JPS6344446U - - Google Patents

Info

Publication number
JPS6344446U
JPS6344446U JP13711786U JP13711786U JPS6344446U JP S6344446 U JPS6344446 U JP S6344446U JP 13711786 U JP13711786 U JP 13711786U JP 13711786 U JP13711786 U JP 13711786U JP S6344446 U JPS6344446 U JP S6344446U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
photomask
indicator portion
mask
facet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13711786U
Other languages
English (en)
Japanese (ja)
Other versions
JPH039327Y2 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13711786U priority Critical patent/JPH039327Y2/ja
Publication of JPS6344446U publication Critical patent/JPS6344446U/ja
Application granted granted Critical
Publication of JPH039327Y2 publication Critical patent/JPH039327Y2/ja
Expired legal-status Critical Current

Links

JP13711786U 1986-09-06 1986-09-06 Expired JPH039327Y2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13711786U JPH039327Y2 (https=) 1986-09-06 1986-09-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13711786U JPH039327Y2 (https=) 1986-09-06 1986-09-06

Publications (2)

Publication Number Publication Date
JPS6344446U true JPS6344446U (https=) 1988-03-25
JPH039327Y2 JPH039327Y2 (https=) 1991-03-08

Family

ID=31040868

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13711786U Expired JPH039327Y2 (https=) 1986-09-06 1986-09-06

Country Status (1)

Country Link
JP (1) JPH039327Y2 (https=)

Also Published As

Publication number Publication date
JPH039327Y2 (https=) 1991-03-08

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