JPS634560U - - Google Patents
Info
- Publication number
- JPS634560U JPS634560U JP9925886U JP9925886U JPS634560U JP S634560 U JPS634560 U JP S634560U JP 9925886 U JP9925886 U JP 9925886U JP 9925886 U JP9925886 U JP 9925886U JP S634560 U JPS634560 U JP S634560U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- substrate
- recess
- supply container
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims 5
- 239000000758 substrate Substances 0.000 claims 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- 229910052742 iron Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Dry Development In Electrophotography (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9925886U JPS634560U (enrdf_load_html_response) | 1986-06-28 | 1986-06-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9925886U JPS634560U (enrdf_load_html_response) | 1986-06-28 | 1986-06-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS634560U true JPS634560U (enrdf_load_html_response) | 1988-01-13 |
Family
ID=30967970
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9925886U Pending JPS634560U (enrdf_load_html_response) | 1986-06-28 | 1986-06-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS634560U (enrdf_load_html_response) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0487691A (ja) * | 1990-07-27 | 1992-03-19 | Hitachi Kiden Kogyo Ltd | 汚泥掻寄機能を備えた曝気装置 |
-
1986
- 1986-06-28 JP JP9925886U patent/JPS634560U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0487691A (ja) * | 1990-07-27 | 1992-03-19 | Hitachi Kiden Kogyo Ltd | 汚泥掻寄機能を備えた曝気装置 |
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