JPS6343426U - - Google Patents

Info

Publication number
JPS6343426U
JPS6343426U JP13451186U JP13451186U JPS6343426U JP S6343426 U JPS6343426 U JP S6343426U JP 13451186 U JP13451186 U JP 13451186U JP 13451186 U JP13451186 U JP 13451186U JP S6343426 U JPS6343426 U JP S6343426U
Authority
JP
Japan
Prior art keywords
wafer
opposing plate
semiconductor manufacturing
opposing
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13451186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13451186U priority Critical patent/JPS6343426U/ja
Publication of JPS6343426U publication Critical patent/JPS6343426U/ja
Pending legal-status Critical Current

Links

JP13451186U 1986-09-02 1986-09-02 Pending JPS6343426U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13451186U JPS6343426U (enrdf_load_stackoverflow) 1986-09-02 1986-09-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13451186U JPS6343426U (enrdf_load_stackoverflow) 1986-09-02 1986-09-02

Publications (1)

Publication Number Publication Date
JPS6343426U true JPS6343426U (enrdf_load_stackoverflow) 1988-03-23

Family

ID=31035816

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13451186U Pending JPS6343426U (enrdf_load_stackoverflow) 1986-09-02 1986-09-02

Country Status (1)

Country Link
JP (1) JPS6343426U (enrdf_load_stackoverflow)

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