JPS6342525Y2 - - Google Patents
Info
- Publication number
- JPS6342525Y2 JPS6342525Y2 JP14742683U JP14742683U JPS6342525Y2 JP S6342525 Y2 JPS6342525 Y2 JP S6342525Y2 JP 14742683 U JP14742683 U JP 14742683U JP 14742683 U JP14742683 U JP 14742683U JP S6342525 Y2 JPS6342525 Y2 JP S6342525Y2
- Authority
- JP
- Japan
- Prior art keywords
- roller
- disk
- rotary disk
- rotary
- end surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000002093 peripheral effect Effects 0.000 claims description 9
- 235000012431 wafers Nutrition 0.000 description 15
- 238000005468 ion implantation Methods 0.000 description 4
- 239000003638 chemical reducing agent Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14742683U JPS6054324U (ja) | 1983-09-21 | 1983-09-21 | 回転デイスク機構 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14742683U JPS6054324U (ja) | 1983-09-21 | 1983-09-21 | 回転デイスク機構 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6054324U JPS6054324U (ja) | 1985-04-16 |
| JPS6342525Y2 true JPS6342525Y2 (tr) | 1988-11-08 |
Family
ID=30327846
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14742683U Granted JPS6054324U (ja) | 1983-09-21 | 1983-09-21 | 回転デイスク機構 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6054324U (tr) |
-
1983
- 1983-09-21 JP JP14742683U patent/JPS6054324U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6054324U (ja) | 1985-04-16 |
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