JPS6342142Y2 - - Google Patents

Info

Publication number
JPS6342142Y2
JPS6342142Y2 JP18869184U JP18869184U JPS6342142Y2 JP S6342142 Y2 JPS6342142 Y2 JP S6342142Y2 JP 18869184 U JP18869184 U JP 18869184U JP 18869184 U JP18869184 U JP 18869184U JP S6342142 Y2 JPS6342142 Y2 JP S6342142Y2
Authority
JP
Japan
Prior art keywords
processing liquid
processing
liquid supply
pipe
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18869184U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61103476U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18869184U priority Critical patent/JPS6342142Y2/ja
Publication of JPS61103476U publication Critical patent/JPS61103476U/ja
Application granted granted Critical
Publication of JPS6342142Y2 publication Critical patent/JPS6342142Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electroplating Methods And Accessories (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
JP18869184U 1984-12-12 1984-12-12 Expired JPS6342142Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18869184U JPS6342142Y2 (enrdf_load_stackoverflow) 1984-12-12 1984-12-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18869184U JPS6342142Y2 (enrdf_load_stackoverflow) 1984-12-12 1984-12-12

Publications (2)

Publication Number Publication Date
JPS61103476U JPS61103476U (enrdf_load_stackoverflow) 1986-07-01
JPS6342142Y2 true JPS6342142Y2 (enrdf_load_stackoverflow) 1988-11-04

Family

ID=30746155

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18869184U Expired JPS6342142Y2 (enrdf_load_stackoverflow) 1984-12-12 1984-12-12

Country Status (1)

Country Link
JP (1) JPS6342142Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6937669B2 (ja) * 2017-11-21 2021-09-22 富士通インターコネクトテクノロジーズ株式会社 基板処理装置

Also Published As

Publication number Publication date
JPS61103476U (enrdf_load_stackoverflow) 1986-07-01

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