JPS634379U - - Google Patents
Info
- Publication number
- JPS634379U JPS634379U JP9771686U JP9771686U JPS634379U JP S634379 U JPS634379 U JP S634379U JP 9771686 U JP9771686 U JP 9771686U JP 9771686 U JP9771686 U JP 9771686U JP S634379 U JPS634379 U JP S634379U
- Authority
- JP
- Japan
- Prior art keywords
- cooling panel
- attached
- cryopump
- cold stage
- heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 claims 1
- 239000003507 refrigerant Substances 0.000 claims 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9771686U JPS634379U (enExample) | 1986-06-27 | 1986-06-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9771686U JPS634379U (enExample) | 1986-06-27 | 1986-06-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS634379U true JPS634379U (enExample) | 1988-01-12 |
Family
ID=30964959
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9771686U Pending JPS634379U (enExample) | 1986-06-27 | 1986-06-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS634379U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008101576A (ja) * | 2006-10-20 | 2008-05-01 | Toppan Printing Co Ltd | クライオポンプ及びそれを用いた真空装置 |
-
1986
- 1986-06-27 JP JP9771686U patent/JPS634379U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008101576A (ja) * | 2006-10-20 | 2008-05-01 | Toppan Printing Co Ltd | クライオポンプ及びそれを用いた真空装置 |