JPS6341782U - - Google Patents

Info

Publication number
JPS6341782U
JPS6341782U JP13579486U JP13579486U JPS6341782U JP S6341782 U JPS6341782 U JP S6341782U JP 13579486 U JP13579486 U JP 13579486U JP 13579486 U JP13579486 U JP 13579486U JP S6341782 U JPS6341782 U JP S6341782U
Authority
JP
Japan
Prior art keywords
burn
door
test
automatic opening
opening device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13579486U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13579486U priority Critical patent/JPS6341782U/ja
Publication of JPS6341782U publication Critical patent/JPS6341782U/ja
Pending legal-status Critical Current

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  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本考案の恒温槽の正面図、第２図は自
動開放装置の動作説明図である。 １：恒温槽、２：扉、３：自動開放装置、４：
ロツク装置。 FIG. 1 is a front view of the thermostatic chamber of the present invention, and FIG. 2 is an explanatory diagram of the operation of the automatic opening device. 1: Constant temperature chamber, 2: Door, 3: Automatic opening device, 4:
Locking device.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 半導体のバーイン試験を行う恒温槽において、
扉を自動的に開放する自動開放装置と、この自動
開放装置の開放力に抗して扉の閉塞を保持するロ
ツク装置とを設け、前記ロツク装置にはバーイン
試験の開始時に加温電源を接にすると同時にロツ
クし、バーイン試験終了時に加温電源を断にする
と同時にロツク解除する機構を設けたことを特徴
とする自動開放装置付恒温槽扉。 In a constant temperature chamber that performs semiconductor burn-in tests,
An automatic opening device that automatically opens the door and a locking device that holds the door closed against the opening force of the automatic opening device are provided, and a heating power source is connected to the locking device at the start of the burn-in test. A thermostatic chamber door with an automatic opening device, characterized in that it is equipped with a mechanism that locks the door at the same time as the burn-in test is completed, and releases the lock at the same time as the heating power is turned off at the end of the burn-in test.
JP13579486U 1986-09-03 1986-09-03 Pending JPS6341782U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13579486U JPS6341782U (en) 1986-09-03 1986-09-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13579486U JPS6341782U (en) 1986-09-03 1986-09-03

Publications (1)

Publication Number Publication Date
JPS6341782U true JPS6341782U (en) 1988-03-18

Family

ID=31038319

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13579486U Pending JPS6341782U (en) 1986-09-03 1986-09-03

Country Status (1)

Country Link
JP (1) JPS6341782U (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5928347A (en) * 1982-08-09 1984-02-15 Nec Corp Screening device for semiconductor device
JPS6157875B2 (en) * 1978-03-30 1986-12-09 Kao Corp

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6157875B2 (en) * 1978-03-30 1986-12-09 Kao Corp
JPS5928347A (en) * 1982-08-09 1984-02-15 Nec Corp Screening device for semiconductor device

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