw. (second configuration), or a structure using an intermediate stop type air cylinder (third configuration). 1st
According to the configuration, it becomes complicated because two moving stages are required, and the overall size becomes larger than necessary. According to the second configuration,
Although accurate positioning is possible at any desired position, when positioning is performed at three or four positions, the control section has excessive functions, resulting in poor cost performance. According to the third configuration, it is a relatively simple configuration compared to other configurations, but the stopping accuracy, especially at the intermediate position of the stroke, is limited to about ±1 mm, and the interval between the stopping positions is also a minimum of several millimeters. There are issues such as:

The purpose of this invention is to solve these drawbacks and
It can be constructed from simple and extremely easily available parts,
The purpose of the present invention is to provide a moving stage capable of positioning at three or four locations.

According to the present invention, by providing a pair of racks that mesh with gears rotatably attached to a table that can slide along a guide, it is possible to control the entrance and exit of each rack and position the racks at four locations. A simple moving stage can be obtained.

The present invention provides a moving stage that moves along a linear guide by obtaining a driving force from the outside, including a table that slides along the linear guide, a gear that is rotatably attached to the table, and a gear that is relative to the gear. The moving stage is characterized by comprising a pair of racks that engage with each other at opposing positions and are movable in parallel to the sliding direction of the table.

Next, the present invention will be explained in detail with reference to the drawings.

FIG. 1 is a perspective view showing the configuration of a moving stage according to an embodiment of the present invention. In the figure, this moving stage has a pair of blocks 5 at both ends of a plate 4.
1 and 52 are fixed and support two guide shafts 61 and 62. The table 1 is slidably restrained by guide shafts 61 and 62. The gear 21 and the gear 22 are fixed to each other and are rotatably restrained to a shaft 15 fixed to the table 1. The racks 31 and 32 are provided at positions where they mesh with the gears 21 and 22, respectively, and the guide grooves 311, 312 and 321,
322 is fixed to the table 1 with pins 11 and 12
and 13, 14 to be slidably supported in the axial direction of the guide shafts 61, 62. Cylinder 81 and cylinder 82 as drive actuators
is fixed to the block 52 via the bracket 7, and the rod 8 of the cylinder 81 and cylinder 82
11 and the tips of the rods 821 are fixed to the racks 31 and 321.

Here, the amount of movement of the table 1 is C, and the direction in which the rods 811 and 821 of the cylinders 81 and 82 come out is the positive direction.
When both rods 811 and 821 are in the in state, S ₁ =S ₂ =O, and when each rod 811 and 821 is in the out state, S ₁ =l ₁ , S ₂ =l ₂ respectively. If the pitch circle diameters of gears 21 and 22 are _d1 and _d2 , when rod 811 is in the extended state and rod 821 is in, C = _d2 · _l1 /( _d1 + _d2 ). When rod 811 is in and rod 821 is in the extended state, C = _d1 · _l2 /( _d1 + _d2 ). When rods 811 and 821 are in the extended state, C = ( _d2 · _l1 + _d1 · _l2 )/( _d1 + _d2 ). It is therefore possible to position table 1 at four points, including C = O when rods 811 and 821 are in the extended state.

In this embodiment, even if the gear 21 and the gear 22 have the same diameter (d ₁ =d ₂ ), positioning at four locations is similarly possible, but this is nothing but the use of one gear. Cylinder 8 in this embodiment
When the racks 31 and 32 are continuously fed by screw feeding or the like instead of the gear 21 and the cylinder 82, the pitch diameter d ₂ of the gear 22 is selected to be sufficiently large compared to the pitch diameter d ₁ of the gear 21. It is also possible to use the movement of the rack 32 as a coarse movement feed of the table 1, and the movement of the rack 32 as a fine movement feed of the table 1.

As explained above, according to the present invention, by independently driving a pair of racks that mesh with gears provided on the table, the table can be positioned at four locations by combining whether or not each rack is driven. In addition, since the drive source of the rack does not need to be fixed to a moving part, there is no problem of swinging hoses or cables, etc., and each gear can be fixed by fixing two gears with an appropriate pitch diameter ratio. If the table is driven by a pair of racks, it can be used as a moving stage that allows coarse and fine movement.As is clear from the fact that the amount of table movement is smaller than the movement of each rack, the driving force can be Since there is an effect of increasing the amount of power, it is possible to select a compact drive source such as a cylinder.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing the configuration of a moving stage according to an embodiment of the present invention. In the figure, 1...table, 7...bracket, 11, 12, 13, 14...pin, 15...
...shaft, 21, 22... gear, 31, 32...
...Rack, 51, 52...Block, 61, 62
... Guide shaft, 81, 82 ... Cylinder, 311,
312, 321, 322...Guide groove, 811, 8
21... Rod.

Claims (1)

[Scope of utility model registration request] A table that slides along a linear guide, a pair of gears that are fixed to each other and rotatably attached to a common rotating shaft of the table, and the table that meshes with each other at positions facing the pair of gears. 1. A moving stage comprising: a pair of racks that move along a sliding direction; and a pair of drive actuators that drive each of the pair of racks by a predetermined amount of movement.