JPS6341158U - - Google Patents

Info

Publication number
JPS6341158U
JPS6341158U JP1986134702U JP13470286U JPS6341158U JP S6341158 U JPS6341158 U JP S6341158U JP 1986134702 U JP1986134702 U JP 1986134702U JP 13470286 U JP13470286 U JP 13470286U JP S6341158 U JPS6341158 U JP S6341158U
Authority
JP
Japan
Prior art keywords
light
mask
thin film
distinctive
identification mark
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1986134702U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986134702U priority Critical patent/JPS6341158U/ja
Publication of JPS6341158U publication Critical patent/JPS6341158U/ja
Pending legal-status Critical Current

Links

JP1986134702U 1986-09-02 1986-09-02 Pending JPS6341158U (US06346242-20020212-C00066.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986134702U JPS6341158U (US06346242-20020212-C00066.png) 1986-09-02 1986-09-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986134702U JPS6341158U (US06346242-20020212-C00066.png) 1986-09-02 1986-09-02

Publications (1)

Publication Number Publication Date
JPS6341158U true JPS6341158U (US06346242-20020212-C00066.png) 1988-03-17

Family

ID=31036188

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986134702U Pending JPS6341158U (US06346242-20020212-C00066.png) 1986-09-02 1986-09-02

Country Status (1)

Country Link
JP (1) JPS6341158U (US06346242-20020212-C00066.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002116533A (ja) * 2000-10-11 2002-04-19 Dainippon Printing Co Ltd エリアコード付きフォトマスク用ブランクスとエリアコード付きフォトマスク、およびフォトマスクの製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58144829A (ja) * 1982-02-22 1983-08-29 Hoya Corp フオトマスクブランクス用基板のマ−キング方法
JPS5915938A (ja) * 1982-07-19 1984-01-27 Hoya Corp マ−キングを施されたフオトマスクブランクス用基板

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58144829A (ja) * 1982-02-22 1983-08-29 Hoya Corp フオトマスクブランクス用基板のマ−キング方法
JPS5915938A (ja) * 1982-07-19 1984-01-27 Hoya Corp マ−キングを施されたフオトマスクブランクス用基板

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002116533A (ja) * 2000-10-11 2002-04-19 Dainippon Printing Co Ltd エリアコード付きフォトマスク用ブランクスとエリアコード付きフォトマスク、およびフォトマスクの製造方法

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