JPS6343426U - - Google Patents
Info
- Publication number
- JPS6343426U JPS6343426U JP1986134511U JP13451186U JPS6343426U JP S6343426 U JPS6343426 U JP S6343426U JP 1986134511 U JP1986134511 U JP 1986134511U JP 13451186 U JP13451186 U JP 13451186U JP S6343426 U JPS6343426 U JP S6343426U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- opposing plate
- semiconductor manufacturing
- opposing
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986134511U JPS6343426U (enExample) | 1986-09-02 | 1986-09-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986134511U JPS6343426U (enExample) | 1986-09-02 | 1986-09-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6343426U true JPS6343426U (enExample) | 1988-03-23 |
Family
ID=31035816
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986134511U Pending JPS6343426U (enExample) | 1986-09-02 | 1986-09-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6343426U (enExample) |
-
1986
- 1986-09-02 JP JP1986134511U patent/JPS6343426U/ja active Pending
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